US3764409A
Expired / Lapsed
US
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Method for fabricating a semiconductor component for a semiconductor circuit
Assignee: Hitachi Ltd
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Filing: 1969-09-29
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Granted: 1973-10-09
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Expires: 1989-09-29
Abstract
Abstract A SILICON SUBSTRATE OF ONE CONDUCTIVITY TYPE COVERED WITH A SILICON NITRIDE MASKING LAYER HAVING AN APERTURE IS VAPOR-ETCHED TO HAVE A HOLLOW PART THEREIN AND THEN HEAT TREATED IN A MIXTURE GAS OF HCL, SICL4, H2 AND ONE ACTIVE IMPURITY WITH A SECOND CONDUCTIVITY TYPE OPPOSITE TO THAT OF THE SUBSTRATE, SO THAT A SILICON EPITAXIAL LAYER OF THE SECOND CONDUCTIVITY TYPE IS EPITAXIALLY GROWN ONLY ON THE SURFACE OF THE HOLLOW PART IN SUCH A MANNER TO REFILL THE HOLLOW PART, THEREBY MAKING THE SILICON EPITAXIAL LAYER OPERABLY AS A RESISTANCE ELEMENT IN THE SUBSTRATE WITH A PN JUNCTION FORMED THEREIN ACCORDING TO THIS METHOD.
Inventors
- 👤 M Nomura
- 👤 M Nagata
- 👤 H Saida
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 12:08
CPC Classifications
H; H10; H10D; H10D1/00; H10D1/40; H10D1/43; H10D84/00; H10D84/01; H10D84/0112; H10D84/0119; H10D84/0121; H10D84/02; H10D84/03; H10D84/038; H10D84/60; H10D84/611; H10D84/613; H10D84/615; H10D84/67; H10D84/673; H10D99/00; H10P; H10P14/00; H10P14/20; H10P14/24; H10P14/27; H10P14/271; H10P14/29; H10P14/2901; H10P14/2902; H10P14/2905; H10P14/34; H10P14/3402; H10P14/3404; H10P14/3411; H10P50/00; H10P50/60; H10P50/64; H10P50/642; H10P50/644; H10W; H10W74/00; H10W74/40; H10W74/43; Y; Y10; Y10S; Y10S148/00; Y10S148/026; Y10S148/037; Y10S148/05; Y10S148/051; Y10S148/085; Y10S148/115; Y10S148/145
Claims Analysis
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References Cited (Backward Citations)
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1976-10-08 | 1977-04-09 | 1977-10-09 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1980-10-08 | 1981-04-09 | 1981-10-09 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1984-10-08 | 1985-04-09 | 1985-10-09 | $7700.00 | Window Closed / Lapsed |