US3764216A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Interferometric apparatus
Assignee: Leica Microsystems Inc
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Filing: 1971-03-02
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Granted: 1973-10-09
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Expires: 1991-03-02
Abstract
Abstract An interferometer utilizing holography for object comparison comprises a laser for generating a laser beam for dividing into a reference beam and a test beam. The beams are subsequently recombined to provide an interference pattern. Standard reflective or transmitting objects are positioned in the test beam and a permanent holographic recording of the interference pattern is made. Objects to be tested or compared to the standard are substituted for the standard. A second interference pattern is developed by radiation reflected or transmitted through the test object, the reference beam, and the reconstructed waveforms of the prior interference pattern recorded in the hologram.
Inventors
- 👤 D Bliek
- 👤 K Snow
- 👤 R Vandewarker
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 01:34
CPC Classifications
G; G01; G01B; G01B9/00; G01B9/02; G01B9/021; Y; Y10; Y10S; Y10S359/00; Y10S359/902
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
359 words
A holographic interferometric microscope having a first optical path for forming an image of an object and a second optical path for including a system holographic wavefront of the first optical path excluding an object and the second optical path excluding any imposed holographic wavefront comprising: laser means for generating a beam of radiation; a beam splitter for splitting the generated beam of radiation into a system beam for traversing the first optical path and a holographic reference beam for traversing the second optical path; a subject plane disposed in the first optical path for receiving an object for study; a micro-objective lens system disposed in the first optical path for receiving the system beam from said beam splitter, for directing said system beam toward said subject plane, for receiving a reflected system beam from said subject plane and for directing said reflected system beam through said beam splitter; a hologram including the system holographic wavefront optically aligned with the holographic reference beam in the second optical path; reflectance means disposed in the second optical path to direct the holographic reference beam through the optically aligned system hologram to holographically provide a reconstructed system beam providing the system holographic wavefront for intersecting a wavefront of the reflected system beam traversing the first optical path to form an interference pattern constructed by the wavefront of the reflected system beam in the first optical path and the system holographic wavefront from the second optical path; and optical means for observing the last mentioned interference pattern, formed when studying an object disposed at the subject plane, the last mentioned interference pattern formed by the system holographic wavefront from the aligned hologram in the second optical path and by an object wavefront traversing the first optical path which wavefront is directed through said beam splitter and which emanates from a system beam reflected from the object when the object is disposed in the subject plane, to thereby provide for viewing the last mentioned interference pattern which is a function of the object under study and which is generally independent of optical effects provided by generally undesirable intrinsic optical properties of the microscope elements.
Claim 2
Dependent Claim
359 words
A holographic interferometric microscope having a first optical path for forming an image of an object and a second optical path for including a system holographic wavefront of the first optical path excluding an object and the second optical path excluding any imposed holographic wavefront comprising: laser means for generating a beam of radiation; a beam splitter for splitting the generated beam of radiation into a system beam for traversing the first optical path and a holographic reference beam for traversing the second optical path; a subject plane disposed in the first optical path for receiving an object for study; a micro-objective lens system disposed in the first optical path for receiving the system beam from said beam splitter, for directing said system beam toward said subject plane, for receiving a reflected system beam from said subject plane and for directing said reflected system beam through said beam splitter; a hologram including the system holographic wavefront optically aligned with the holographic reference beam in the second optical path; reflectance means disposed in the second optical path to direct the holographic reference beam through the optically aligned system hologram to holographically provide a reconstructed system beam providing the system holographic wavefront for intersecting a wavefront of the reflected system beam traversing the first optical path to form an interference pattern constructed by the wavefront of the reflected system beam in the first optical path and the system holographic wavefront from the second optical path; and optical means for observing the last mentioned interference pattern, formed when studying an object disposed at the subject plane, the last mentioned interference pattern formed by the system holographic wavefront from the aligned hologram in the second optical path and by an object wavefront traversing the first optical path which wavefront is directed through said beam splitter and which emanates from a system beam reflected from the object when the object is disposed in the subject plane, to thereby provide for viewing the last mentioned interference pattern which is a function of the object under study and which is generally independent of optical effects provided by generally undesirable intrinsic optical properties of the microscope elements.
Claim 3
Dependent Claim
33 words
The holographic interferometric microscope as defined in claim 1, wherein The subject plane disposed in the first optical path for receiving an object for study includes a high quality plano first surface mirror.
Claim 4
Dependent Claim
55 words
The holographic interferometric microscope as defined in claim 1, further comprising: optical means including a telescopic lens system disposed to receive the beam of radiation from said laser means, to direct said beam of radiation to said beam splitter whereat the beam of radiation is split into a system beam and a holographic reference beam.
