Low profile filter system

Claim 2

Apparatus for a clean room, said apparatus comprising, in combination: a low profile plenum chamber housing for hanging from a ceiling, said plenum chamber having a top wall, side walls, and end walls depending downwardly therefrom, and a generally open bottom, the height of said chamber being substantially small compared to either its width and length; an opening in one of said end walls for operable connection with a duct whereby a flow of air under pressure can be introduced into said plenum chamber; a plurality of filters mounted in said plenum chamber in closely adjacent fashion across said open bottom of said plenum chamber such that filtered air flows through substantially the entire cross-sectional area of said open bottom of said plenum chamber when said plenum chamber is charged with pressurized air through said end wall opening; each of said filters having a lower profile than said plenum chamber such that there is a space between said top wall of said plenum chamber and the upper surfaces of said filters; said opening in said one of said end walls being positioned above the level of said upper surfaces of said filters and below the plane of said top; individually controllable air flow control valves positioned in closely adjacent fashion above said filters and below the level of said end wall opening; each of said plurality of air flow control valves having an air flow control area which is coextensive with the flow cross-sectional area of each of said plurality of filters whereby the need for a substantial plenum space between said air flow control valves and said filters is eliminated.

Claim 3

The apparatus of claim 1 in which said air flow control valves are low profile in nature such that they occupy a minimum amount of vertical space.

Claim 4

The apparatus of claim 2 in which said air flow control valves are of the sliding plate type.

Claim 5

The apparatus of claim 3 in which each of said sliding plate air flow control valves comprises a first plate having a plurality of holes therethrough throughout its cross-sectional area; a second plate being slidably positioned on said first plate; said second plate having substantially the same number of holes as said first plate, with said second plate holes being spaced in the same manner as said first plate holes; said sliding plate valve being individually controllable by a means for sliding said second plate with respect to said first plate to thereby vary the extent to which said second plate holes are aligned with said first plate holes.

Claim 6

The apparatus of claim 1 in which each of said plenum chambers includes a bracket secured to each side wall thereof on the exterior of said plenum chamber; the bracket on one side wall extending outwardly therefrom and then downwardly; the bracket on the other side wall extending outwardly therefrom and then upwardly whereby two plenum chambers can be placed in side-by-side adjacent relationship with the said one side wall of one chamber being adjacent the said other side wall of the other chamber the upwardly extending portion of said one side bracket extending into mating engagement with the downwardly projecting portion of said other side bracket of said other plenum chamber; each of said downwardly and upwardly extending portions of said brackets including apertures therein through which means can be passed for simultaneously suspending and joining said adjacent plenum chambers.

Claim 7

The apparatus of claim 5 in which said side walls of said plenum chamber are sloped outwardly whereby said plenum chamber is wider at the bottom than at the top; said brackets being positioned a sufficient distance from the bottom of the plenum chamber that the mating engagement of adjacent brackets on adjacent plenum chambers does not prevent the adjacent side walls from abutting at their bottom portions.

Claim 8

Apparatus for a clean room, said apparatus comprising, in combination: a plenum chamber housing for hanging from a ceiling, said plenum chamber having a top wall, side walls, and end walls depending downwardly therefrom, and a generally open bottom; an opening in one of said end walls for operable connection with a duct whereby a flow of air under positive pressure can be introduced into said plenum chamber; a plurality of filter units mounted in said plenum chamber in closely adjacent fashion across said open bottom of said plenum chamber such that filtered air flows through substantially the entire cross-sectional area of said open bottom of said plenum chamber when said plenum chamber is charged with pressurized air through said end wall opening; each of said filter units having a lower profile than said plenum chamber such that there is a space between said top wall of said plenum chamber and the tops of said filter units; said opening in said one of said end walls being positioned above the level of said tops of said filter units and below the plane of said top; each of said filter units having a frame, a filter mounted in said frame, and a low profile air flow control valve mounted in said frame; said frame having four walls of relatively narrow thickness such that they block only a minimum flow of vertically moving air; said filter being mounted in said frame between said walls and extending across substantially the entire interior cross-sectional area of said frame; said low profile air flow control valve being mounted at the top of said frame and having a flow control area which is coextensive with the cross-sectional area of said filter whereby the need for a substantial plenum space between said low profile air flow control valve and said filter is eliminated.

