US3772980A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Semi-conductor wafer processing apparatus
Assignee: Verteq Inc
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Filing: 1972-05-08
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Granted: 1973-11-20
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Expires: 1992-05-08
Abstract
Abstract A series of transfer mechanisms automatically move a basket of wafers through a series of processing stations as determined by a timer control. Each mechanism includes a cradle pivotally mounted on a rotating arm and aligned to engage a disc mounted on the end of a rod which supports a basket of wafers. As the arm is rotated, the cradle is moved beneath the disc causing the disc to be received and gripped by the cradle so that the disc and basket are moved in cantilever fashion to the next work station. Continued rotation of the arm withdraws the cradle from the disc.
Inventors
- 👤 R Orr
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 02:38
CPC Classifications
G; G03; G03D; G03D3/00; G03D3/08; G03D3/10
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
153 words
Apparatus for processing semi-conductor wafers or similar items comprising: a basket containing said wafers; a series of tanks containing processing fluid for receipt of said basket; a support rod connected to said basket; support means adjacent each of the tanks for supporting said rod from which said basket is suspended while it is within one of said tanks; and means for automatically transferring said basket from one of said tanks to the next by moving the support rod from one of said support means to the next, including a transfer arm mounted to be rotated adjacent one side of the tank in a plane generally perpendicular to the rod, and means on said arm for automatically releasably gripping one end of the rod to support the rod in cantilever fashion so as to lift the rod with said basket mounted thereon, and move it from one of said support means to the next.
Claim 2
Dependent Claim
153 words
Apparatus for processing semi-conductor wafers or similar items comprising: a basket containing said wafers; a series of tanks containing processing fluid for receipt of said basket; a support rod connected to said basket; support means adjacent each of the tanks for supporting said rod from which said basket is suspended while it is within one of said tanks; and means for automatically transferring said basket from one of said tanks to the next by moving the support rod from one of said support means to the next, including a transfer arm mounted to be rotated adjacent one side of the tank in a plane generally perpendicular to the rod, and means on said arm for automatically releasably gripping one end of the rod to support the rod in cantilever fashion so as to lift the rod with said basket mounted thereon, and move it from one of said support means to the next.
Claim 3
Dependent Claim
53 words
The apparatus of claim 1 including a disc mounted on one end of said rod, and wheRein said gripping means includes an upward opening slot for receiving said disc in a manner such that the disc is wedged into the slot as the gripping means is moved upwardly during rotation of the arm.
Claim 4
Dependent Claim
91 words
The apparatus of claim 2 wherein said slot is formed by a forward generally vertical wall which mates with a generally vertical face on the inner side of the disc, and the other slot wall is angled with respect to the vertical wall, said slot has a modified V-shape cross-section allowing the disc to be wedged into said slot when said slot walls are moved upwardly and said slot releasing the disc from said slot when the rod engages one of said support means and the gripping means is moved downwardly.
Claim 5
Dependent Claim
28 words
The apparatus of claim 3 wherein said gripping means includes guide means for receiving said rod as the disc is moved by said transfer arm into said slot.
Claim 6
Dependent Claim
19 words
The apparatus of claim 4 wherein said guide means comprise a V-shape notch opening upwardly to receive the rod.
Claim 7
Dependent Claim
164 words
Apparatus for transferring a load from a first work station to a second work station comprising: a rod supported at the first work station with the load suspended from the rod; a disc attached to one end of the rod generally perpendicular to the rod; a transfer arm mounted on one side of the first work station adjacent said one end of the rod for rotation in a plane generally parallel to the disc; and a cradle pivotally mounted on the arm and aligned to engage the disc as the arm is rotated, the cradle having means formed thereon to receive and grip the disc so that the rod is lifted in cantilever fashion as the arm is rotated and the cradle is moved upwardly into engagement with the disc, said cradle being adapted to release the disc when the rod is moved to the next station and the arm is rotated so as to move the cradle downwardly away from said next station.
Claim 8
Dependent Claim
164 words
Apparatus for transferring a load from a first work station to a second work station comprising: a rod supported at the first work station with the load suspended from the rod; a disc attached to one end of the rod generally perpendicular to the rod; a transfer arm mounted on one side of the first work station adjacent said one end of the rod for rotation in a plane generally parallel to the disc; and a cradle pivotally mounted on the arm and aligned to engage the disc as the arm is rotated, the cradle having means formed thereon to receive and grip the disc so that the rod is lifted in cantilever fashion as the arm is rotated and the cradle is moved upwardly into engagement with the disc, said cradle being adapted to release the disc when the rod is moved to the next station and the arm is rotated so as to move the cradle downwardly away from said next station.
Claim 9
Dependent Claim
68 words
The apparatus of claim 6 wherein said cradle includes means defining an upwardly opening slot for receiving the disc, the slot walls diverging in an upward direction for ease of receiving the disc as the cradle moves upwardly beneath the disc, and the slot walls converging in a downward direction so that the disc is automatically gripped by a wedging action as it is lifted by the cradle.
Claim 10
Dependent Claim
32 words
The apparatus of claim 7 wherein said cradle includes means defining an upwardly opening generally V-shaped notch for receiving and guiding the rod as the disc is received in the cradle slot.
Claim 11
Dependent Claim
58 words
The apparatus of claim 6 wherein said cradle comprises a back plate having a stub shaft integral thereto which is pivotally mounted on said arm, a front plate having its lower end directly attached to the back plate, while the upper ends of the front and back plate are spaced to define a slot for receiving the disc.
Claim 12
Dependent Claim
107 words
The apparatus of claim 9 wherein the front side of the disc is generally vertical and the front wall of said slot as formed by the backside of the front plate is generally vertical to mate with the front wall of the disc, the backside of the disc has a slight taper such that the disc edge is thinner than the center of the disc, the back plate is oriented with respect to the vertical wall of the front plate at an angle greater than the taper of the disc backside to facilitate the wedging of the disc into the cradle as the cradle is moved upward.
Claim 13
Dependent Claim
34 words
The apparatus of claim 9 including bearing means extending between the back plate and the rotating arm to facilitate pivotal movement of the cradle with respect to the arm as the arm is rotated.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1976-11-19 | 1977-05-21 | 1977-11-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1980-11-19 | 1981-05-21 | 1981-11-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1984-11-19 | 1985-05-21 | 1985-11-20 | $7700.00 | Window Closed / Lapsed |