Claim 5
Dependent Claim
37 words
The holographic interferometric microscope as defined in claim 1, wherein said reflectance means comprises: a reflector disposed at an inclination to reflect the holographic reference beam, traversing from said beam splitter, to intersect the reflected system beam.
Claim 6
Dependent Claim
331 words
A holographic interferometric microscope having a first optical path for forming an image of an object and a second optical path for including a system holographic wavefront of the first optical path excluding an object and the second optical path excluding any imposed holographic wavefront, comprising: laser means for generating a beam of radiation; a beam splitter for splitting the generated beam of radiation into a system beam for traversing the first optical path and a holographic reference beam for traversing the second optical path; a subject plane disposed in the first optical path for receiving a non-opaque object for study; a micro-objective lens system disposed in the first optical path for receiving the system beam from said beam splitter and for projecting the system beam through the subject plane; a hologram including the system holographic wavefront optically aligned with the holographic reference beam in the second optical path; reflectance means disposed in the second optical path to direct the holographic reference beam through the optically aligned system hologram to holographically provide a reconstructed system beam providing the system holographic wavefront for intersecting a wavefront of the reflected system beam traversing the first optical path to form an interference pattern constructed by the wavefront of the reflected system beam in the first optical path and the system holographic wavefront from the second optical path; and optical means for observing the last mentioned interference pattern, formed when studying a non-opaque object disposed at the subject plane, the last mentioned interference pattern formed by the system holographic wavefront from the aligned hologram in the second optical path and by an object wavefront traversing the first optical path which includes the micro-objective lens system and the subject plane having disposed therein the non-opaque object under study, to thereby provide for viewing the last mentioned interference pattern which is a function of the object under study and which is generally independent of optical effects provided by generally undesirable intrinsic optical properties of the microscope elements.
Claim 7
Dependent Claim
331 words
A holographic interferometric microscope having a first optical path for forming an image of an object and a second optical path for including a system holographic wavefront of the first optical path excluding an object and the second optical path excluding any imposed holographic wavefront, comprising: laser means for generating a beam of radiation; a beam splitter for splitting the generated beam of radiation into a system beam for traversing the first optical path and a holographic reference beam for traversing the second optical path; a subject plane disposed in the first optical path for receiving a non-opaque object for study; a micro-objective lens system disposed in the first optical path for receiving the system beam from said beam splitter and for projecting the system beam through the subject plane; a hologram including the system holographic wavefront optically aligned with the holographic reference beam in the second optical path; reflectance means disposed in the second optical path to direct the holographic reference beam through the optically aligned system hologram to holographically provide a reconstructed system beam providing the system holographic wavefront for intersecting a wavefront of the reflected system beam traversing the first optical path to form an interference pattern constructed by the wavefront of the reflected system beam in the first optical path and the system holographic wavefront from the second optical path; and optical means for observing the last mentioned interference pattern, formed when studying a non-opaque object disposed at the subject plane, the last mentioned interference pattern formed by the system holographic wavefront from the aligned hologram in the second optical path and by an object wavefront traversing the first optical path which includes the micro-objective lens system and the subject plane having disposed therein the non-opaque object under study, to thereby provide for viewing the last mentioned interference pattern which is a function of the object under study and which is generally independent of optical effects provided by generally undesirable intrinsic optical properties of the microscope elements.
Claim 8
Dependent Claim
55 words
The holographic interferometric microscope as defined in claim 5, further comprising: optical means including a telescopic lens system disposed to receive the beam of radiation from said laser means, to direct said beam of radiation to said beam splitter whereat the beam of radiation is split into a system beam and a holographic reference beam.
Claim 9
Dependent Claim
37 words
The holographic interferometric microscope as defined in claim 5, wherein said reflectance means comprises: a reflector disposed at an inclination to reflect the holographic reference beam, traversing from said beam splitter, to intersect the reflected system beam.