Claim 9

Apparatus for a clean room, said apparatus comprising, in combination: a plenum chamber housing for hanging from a ceiling, said plenum chamber having a top wall, side walls, and end walls depending downwardly therefrom, and a generally open bottom; an opening in one of said end walls for operable connection with a duct whereby a flow of air under positive pressure can be introduced into said plenum chamber; a plurality of filter units mounted in said plenum chamber in closely adjacent fashion across said open bottom of said plenum chamber such that filtered air flows through substantially the entire cross-sectional area of said open bottom of said plenum chamber when said plenum chamber is charged with pressurized air through said end wall opening; each of said filter units having a lower profile than said plenum chamber such that there is a space between said top wall of said plenum chamber and the tops of said filter units; said opening in said one of said end walls being positioned above the level of said tops of said filter units and below the plane of said top; each of said filter units having a frame, a filter mounted in said frame, and a low profile air flow control valve mounted in said frame; said frame having four walls of relatively narrow thickness such that they block only a minimum flow of vertically moving air; said filter being mounted in said frame between said walls and extending across substantially the entire interior cross-sectional area of said frame; said low profile air flow control valve being mounted at the top of said frame and having a flow control area which is coextensive with the cross-sectional area of said filter whereby the need for a substantial plenum space between said low profile air flow control valve and said filter is eliminated.

Claim 10

The apparatus of claim 7 in which said air flow control valves are of the sliding plate type.

Claim 11

The apparatus of claim 8 in which said sliding plate air flow control valves comprises a first plate having a plurality of holes therethrough throughout its cross-sectional area; a second plate being slidably positioned on said first plate; said second plate having substantially the same number of holes as said first plate, with said second plate holes being spaced in a similar manner as said first plate holes; said sliding plate valve being individually controllable by a means for sliding said second plate with respect to said first plate to thereby vary the extent to which said second plate holes are aligned with said first plate holes.

Claim 12

The apparatus of claim 9 in which said means for controlling the movement of said second sliding plate comprises: means for mounting a cam stud, said means extending between opposite sides of said frame approximately in the middle thereof; a cam stud being rotatably mounted in said mounting means and having a first end accessible from the bottom of said filter unit and having a second end extending to the top of said filter unit; said first plate having an aperture therein through which said second end of said cam stud extends; a cam member being mounted on said second end of said cam stud; said second sliding plate including an aperture therein in which said cam member resides, said aperture in said second sliding plate being sufficiently small that rotation of said cam stud causes said cam member to act against the boundries of said aperture and thereby causes said second sliding plate to move.

Claim 13

The apparatus of claim 7 in which: a lattice of supporting strips extends across said open bottom of said plenum chamber for supporting said plurality of filter units; each cell of said lattice having a boundry corresponding approximately to the shape of said frame of said filter unit whereby said filter unit can be supported by placing said frame on the supporting strips defining a given cell of said lattice; said frame including a downwardly opening channel at the bottom edge thereof and a flexible membrane stretched across the opening of said channel; each of said supporting strips including a sealing flange projecting upwardly therefrom for each of said cells which it partially defines, such that an upwardly projecting sealing flange circumscribes said cell in alignment with said channel in said frame; said sealing flange projecting upwardly into said channel whereby said flexible membrane is stretched over said sealing flange.

Claim 14

The apparatus of claim 7 in which each of said plenum chambers includes a bracket secured to each side wall thereof on the exterior of said plenum chamber; the bracket on one side wall extending outwardly therefrom and then downwardly; the bracket on the other side wall extending outwardly therefrom and then upwardly whereby two of said plenum chambers can be placed in adjacent relationship with the upwardly extending portion of one side bracket on one plenum chamber extending into mating engagement with the downwardly projecting portion of the adjacent side bracket of the adjacent plenum chamber; each of said downwardly and upwardly extending portions of said brackets including apertures therein through which means can be passed for simultaneously suspending and joining said adjacent plenum chambers.

