Abstract There is disclosed a technique for producing integrated optical waveguides or circuits in which a substrate is embossed by a die of the desired guide pattern and is then coated with a liquid that fills the grooves and has sufficient surface tension to yield a greater thickness in the grooves than over adjacent substrate material. The liquid may be a solution of a higherindex optical material, solidifying in the grooves during evaporation of the solvent. Alternatively, a liquid monomer of a polymerizable higher-index material may be used which is subsequently polymerized in the grooves. This embossing and filling technique is particularly economical when a large number of replicas of a given optical circuit are to be produced.
A method according to claim 1 in which the coating step comprises depositing on the substrate an optically transparent solid material in a liquid solution, and in which the energy supplying step comprises supplying heat to the solution to evaporate the solvent therefrom to leave said optically transparent dielectric film in the impression of said substrate surface.
Claim 2
Dependent Claim
41 words
A method according to claim 1 in which the coating step comprises depositing on the substrate a film of a liquid monomer, and in which the energy-applying step comprises initiating polymerization of said film to form said optically transparent dielectric film.
Claim 3
Dependent Claim
58 words
A method according to claim 1 in which the coating step comprises depositing on the substrate a film of a liquid monomer and, evaporating a portion of the liquid until the desired thickness of said film is produced, and in which the energy applying step comprises initiating polymerization of said film to form said optically transparent dielectric film.
Claim 4
Dependent Claim
76 words
A method according to claim 1 in which the coating step comprises depositing on the substrate a film of cyclohexyl methacrylate containing benzoic methyl ether as a photosensitive initiator and, evaporating a portion of the liquid until the desired thickness of said film is produced, and in which said energy applying step comprises exposing the film in a dry nitrogen atmosphere with an ultraviolet lamp to form a polymerized film as said optically transparent dielectric film.
Claim 5
Dependent Claim
70 words
A method according to claim 1 in which the coating step comprises supplying the liquid material to the substrate surface as a solution, said solution having a viscosity and surface tension selected for forming a relatively smooth exterior surface as compared to the embossed surface, and the energy applying step comprises supplying heat to the solution by maintaining the coated substrate at a temperature that causes evaporation of the solvent.
Claim 6
Dependent Claim
73 words
A method according to claim 1 in which the coating step comprises supplying the liquid material to the substrate surface as a liquid monomer including a polymerization initiator, said liquid monomer having a viscosity and surface tension selected for forming a relatively smooth exterior surface as compared to the embossed surface, and the energy appLying step comprises applying to said monomer energy of the type to which the initiator responds by initiating polymerization.