Process for applying multiple microelectronic layers to substrate

Claim 2

The invention of claim 1 wherein the solvent of a previously applied system is simultaneously vaporized with the solvent of a subsequently applied system.

Claim 3

The invention of claim 1 wherein each polymeric binder is a solid at a temperature of about 40*F to about 120*F.

Claim 4

The invention of claim 1 wherein each solvent has a boiling or decomposition temperature of about 100*C to about 400*C.

Claim 5

The invention of claim 1 wherein the weight ratio of solvent to polymeric material within each system ranges from about 100:1 to about 1:100.

Claim 6

The invention of claim 1 wherein at least three fugitive vehicle systems are applied so as to form at least three layers of microelectronic material dispersed in a polymeric binder, the binder or solvent of the first applied system being the same as that of the third applied system.

Claim 7

The invention of claim 1 wherein the polymeric binder of each system is a pyrolyzable soluble polymer selected from polyisobutylene, poly(trimethylene carbonate), poly(beta-propiolactone), poly(delta-valerolactone), poly(ethylene carbonate), poly(propylene carbonate), poly(ethylene oxalate), methyl cellulose, ethyl cellulose, ethyl hydroxyethyl cellulose, hydroxyethyl cellulose, hydroxypropyl cellulose, methyl hydroxypropyl cellulose, poly(vinyl alcohol), polycaprolactone, and poly(vinyl acetate).

Claim 8

The invention of claim 1 wherein the polymeric binder of each system is a pyrolyzable copolymer selected from a methyl methacrylate/n-butyl methacrylate copolymer, a methyl methacrylate/alpha methyl styrene copolymer, a methyl methacrylate/styrene copolymer, a methyl methacrylate/dimethyl itaconate copolymer, a vinyl toluene/alpha-methylstyrene copolymer, and a styrene/alpha-methylstyrene copolymer.

Claim 9

The invention of claim 1 wherein the solvent of each system is selected from dimethyl phthalate, diethyl phthalate, di-n-butyl phthalate, di-n-butyl succinate, dimethyl sebacate, di-benzyl ether, butyl benzoate, acetyl triethyl citrate, glyceryl triacetate, beta-ethoxy ethyl benzoate, isoamyl benzoate, benzyl benzoate, isobutyl salicylate, isoamyl salicylate, benzyl salicylate, ethyl laurate, butyl oleate, ethyl myristate, butyl benzyl phthalate, dimethyl suberate, diethyl sebacate, diethyl azelate, di-n-butyl adipate, diisobutyl adipate, dibutyl sebacate, dibutyl tartrate, glyceryl tributyrate, diethyl iosphthalate, butyl palmitate, dodecylbenzene, tetradecylbenzene, pentaethylbenzene, diphenylmethane, 1,1-diphenylethane, 1-chloronaphthalene, 1-bromonaphthalene, dimethyl-naphthalene, 1-methoxy naphthalene, diphenyl ether, bis(alpha-methylbenzyl) ether, tetraethylene glycol dimethyl ether, 2-benzyloxyethanol, phenyl n-hexyl carbinol, triethylene glycol, 1,5 pentanediol, hexanophenone, 1-naphthyl methyl ketone, p-n-pentylphenol, N-cyclohexyl-2-pyrrolidone, glutaronitrile, p-methoxyphenylacetonitrile, water, methyl alcohol, ethyl alcohol, isopropyl alcohol, acetone, methyl ethyl ketone, methyl isobutyl ketone, ethyl acetate, amyl acetate, dibutyl ether, ethylene glycol monoethyl ether, benzene, toluene, xylene, n-heptane, isooctane, methyl cyclohexane, cyclohexane, chlorobenzene, chloroform, 1,1,1-trichloroethane, N,N-dimethyl formamide, acetonitrile, and benzonitrile.

Claim 10

The invention of claim 1 wherein at least one polymeric binder is a poly (alkyl methacrylate) with the alKyl containing one to six atoms.

Claim 11

The invention of claim 11 wherein the poly (alkyl methacrylate) has oxygen atoms selectively incorporated in its molecular chain.

Claim 12

The invention of claim 1 wherein the polymeric binder of each system is a pyrolyzable solid polymer selected from polyethers and poly (alkyl methacrylates).

Claim 13

The invention of claim 13 wherein the polymeric binder of each system is a pyrolyzable solid polymer selected from poly(tetrahydrofuran), poly(1,3-dioxolane), poly(ethylene oxide), poly(propylene oxide), poly(methyl methacrylate), poly(ethyl methacrylate), and poly(n-butyl methacrylate).