Claim 15

The apparatus of claim 12 in which said side walls of said plenum chamber are sloped outwardly whereby said plenum chamber is wider at the bottom than at the top; said brackets being positioned a sufficient distance from the bottom of the plenum chamber that the mating engagement of adjacent brackets on adjacent plenum chambers does not prevent the adjacent side walls from abutting at their bottom portions.

Claim 16

A low profile filter unit comprising: a frame, a filter mounted in said frame, and a low profile air flow control valve mounted in said frame; said frame haviNg four walls; said filter being mounted in said frame between said walls and extending across the entire interior cross-sectional area of said frame; said low profile air control valve being mounted at the top of and to said frame and having a flow control area which is coextensive with the cross-sectional area of said filter whereby the need for a substantial plenum space between said air flow control valve and said filter is eliminated, said air flow control valve comprising a first plate having a plurality of holes throughout its cross-sectional area and a second plate slidably positioned on said first plate, said second plate having substantially the same number of holes as said first plate, said second plate holes being spaced in a similar manner as said first plate holes, said sliding plate valve being individually controllable by a means for sliding said second plate with respect to said first plate to vary the extent to which said second plate holes are aligned with said first plate holes, said means for controlling the movement of said second sliding plate comprising means for mounting a cam stud, said means extending between opposite sides of said frame approximately in the middle thereof; a cam stud being rotatably mounted in said mounting means and having a first end accessible from the bottom of said filter unit and having a second end extending to the top of said filter unit; said first plate having an aperture therein through which said second end of said cam stud extends; a cam member being mounted on said second end of said cam stud; said second sliding plate including an aperture therethrough in which said cam member resides, said aperture in said second sliding plate being sufficiently small that rotation of said cam stud causes said cam member to act against the boundaries of said aperture and thereby causes said second sliding plate to move.

Claim 17

A low profile filter unit comprising: a frame, a filter mounted in said frame, and a low profile air flow control valve mounted in said frame; said frame haviNg four walls; said filter being mounted in said frame between said walls and extending across the entire interior cross-sectional area of said frame; said low profile air control valve being mounted at the top of and to said frame and having a flow control area which is coextensive with the cross-sectional area of said filter whereby the need for a substantial plenum space between said air flow control valve and said filter is eliminated, said air flow control valve comprising a first plate having a plurality of holes throughout its cross-sectional area and a second plate slidably positioned on said first plate, said second plate having substantially the same number of holes as said first plate, said second plate holes being spaced in a similar manner as said first plate holes, said sliding plate valve being individually controllable by a means for sliding said second plate with respect to said first plate to vary the extent to which said second plate holes are aligned with said first plate holes, said means for controlling the movement of said second sliding plate comprising means for mounting a cam stud, said means extending between opposite sides of said frame approximately in the middle thereof; a cam stud being rotatably mounted in said mounting means and having a first end accessible from the bottom of said filter unit and having a second end extending to the top of said filter unit; said first plate having an aperture therein through which said second end of said cam stud extends; a cam member being mounted on said second end of said cam stud; said second sliding plate including an aperture therethrough in which said cam member resides, said aperture in said second sliding plate being sufficiently small that rotation of said cam stud causes said cam member to act against the boundaries of said aperture and thereby causes said second sliding plate to move.

Claim 18

A low profile filter unit comprising, in combination: a frame, a filter mounted in said frame, and a low profile air flow control valve mounted in said frame, said frame having four walls; said filter being mounted in said frame between said walls and extending across the entire interior cross-sectional area of said frame; said low profile air control valve being mounted at the top of and to said frame and having a flow control area which is coextensive with the cross-sectional area of said filter whereby the need for a substantial plenum space between said air flow control valve and said filter is eliminated; and a sealing means at the bottom edge of its frame cooperating with a supporting lattice having an upwardly projecting flange whose configuration corresponds to that of said frame; said sealing means including a downwardly opening channel at the bottom edge of said frame and a flexible membrane stretched across the opening of said channel and secured thereto, said flexible membrane is stretched over said flange projecting upwardly into said channel.

