US3783052A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Process for manufacturing integrated circuits on an alumina substrate
Assignee: Motorola Solutions Inc
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Filing: 1972-11-10
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Granted: 1974-01-01
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Expires: 1992-11-10
Abstract
Abstract THERE IS DISCLOSED A PROCESS FOR MANUFACTURING INTEGRATED CIRCUITS, PARTICULARLY COMPLEMENTARY INTEGRATED CIRCUITS, IN A SEMICONDUCTOR MATERIAL WHICH IS DEPOSITED UPON AN INSULATING ALUMINUM OXIDE SUBSTRATE. THE PROCESS INCLUDES THE STEPS OF COVERING THE SEMICONDUCTOR MATERIAL WITH A MASKING LAYER HAVING WINDOWS THEREIN AND THEN HEATING THE SUBSTRATE IN A HYDROGEN ATMOSPHERE. THE HEATING STEP CAUSES AN UP-DIFFUSION OF ALUMINUM INTO THE SEMICONDUCTOR BODY TO FORM P-TYPE REGIONS UNDERLYING THE AREAS EXPOSED TO THE HYDROGEN ATMOSPHERE THROUGH THE WINDOWS.
Inventors
- 👤 J Fisher
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 12:21
CPC Classifications
H; H10; H10D; H10D86/00; H10D86/01; H10D86/03; H10P; H10P32/00; H10P32/10; H10P32/14; H10P32/1408; H10P32/141; H10P32/17; H10P32/171; Y; Y10; Y10S; Y10S148/00; Y10S148/049; Y10S148/053; Y10S148/085; Y10S148/113; Y10S148/114; Y10S148/15; Y10S438/00; Y10S438/967
Claims Analysis
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References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1976-12-31 | 1977-07-02 | 1978-01-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1980-12-31 | 1981-07-02 | 1982-01-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1984-12-31 | 1985-07-02 | 1986-01-01 | $7700.00 | Window Closed / Lapsed |