US3777704A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Apparatus for vaporizing metal on a substratum
Assignee: Bekaert NV SA
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Filing: 1972-02-03
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Granted: 1973-12-11
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Expires: 1992-02-03
Abstract
Abstract A device and method for vaporizing metal onto a substratum in which the metal to be deposited on the substratum is maintained in a crucible under vacuum, an elongated substratum is passed through the vaporized zone, and the metal is vaporized by a strongly focussed moving electron beam from an electron gun and deposited on the moving substratum.
Inventors
- 👤 Poucke L Van
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 19:40
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/24; C23C14/28; C23C14/30; H; H01; H01J; H01J37/00; H01J37/30; H01J37/305; H01J37/3053
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
235 words
An apparatus for vaporizing metal on a substratum which comprises a chamber, at least one electron gun adapted to provide an electron beam for vaporizing a metal in a vaporization zone and disposed in said chamber external to said vaporization zone, means for maintaining said chamber under a vacuum, an enclosed crucible adapted to hold said metal to be deposited on a substratum and to provide said varporization zone, said crucible being tightly sealed and provided with one restricted aperture per electron gun to maintain a high metal vapor pressure in said vaporization zone in said crucible, means for moving at least one elongated substratum through said vaporization zone by providing at least two apertures in said crucible, said apertures adapted to the measurements of said substratum in order to maintain a high metal vapor pressure in said vaporization zone in said crucible, an electromagnet adapted to move said electron beam back and forther in said crucible over the surface of the metal to be vapOrized, said crucible being located between the poles of said electromagnet, and a magnetic lens adapted to focus said electron beam, the distance between said restricted aperture in the crucible and said magnetic lens for focussing said electron beam being such that said restricted aperture is located at approximately the focal point of said electron beam, said restricted aperture being adapted to the focal point measurements of said electron beam.
Claim 2
Independent Claim
235 words
An apparatus for vaporizing metal on a substratum which comprises a chamber, at least one electron gun adapted to provide an electron beam for vaporizing a metal in a vaporization zone and disposed in said chamber external to said vaporization zone, means for maintaining said chamber under a vacuum, an enclosed crucible adapted to hold said metal to be deposited on a substratum and to provide said varporization zone, said crucible being tightly sealed and provided with one restricted aperture per electron gun to maintain a high metal vapor pressure in said vaporization zone in said crucible, means for moving at least one elongated substratum through said vaporization zone by providing at least two apertures in said crucible, said apertures adapted to the measurements of said substratum in order to maintain a high metal vapor pressure in said vaporization zone in said crucible, an electromagnet adapted to move said electron beam back and forther in said crucible over the surface of the metal to be vapOrized, said crucible being located between the poles of said electromagnet, and a magnetic lens adapted to focus said electron beam, the distance between said restricted aperture in the crucible and said magnetic lens for focussing said electron beam being such that said restricted aperture is located at approximately the focal point of said electron beam, said restricted aperture being adapted to the focal point measurements of said electron beam.
Claim 3
Dependent Claim
32 words
The invention as defined by claim 1 wherein the electromagnet includes means for providing a magnetic alternating field adjustable in amplitude and frequency in the crucible above the metal to be evaporated.
Claim 4
Dependent Claim
29 words
The invention as defined by claim 1 wherein the electromagnet includes means for providing a magnetic field adjustable in amplitude in the crucible above the metal to be evaporated.
References Cited (Backward Citations)
US3432335A
Cited
US3576670A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1976-12-10 | 1977-06-11 | 1977-12-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1980-12-10 | 1981-06-11 | 1981-12-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1984-12-10 | 1985-06-11 | 1985-12-11 | $7700.00 | Window Closed / Lapsed |