US3781152A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Apparatus for precipitating a layer of semiconductor material from a gaseous compound of the semiconductor material
Assignee: Siemens AG
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Filing: 1972-01-31
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Granted: 1973-12-25
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Expires: 1992-01-31
Abstract
Abstract Apparatus for producing a hollow semiconductor body, particularly of silicon. Semiconductor is precipitated on the outer surface of a heated carrier body. The carrier body is thereafter removed without damaging the semiconductor body.
Inventors
- 👤 W Keller
- 👤 A Kersting
- 👤 K Reuschel
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 07:40
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/01
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
138 words
Apparatus for producing a tubular silicon body comprising a reaction chamber, means on said reaction chamber for introducing a reaction gas, a carrier body in the form of a hollow fingertype element extending into said reaction chamber, said element being made of an electricity conducting material and defining a substrate upon which said tubular silicon body is precipitated, means detachably mounting said element in said reaction chamber, said hollow finger-like element having a closed longitudinal end disposed in said reaction chamber whereby the hollow interior of said element is isolated from the interior of said reaction chamber, a first electrical conductor disposed in the hollow interior of said element and in contact with said closed longitudinal end of said element, and a second electrical conductor in the form of an annulus contacting the opposite end of said element.
Claim 2
Dependent Claim
138 words
Apparatus for producing a tubular silicon body comprising a reaction chamber, means on said reaction chamber for introducing a reaction gas, a carrier body in the form of a hollow fingertype element extending into said reaction chamber, said element being made of an electricity conducting material and defining a substrate upon which said tubular silicon body is precipitated, means detachably mounting said element in said reaction chamber, said hollow finger-like element having a closed longitudinal end disposed in said reaction chamber whereby the hollow interior of said element is isolated from the interior of said reaction chamber, a first electrical conductor disposed in the hollow interior of said element and in contact with said closed longitudinal end of said element, and a second electrical conductor in the form of an annulus contacting the opposite end of said element.
Claim 3
Dependent Claim
11 words
The apparatus of claim 1 wherein said hollow finger is cylindrical.
Claim 4
Dependent Claim
28 words
The apparatus of claim 1, which contains means for supplying the fresh reaction gas, at least at two diametrically opposed locations of the base of the hollow finger.
Claim 5
Dependent Claim
26 words
The apparatus of claim 3, which contains, above the hollow finger in the wall of the reaction chamber, means for the removal of the exhaust gas.
Claim 6
Dependent Claim
25 words
The apparatus of claim 3, wherein the hollow finger is made of a material selected from the group consisting of graphite, tantalum, molybdenum and tungsten.
Claim 7
Dependent Claim
28 words
Apparatus according to claim 1, wherein said element is open at the other longitudinal end thereof, said second electrical conductor being annularly disposed around said open longitudinal end.
Claim 8
Dependent Claim
17 words
Apparatus According to claim 1, wherein said means for detachably mounting said element provides a gas-tight seal.
References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1976-12-24 | 1977-06-25 | 1977-12-25 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1980-12-24 | 1981-06-25 | 1981-12-25 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1984-12-24 | 1985-06-25 | 1985-12-25 | $7700.00 | Window Closed / Lapsed |