US3774042A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Particle beam apparatus having a data storage control system
Assignee: Siemens AG
•
Filing: 1972-01-03
•
Granted: 1973-11-20
•
Expires: 1992-01-03
Abstract
Abstract A discriminator coupled to the storage control of a storage device for storing data provided by a particle optical system determines inconstancies in operational magnitudes of the particle beam apparatus which adversely affect the quality of the data stored by the storage device and transmits the inconstancy determinations to the storage control to prevent the operation of the storage device.
Inventors
- 👤 A Engel
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 12:28
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/02; H01J37/22; H01J37/224
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
179 words
Particle beam apparatus comprising an electron beam microscope including a particle optical system including lenses, means applying excitation currents to the lenses and means applying excitation voltages to the lenses and a cathode system and means applying an accelerating voltage to the cathode system and storage means for storing data provided by said particle optical system via a specimen, said particle beam apparatus including storage control means coupled to said storage means for controlling the operation of said storage means; and discriminator means electrically connected to said storage control means for determining variations from predetermined normal operating levels of the excitation currents and excitation voltages applied to the lenses and variations from a predetermined normal operating level of the accelerating voltage of said cathode system of said particle optical system of said particle beam apparatus which adversely affect the quality of the data stored by said storage means and for transmitting the variation determinations to said storage control means to control said storage control means to prevent the operation of said storage means upon the occurrence of said variations.
Claim 2
Dependent Claim
179 words
Particle beam apparatus comprising an electron beam microscope including a particle optical system including lenses, means applying excitation currents to the lenses and means applying excitation voltages to the lenses and a cathode system and means applying an accelerating voltage to the cathode system and storage means for storing data provided by said particle optical system via a specimen, said particle beam apparatus including storage control means coupled to said storage means for controlling the operation of said storage means; and discriminator means electrically connected to said storage control means for determining variations from predetermined normal operating levels of the excitation currents and excitation voltages applied to the lenses and variations from a predetermined normal operating level of the accelerating voltage of said cathode system of said particle optical system of said particle beam apparatus which adversely affect the quality of the data stored by said storage means and for transmitting the variation determinations to said storage control means to control said storage control means to prevent the operation of said storage means upon the occurrence of said variations.
Claim 3
Dependent Claim
15 words
Particle beam apparatus as claimed in claim 1, wherein said discriminator means includes timing means.
Claim 4
Dependent Claim
33 words
Particle beam apparatus as claimed in claim 2 wherein said discriminator means comprises a plurality of discriminators and said timing means is coupled between said plurality of discriminators and said storage control means.
Claim 5
Dependent Claim
33 words
Particle beam apparatus as claimed in claim 3, wherein said storage means comprises photographic apparatus having an exposure shutter and said storage control means comprises a shutter control device coupled to said shutter.
Claim 6
Dependent Claim
36 words
Particle beam apparatus as claimed in claim 4, wherein said discriminator means further comprises additional timing means coupled between said timing means and said shutter control device for determining the exposure time of said photographic apparatus.
Claim 7
Dependent Claim
33 words
Particle beam apparatus as claimed in claim 5, wherein said discriminator means further comprises signal means for indicating the duration of the interval during which the operation of said photographic apparatus is prevented.
Claim 8
Dependent Claim
40 words
Particle beam apparatus as claimed in claim 3, wherein said storage means comprises moving picture photographic apparatus having a film transport drive and said storage control means comprises a film transport drive control device coupled to said film transport drive.
References Cited (Backward Citations)
US3137791A
Cited
US3449759A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1976-11-19 | 1977-05-21 | 1977-11-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1980-11-19 | 1981-05-21 | 1981-11-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1984-11-19 | 1985-05-21 | 1985-11-20 | $7700.00 | Window Closed / Lapsed |