US3769484A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Apparatus and method for floating-zone melting of a semiconductor rod
Assignee: Siemens AG
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Filing: 1972-08-10
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Granted: 1973-10-30
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Expires: 1992-08-10
Abstract
Abstract This invention provides a device for the floating-zone melting of a semiconductor rod. The device comprises a treatment container having means to mount a semiconductor rod therein, a resonant circuit capacitor slidably mounted and sealed in an opening in a wall of the treatment container, said resonant circuit capacitor being a part of an electrical circuit resonantor, connecting wires extended from said resonant capacitor to a high frequency generator outside of the treatment container, and a single-wound induction heating coil movably mounted within said treatment container and arranged to be concentrically positioned around said semiconductor rod, said heating coil being connected at one end to the inner conductor of the resonant capacitor and at the other end to the outer conductor of said capacitor.
Inventors
- 👤 H Stut
- 👤 W Keller
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 15:12
CPC Classifications
H; H05; H05B; H05B6/00; H05B6/02; C; C30; C30B; C30B13/00; C30B13/16; C30B13/20; C30B15/00; C30B15/14; H01; H01G; H01G4/00; H01G4/28; H05B6/22; H05B6/30; Y; Y10; Y10S; Y10S117/00; Y10S117/90; Y10T; Y10T117/00; Y10T117/10; Y10T117/1024; Y10T117/1076; Y10T117/1088
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
137 words
A device for the floating-zone melting of a semiconductor rod which comprises: a treatment container having means for mounting therein a semiconductor rod; a resonant circuit coaxial capacitor having an inner conductor means and an outer conductor means and slidably mounted and sealed in an opening in a wall of the treatment container; a high frequency cable including connecting wires extended from said capacitor to a high frequency generator positioned outside of the treatment container, said wires connected to respective ones of said conductor means; and a wound induction heating coil movably mounted in said treatment contAiner, said heating coil being arranged to be concentrically positioned around said semiconductor rod and connected at one end to the inner conductor means of the resonant capacitor and at the other end to the outer conductor means of said capacitor.
Claim 2
Independent Claim
137 words
A device for the floating-zone melting of a semiconductor rod which comprises: a treatment container having means for mounting therein a semiconductor rod; a resonant circuit coaxial capacitor having an inner conductor means and an outer conductor means and slidably mounted and sealed in an opening in a wall of the treatment container; a high frequency cable including connecting wires extended from said capacitor to a high frequency generator positioned outside of the treatment container, said wires connected to respective ones of said conductor means; and a wound induction heating coil movably mounted in said treatment contAiner, said heating coil being arranged to be concentrically positioned around said semiconductor rod and connected at one end to the inner conductor means of the resonant capacitor and at the other end to the outer conductor means of said capacitor.
Claim 3
Dependent Claim
36 words
A device according to claim 1, wherein the resonant capacitor has a capacitance of at least 20 times as large as the capacitance of the connecting wires extended from the capacitor to the high frequency generator.
Claim 4
Dependent Claim
19 words
A device according to claim 2, wherein the induction heating coil is mounted only on the resonant circuit capacitor.
Claim 5
Dependent Claim
28 words
A device according to claim 1, wherein said inductive heating coil and resonant circuit capacitor are axially shiftable with respect to said semiconductor rod in the treatment container.
Claim 6
Dependent Claim
22 words
A device according to claim 1, wherein the resonant circuit capacitor is concentric with at least one other concentrically arranged metal tube.
Claim 7
Dependent Claim
41 words
A device according to claim 1, wherein the dielectric constant of the massive dielectric of the resonant circuit capacitor is at least 10 times larger than the dielectric constant of the insulation of the connecting wires to the high frequency generator.
Claim 8
Dependent Claim
63 words
A device according to claim 1, comprising a gasket in the wall of said treatment container, said outer conductor means of the resonant circuit capacitor passing through said gasket, said gasket consisting of several ring-shaped gaskets which are tightly and sealably connected with the wall of the treatment container whereby the spaces between said ring-shaped gaskets are filled with an inert liquid sealant.
Claim 9
Dependent Claim
23 words
A device according to claim 7, wherein the dielectric of the resonant circuit capacitor consists of a ceramic having a high dielectric constant.
Claim 10
Dependent Claim
24 words
A device according to claim 8, wherein the dielectric is composed of material selected from the group consisting of titanium dioxide and magnesium titanic.
Claim 11
Dependent Claim
55 words
A device according to claim 8, wherein the resonant circuit capacitor comprises a tube of insulating material having an inner conductor at its inner surface and an outer conductor at its outer surface, said inner and outer conductors being arranged in the form of two metal layers which are insulated with respect to each other.
Claim 12
Dependent Claim
60 words
A device according to claim 10, wherein the resonant circuit capacitor is enclosed in a metal tube which is closed off at both ends by terminals in a manner so that the inner space between the metal tube and capacitor is divided into two separate chambers which are in communication with each other by means of said induction heating coil.
Claim 13
Dependent Claim
33 words
A device according to claim 11, wherein said chambers are arranged with one having an entry and the other an exit for the passage of a cooling means through said resonant circuit capacitor.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1976-10-29 | 1977-04-30 | 1977-10-30 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1980-10-29 | 1981-04-30 | 1981-10-30 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1984-10-29 | 1985-04-30 | 1985-10-30 | $7700.00 | Window Closed / Lapsed |