Claim 14

A process for forming a microelectronic structure comprising a. applying multiple layers of materials to a substrate by the steps of: applying to the substrate a first fugitive vehicle system containing microelectronic material dispersed in a film-forming, pyrolyzable, polymeric binder and a solvent for the polymeric binder, the solvent being capable of removal from the substrate by vaporization at a temperature below the pyrolyzing temperature of the binder; vaporizing the solvent from said first fugitive vehicle system so as to form a first layer of microelectronic material dispersed in a film of binder; applying to the first layer a second fugitive system containing microelectronic material dispersed in a film-forming, pyrolyzable, polymeric binder and a solvent for the polymeric binder, the solvent being capable of removal from the second fugitive system by vaporization at a temperature below the pyrolyzing temperature of each binder in each system, the polymeric binder of the first system being insoluble in the polymeric binder and solvent of the second system; and vaporizing the solvent from the second fugitive system so as to form a second layer of microelectronic material dispersed in a film of binder, and b. removing each binder from each layer by pyrolysis and fusing or sintering the microelectronic material of each layer at temperatures between about 250*C and about 450*C so as to form a continuous multi-layered microelectronic structure.

Claim 15

The invention of claim 15 wherein each solvent has a boiling or decomposition temperature within the range of about 100*C to about 400*C.

Claim 16

The invention of claim 15 wherein the weight ratio of solvent to polymeric material within each system ranges from about 100:1 to about 1:100.

Claim 17

The invention of claim 15 wherein the polymeric binder of each system is a pyrolyzable soluble polymer selected from polyisobutylene, poly(trimethylene carbonate), poly(beta-propiolactone), poly(delta-valerolactone), poly(ethylene carbonate), poly(propylene carbonate), poly(ethylene oxalate), methyl cellulose, ethyl cellulose, ethyl hydroxyethyl cellulose, hydroxyethyl cellulose, hydroxypropyl cellulose, methyl hydroxypropyl cellulose, poly(vinyl alcohol), polycaprolactone, and poly(vinyl acetate).

Claim 18

The invention of claim 15 wherein the polymeric binder of each system is a pyrolyzable copolymer selected from a methyl methacrylate/n-butyl methacrylate copolymer, a methyl methacrylate/alpha methyl styrene copolymer, a methyl methacrylate styrene copolymer, a methyl methacrylate/dimethyl itaconate copolymer, a vinyl toluene/alphamethylstyrene copolymer, and a styrene/alpha-methylstyrene copolymer.

Claim 19

The invention of claim 15 wherein the solvent of each system is selected from dimethyl phthalate, diethyl phthalate, di-n-butyl phthalate, di-n-butyl succinate, dimethyl sebacate, di-benzyl ether, butyl benzoate, acetyl triethyl citrate, glyceryl triacetate, beta-ethoxy ethyl benzoate, isoamyl benzoate, benzyl benzoate, isobutyl salicylate, isoamyl salicylate, benzyl salicylate, ethyl laurate, butyl oleate, ethyl myristate, butyl benzyl phthalate, dimethyl suberate, diethyl sebacate, diethyl azelate, di-n-butyl adipate, diisobutyl adipate, dibutyl sebacate, dibutyl tartrate, glyceryl tributyrate, diethyl isophthalAte, butyl palmitate, dodecylbenzene, tetradecylbenzene, pentaethylbenzene, diphenylmethane, 1,1-diphenylethane, 1-chloronaphthalene, 1-bromonaphthalene, dimethyl-naphthalene, 1-methoxy naphthalene, diphenyl ether, bis(alpha-methylbenzyl) ether, tetraethylene glycol dimethyl ether, 2-benzyloxyethanol, phenyl-n-hexyl carbinol, triethylene glycol, 1,5 pentanediol, hexano-phenone, 1-naphthyl methyl ketone, p-n-pentylphenol, N-cyclohexyl-2-pyrrolidone, glutaronitrile, p-methoxyphenylacetonitrile, water, methyl alcohol, ethyl alcohol, isopropyl alcohol, acetone, methyl ethyl ketone, methyl isobutyl ketone, ethyl acetate, amyl acetate,dibutyl ether, ethylene glycol monoethyl ether, benzene, toluene, xylene, n-heptane, isooctane, methyl cyclohexane, cyclohexane, chlorobenzene, chloroform, 1,1,1-trichloroethane, N,N-dimethyl formamide, acetonitrile, and benzonitrile.

Claim 20

The invention of claim 15 wherein the polymeric binder of each system is a pyrolyzable solid polymer selected from polyethers and poly(alkyl methacrylates).

Claim 21

The invention of claim 21 wherein the polymeric binder of each system is a pyrolyzable solid polymer selected from poly(tetrahydrofuran), poly(1,3-dioxolane), poly(ethylene oxide), poly(propylene oxide), poly(methyl methacrylate), poly(ethyl methacrylate), and poly(n-butyl methacrylate).