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US3770498A Expired / Lapsed US ⏱️ 0.0 years remaining

Passivating solution and method

Assignee: Teledyne Inc
•
Filing: 1971-03-01
•
Granted: 1973-11-06
•
Expires: 1991-03-01
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Abstract

Abstract A solution and method for conditioning, gettering and sealing a semiconductor device. Oxides forming a synergistic combination are dissolved in a solvent which is constituted to wet the surface of a semiconductor device. The solution is applied, dried and baked to condition, getter, seal and otherwise passivate the device surface.

Inventors

  • 👤 D Flowers

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-04 06:56
CPC Classifications
H; H10; H10W; H10W74/00; H10W74/10; H10W74/131

Claims Analysis

Total Claims: 10
Claim 1
Independent Claim 19 words
The method according to claim 1 in which said passivating amount is about 0.01-10 weight percent of said solution.
Claim 2
Dependent Claim 13 words
The method according to claim 2 in which said solvent is an alcohol.
Claim 3
Dependent Claim 17 words
The method according to claim 2 in which said surface to be passivated is pre-coated with glass.
Claim 4
Dependent Claim 27 words
The method according to claim 2 in which said surface to be passivated is substantially unglassed and said device is heated at about 300* C or higher.
Claim 5
Dependent Claim 84 words
The method according to claim 2 in which said oxide is an oxide of a group VA element, said passivating amount thereof is soluble in said solvent, and said solution contains in addition to said group VA oxide at least one additional oxide including an oxide of a second element which alone is insoluble in said solvent but is soluble in a solution containing said group VA oxide, the amount of said second oxide being 1-10 parts per part of said group VA oxide.
Claim 6
Dependent Claim 65 words
The method according to claim 6 in which said solution contains at least 0.01 part of a third metal oxide per part of said group VA metal oxide, said third metal oxide being insoluble in said solvent in the presence alone of said group VA oxide, but soluble in the presence in said solvent of both said group VA oxide and said second metal oxide.
Claim 7
Dependent Claim 18 words
The method according to claim 6 in which said group VA metal oxide is an oxide of phosphorus.
Claim 8
Dependent Claim 19 words
The method according to claim 8 in which said oxide of a second element is an oxide of boron.
Claim 9
Dependent Claim 29 words
The method according to claim 9 in which said solution contains at least 0.01 part of an oxide of vanadium per part by weight of said oxide of phosphorus.
Claim 10
Dependent Claim 17 words
The method according to claim 9 in which said surface to be passivated is pre-coated with glass.

References Cited (Backward Citations)

US3303399A Cited
US3456169A Cited
US3475210A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1976-11-05 1977-05-07 1977-11-06 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1980-11-05 1981-05-07 1981-11-06 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1984-11-05 1985-05-07 1985-11-06 $7700.00 Window Closed / Lapsed

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