US3767304A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Apparatus and method for detection of internal semiconductor inclusions
Assignee: International Business Machines Corp
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Filing: 1972-07-03
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Granted: 1973-10-23
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Expires: 1992-07-03
Abstract
Abstract An apparatus for detecting the presence of inclusions in semiconductor material having a polychromatic light source, a support for a semiconductor body, a light sensing means positioned to operate on light transmitted through the body from the light source, the sensing means including a substrate of the same type of semiconductor materials as the material of the semiconductor body, and having at least a PN junction in the substrate with means to backbias the junction, a means to indicate the relative amounts of light transmitted through the semiconductor body that is sensed by the sensing means. A method for detecting internal inclusion in a semiconductor body by directing through the body a beam of polychromatic light, sensing the light energy transmitted to the body with a light sensing element of the same type semiconductor material as the body being investigated.
Inventors
- 👤 W Keenan
- 👤 M Poponiak
- 👤 T Yeh
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 03:59
CPC Classifications
G; G01; G01N; G01N21/00; G01N21/84; G01N21/88; G01N21/95; G01N21/9501; G01N21/9505; G01R; G01R31/00; G01R31/26; G01R31/265; G01R31/2656
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
80 words
A method of detecting internal inclusions in a semiconductor body comprising: directing through said body a beam of polychromatic light wherein the major portion of light transmitted is of energy less than the band-gap energy of the semiconductor material of said body, sensing the light energy transmitted through said body, with a light sensing element of the same type semiconductor material as said body, generating signals proportional to said sensed light energy, and utilizing said signals for detecting said inclusions.
Claim 2
Independent Claim
80 words
A method of detecting internal inclusions in a semiconductor body comprising: directing through said body a beam of polychromatic light wherein the major portion of light transmitted is of energy less than the band-gap energy of the semiconductor material of said body, sensing the light energy transmitted through said body, with a light sensing element of the same type semiconductor material as said body, generating signals proportional to said sensed light energy, and utilizing said signals for detecting said inclusions.
Claim 3
Dependent Claim
59 words
The method of claim 1 wherein said semiconductor body is silicon, and wherein light of a wavelength less than 1.1 microns is substantially filtered by the body, the silicon sensing element has a negligible response to light of a wavelength greater than 1.2 microns, the overall system response thus substantially being in the range of 1.1 to 1.2 microns.
Claim 4
Dependent Claim
59 words
The method of claim 1 wherein said semiconductor body is germanium, and wherein light of a wavelength less than 0.5 microns is substantially filtered by the body, the germanium sensing element has a negligible response to light of a wavelength greater than 0.6 microns, the overall system response thus substantially being in the range of 0.5 to 0.6 microns.
Claim 5
Independent Claim
123 words
An apparatus for detecting the presence of inclusions in a semiconductor body comprising: a polychromatic light source means for directing through said body a beam of polychromatic light wherein the major portion of light transmitted is of energy less than the band gap energy of the semiconductor material of said body, a mounting means for supporting a semiconductor body adjacent said light source, a light sensing means positioned for sensing light transmitted through said body from said light source and for generating signals proportional to said sensed light, said sensing means comprising a light sensing element of the same type semiconductor material of said body, a means responsive to said Signals for indicating the relative amounts of light transmitted through said semiconductor body.
Claim 6
Independent Claim
123 words
An apparatus for detecting the presence of inclusions in a semiconductor body comprising: a polychromatic light source means for directing through said body a beam of polychromatic light wherein the major portion of light transmitted is of energy less than the band gap energy of the semiconductor material of said body, a mounting means for supporting a semiconductor body adjacent said light source, a light sensing means positioned for sensing light transmitted through said body from said light source and for generating signals proportional to said sensed light, said sensing means comprising a light sensing element of the same type semiconductor material of said body, a means responsive to said Signals for indicating the relative amounts of light transmitted through said semiconductor body.
Claim 7
Dependent Claim
15 words
The apparatus of claim 4 wherein said light source is a tungsten filament light bulb.
Claim 8
Dependent Claim
16 words
The apparatus of claim 4 wherein said semiconductor material of said light sensing means is silicon.
Claim 9
Dependent Claim
16 words
The apparatus of claim 1 wherein said semiconductor material of said light sensing means is germanium.
Claim 10
Dependent Claim
56 words
The apparatus of claim 4 wherein said light sensing means is an image converter for electrically line scanning an area of said semiconductor body of said sensor means, thereby providing video output signals, and said means for indicating the relative amounts of light transmitted is a display screen operating on the output of said image converter.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1976-10-22 | 1977-04-23 | 1977-10-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1980-10-22 | 1981-04-23 | 1981-10-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1984-10-22 | 1985-04-23 | 1985-10-23 | $7700.00 | Window Closed / Lapsed |