US3769562A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Double isolation for electronic devices
Assignee: Texas Instruments Inc
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Filing: 1972-02-07
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Granted: 1973-10-30
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Expires: 1992-02-07
Abstract
Abstract A thermally and electrically isolated array of islands or mesas of semiconductor material and method of fabrication are provided wherein each island or mesa is surrounded by moats formed by either orientation-dependent etching or, space permitting, by standard multiple-dependent techniques. These moats have a ''''W''''shaped cross-section surrounding each island or mesa. Such an array of islands or mesas is especially adapted for use in the fabrication of high voltage or high power integrated circuit devices, and thermal print heads.
Inventors
- 👤 K Bean
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 22:45
CPC Classifications
H; H10; H10D; H10D62/00; H10D62/40; H10D62/405; B; B41; B41J; B41J2/00; B41J2/315; B41J2/32; B41J2/335; B41J2/34; H10D99/00; H10P; H10P50/00; H10P50/60; H10P50/64; H10P50/642; H10P50/644; H10P95/00; H10W; H10W10/00; H10W10/01; H10W10/011; H10W10/019; H10W10/10; H10W74/00; H10W74/40; H10W74/43; H10D89/00; H10D89/10; H10D89/105; Y; Y10; Y10S; Y10S148/00; Y10S148/043; Y10S148/051; Y10S148/085; Y10S148/115; Y10S148/135; Y10S148/136
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
121 words
A thermal print head comprising: a. a plurality of spaced mesas forming an array in a substrate of semiconductor material; b. circuit means within each of selected mesas for heating the mesas; c. circuit control means in said substrate for selectively actuating said circuit means for heating the mesas; and d. a moat having a plurality of adjoining channels separating each mesa one from the others, the moat forming air gaps and surface areas exposed to the air for thermally and electrically isolating the plurality of mesas one from the others whereby said moat is made wide enough to prevent temperature bleeding from one mesa to another and sufficiently shallow to prevent breakage through normal usage of the thermal print head.
Claim 2
Dependent Claim
121 words
A thermal print head comprising: a. a plurality of spaced mesas forming an array in a substrate of semiconductor material; b. circuit means within each of selected mesas for heating the mesas; c. circuit control means in said substrate for selectively actuating said circuit means for heating the mesas; and d. a moat having a plurality of adjoining channels separating each mesa one from the others, the moat forming air gaps and surface areas exposed to the air for thermally and electrically isolating the plurality of mesas one from the others whereby said moat is made wide enough to prevent temperature bleeding from one mesa to another and sufficiently shallow to prevent breakage through normal usage of the thermal print head.
Claim 3
Dependent Claim
36 words
A thermal print head according to claim 1 wherein the plurality of adjoining channels forming air gaps and surface areas exposed to the air are interconnected concentric ''''V''''-shaped grooves forming a moat having a ''''W''''-shaped cross-section.
Claim 4
Dependent Claim
37 words
An array of mesas according to claim 2 wherein the wafer of semiconductor material is silicon having a surface crystal orientation in the (100) plane, and the ''''W''''-shaped moat is formed by the intersection of (111) planes.
References Cited (Backward Citations)
US3486892A
Cited
US3623218A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1976-10-29 | 1977-04-30 | 1977-10-30 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1980-10-29 | 1981-04-30 | 1981-10-30 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1984-10-29 | 1985-04-30 | 1985-10-30 | $7700.00 | Window Closed / Lapsed |