US3770533A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of producing high resolution patterns in single crystals
Assignee: US Philips Corp
•
Filing: 1971-07-02
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Granted: 1973-11-06
•
Expires: 1991-07-02
Abstract
Abstract A method of producing by etching, high resolution patterns in a single metal or metalloid crystal by electrolytic displacement of portions of the metal or metalloid crystal by a different metal through an apertured mask and subsequent removal of the different metals.
Inventors
- 👤 W Zwicker
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 16:58
CPC Classifications
H; H10; H10P; H10P50/00; H10P50/69; H10P50/691; H10P50/693; H10P14/00; H10P14/40; H10P14/46; H10P76/00; H10P76/40; H10P76/408; H10P95/00; Y; Y10; Y10S; Y10S148/00; Y10S148/051; Y10S148/115
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
13 words
The method of claim 1 wherein the substrate is a semiconductive silicon crystal.
Claim 2
Dependent Claim
27 words
The method of claim 1 wherein the electrically insulating mask is removed by a preferential etch after the formation of the grooves or holes in the substrate.
Claim 3
Dependent Claim
13 words
The method of claim 1 wherein the substrate is a semiconductive germanium crystal.
Claim 4
Dependent Claim
31 words
The method of claim 2 wherein the mask has apertures oriented in the (111) crystallographic direction of the substrate and the resultant holes or grooves in the substrate are hexagonally shaped.
Claim 5
Dependent Claim
31 words
The method of claim 2 wherein the mask has apertures oriented in the (100) crystallographic direction of the substrate and the resultant holes or grooves in the substrate are tetragonal shaped.
References Cited (Backward Citations)
US3506509A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1976-11-05 | 1977-05-07 | 1977-11-06 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1980-11-05 | 1981-05-07 | 1981-11-06 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1984-11-05 | 1985-05-07 | 1985-11-06 | $7700.00 | Window Closed / Lapsed |