Abstract A method is provided for producing high purity oxide products of phosphorus and silicon such as, for example, a P2O5 and SiO2 glass wherein a silicon alkoxide is directly reacted with phosphorous acid, phosphoric acid, phosphorus pentoxide, or mixtures thereof, in the absence of any addition of a separate hydrolysis catalyst to produce a single phase solution reaction product and this reaction product with water is converted to a two-phase system, which two-phase system is removed of its free liquid components and the residue is then thermally decomposed to produce a product of phosphorus and silicon. This oxide product may be converted to a substantially unitary shape by conventional melting techniques or by conventional sintering techniques. The product may be used as an additive in conventional glass melting operations to supply at least a portion, and preferably all, of the P2O5 and/or silica requirements of the batch or the product may be compacted and suitably fired into a substantially unitary body, which body is an excellent target in sputtering applications for forming films on semiconductive materials such as, for example, silicon chips.
The method of claim 1 and further including the step of converting said product of step (c) to a unitary article by sintering or by melting and cooling to form a glass.
Claim 2
Dependent Claim
29 words
The method set forth in claim 1 wherein said compound which is directly reacted is the compound set forth in (4) and wherein said solvent is a C1-C3 alcohol.
Claim 3
Dependent Claim
32 words
The method of claim 1 wherein said compound which is directly reacted is a compound of the formula SiXnY(4 n) wherein n is 0 and wherein said solvent is a C1-C3 alcohol.
Claim 4
Dependent Claim
46 words
The process of claim 1 wherein said compound which is directly reacted is a compound of the formula SiXnY(4 n) wherein n is 1, X is phenyl or an alkyl having one to six carbon atoms, and Y is OR wherein R is a C1-C6 alkyl.
Claim 5
Dependent Claim
12 words
The method of claim 5 wherein said compound is phenyl triethoxy silane.
Claim 6
Dependent Claim
12 words
The method of claim 5 wherein said compound is methyl triethoxy silane.
Claim 7
Dependent Claim
21 words
The method of claim 4 wherein said compound is ethyl orthosilicate and wherein said solvent is a C1 to C3 alcohol.
Claim 8
Dependent Claim
27 words
The method of claim 8 wherein the volume ratio of said alcohol to said ethyl orthosilicate is in the range of about 1/4 :1 to about 4:1.