Claim 19

A low profile filter unit comprising, in combination: a frame, a filter mounted in said frame, and a low profile air flow control valve mounted in said frame, said frame having four walls; said filter being mounted in said frame between said walls and extending across the entire interior cross-sectional area of said frame; said low profile air control valve being mounted at the top of and to said frame and having a flow control area which is coextensive with the cross-sectional area of said filter whereby the need for a substantial plenum space between said air flow control valve and said filter is eliminated; and a sealing means at the bottom edge of its frame cooperating with a supporting lattice having an upwardly projecting flange whose configuration corresponds to that of said frame; said sealing means including a downwardly opening channel at the bottom edge of said frame and a flexible membrane stretched across the opening of said channel and secured thereto, said flexible membrane is stretched over said flange projecting upwardly into said channel.

Claim 20

The low profile filter of claim 15 in which said channel and said flexible membrane comprise an integral plastic extrusion with said channel portion of said extrusion being formed of a relatively rigid plastic material and with said flexible membrane portion of said extrusion being formed of a relatively flexible plastic material; said extrusion including means to facilitate its securance to said frame at the bottom edge thereof.

Claim 21

Apparatus for a clean room comprising: a plurality of filter units for operably hanging from a ceiling; each of said filter units comprising a filter mounted in a frame which circumscribes said filter; a lattice of supporting strips supporting said filter units at a ceiling level; each cell of said lattice having a boundry corresponding approximately to the configuration of said frame, each said filter unit being supported on those supporting strips defining a cell of said lattice; each of said frames including a downwardly opening channel at the bottom edge thereof and flexible membrane stretched across the opening oF said channel; each of said supporting strips including a sealing flange projecting upwardly therefrom for each of said cells which it partially defines, such that an upwardly projecting sealing flange circumscribes said cell in alignment with said channel in said frame; said sealing flange projecting upwardly into said channel so that said flexible membrane is stretched over said sealing flange.

Claim 22

Apparatus for a clean room comprising: a plurality of filter units for operably hanging from a ceiling; each of said filter units comprising a filter mounted in a frame which circumscribes said filter; a lattice of supporting strips supporting said filter units at a ceiling level; each cell of said lattice having a boundry corresponding approximately to the configuration of said frame, each said filter unit being supported on those supporting strips defining a cell of said lattice; each of said frames including a downwardly opening channel at the bottom edge thereof and flexible membrane stretched across the opening oF said channel; each of said supporting strips including a sealing flange projecting upwardly therefrom for each of said cells which it partially defines, such that an upwardly projecting sealing flange circumscribes said cell in alignment with said channel in said frame; said sealing flange projecting upwardly into said channel so that said flexible membrane is stretched over said sealing flange.

Claim 23

The low profile filter of claim 17 in which said channel and said flexible membrane comprise an integral plastic extrusion with said channel portion of said extrusion being formed of a relatively rigid plastic material and with said flexible membrane portion of said extrusion being formed of a relatively flexible plastic material; said extrusion including means to facilitate its securance to said frame at the bottom edge thereof.

Claim 24

The apparatus of claim 17 which further comprises: a plenum chamber for hanging from a ceiling, said plenum chamber including a top wall, downwardly depending side walls, and end walls, and an open bottom; said lattice of support strips extending across said open bottom of said plenum chamber.

Claim 27

The apparatus of claim 20 in which said side walls of said plenum chamber are sloped outwardly whereby said plenum chamber is wider at the bottom than at the top; said brackets being positioned a sufficient distance from the bottom of the plenum chamber that the mating engagement of adjacent brackets on adjacent plenum chambers does not prevent the adjacent side walls from abutting at their bottom portions.