Claim 10
Dependent Claim
366 words
A holographic interferometric microscope having a first optical path for forming an image of an object and a second optical path for including a system holographic wavefront of the first optical path including a standard object and the second optical path excluding any imposed holographic wavefront, comprising: laser means for generating a beam of radiation; a beAm splitter for splitting the generated beam of radiation into a system beam for traversing the first optical path and a holographic reference beam for traversing the second optical path; a subject plane disposed in the first optical path for receiving an object for study; a micro-objective lens system disposed in the first optical path for receiving the system beam from said beam splitter, for directing said system beam toward an object in the subject plane, for receiving a reflected system beam from the object in the subject plane and for directing said reflected system beam through said beam splitter; a hologram including the system holographic wavefront optically aligned with the holographic reference beam in the second optical path; reflectance means disposed in the second optical path to direct the holographic reference beam through the optically aligned system hologram to holographically provide a reconstructed system beam providing the system holographic wavefront for intersecting a wavefront of the reflected system beam traversing the first optical path to form an interference pattern constructed by the wavefront of the reflected system beam in the first optical path and the system holographic wavefront from the second optical path; and optical means for observing the last mentioned interference pattern formed when studying an object disposed at the subject plane, the last mentioned interference pattern formed by the system holographic wavefront from the aligned hologram in the second optical path and by an object wavefront traversing the first optical path which wavefront is directed through said beam splitter and which emanates from a system beam reflected from the object when the object is disposed in the subject plane, to thereby provide for viewing the last mentioned interference pattern which is a function of the object under study and which is generally independent of optical effects provided by generally undesirable intrinsic optical properties of the microscope elements.
Claim 11
Dependent Claim
366 words
A holographic interferometric microscope having a first optical path for forming an image of an object and a second optical path for including a system holographic wavefront of the first optical path including a standard object and the second optical path excluding any imposed holographic wavefront, comprising: laser means for generating a beam of radiation; a beAm splitter for splitting the generated beam of radiation into a system beam for traversing the first optical path and a holographic reference beam for traversing the second optical path; a subject plane disposed in the first optical path for receiving an object for study; a micro-objective lens system disposed in the first optical path for receiving the system beam from said beam splitter, for directing said system beam toward an object in the subject plane, for receiving a reflected system beam from the object in the subject plane and for directing said reflected system beam through said beam splitter; a hologram including the system holographic wavefront optically aligned with the holographic reference beam in the second optical path; reflectance means disposed in the second optical path to direct the holographic reference beam through the optically aligned system hologram to holographically provide a reconstructed system beam providing the system holographic wavefront for intersecting a wavefront of the reflected system beam traversing the first optical path to form an interference pattern constructed by the wavefront of the reflected system beam in the first optical path and the system holographic wavefront from the second optical path; and optical means for observing the last mentioned interference pattern formed when studying an object disposed at the subject plane, the last mentioned interference pattern formed by the system holographic wavefront from the aligned hologram in the second optical path and by an object wavefront traversing the first optical path which wavefront is directed through said beam splitter and which emanates from a system beam reflected from the object when the object is disposed in the subject plane, to thereby provide for viewing the last mentioned interference pattern which is a function of the object under study and which is generally independent of optical effects provided by generally undesirable intrinsic optical properties of the microscope elements.
Claim 12
Dependent Claim
337 words
A holographic interferometric microscope having a first optical path for forming an image of an object and a second optical path for including a system holographic wavefront of the first optical path including a standard non-opaque object and the second optical path excluding any imposed holographic wavefront, comprising: laser means for generating a beam of radiation; a beam splitter for splitting the generated beam of radiation into a system beam for traversing the first optical path and a holographic reference beam for traversing the second optical path; a subject plane disposed in the first optical path for receiving a non-opaque object for study; a micro-objective lens system disposed in the first optical path for receiving the system beam from said beam splitter and for projecting the system beam through a non-opaque object in the subject plane; a hologram including the system holographic wavefront optically aligned with the holographic reference beam in the second optical path; reflectance means disposed in the second optical path to direct the holographic reference beam through the optically aligned system hologram to holographically provide a reconstructed system beam providing the system holographic wavefront for intersecting a wavefront of the reflected system beam traversing the first optical path to form an interference pattern constructed by the wavefront of the reflected system beam in the first optical path and the system holographic wavefront from the second optical path; and optical means for observing the last mentioned interference pattern, formed when studying a non-opaque object disposed at the subject plane, the last mentioned interference pattern formed by the system holographic wavefront from the aligned hologram in the second optical path and by an object wavefront traversing the first optical path which includes the micro-objective lens system and the subject plane having disposed therEin the non-opaque object under study, to thereby provide for viewing the last mentioned interference pattern which is a function of the object under study and which is generally independent of optical effects provided by generally undesirable intrinsic optical properties of the microscope elements.
Claim 13
Dependent Claim
337 words
A holographic interferometric microscope having a first optical path for forming an image of an object and a second optical path for including a system holographic wavefront of the first optical path including a standard non-opaque object and the second optical path excluding any imposed holographic wavefront, comprising: laser means for generating a beam of radiation; a beam splitter for splitting the generated beam of radiation into a system beam for traversing the first optical path and a holographic reference beam for traversing the second optical path; a subject plane disposed in the first optical path for receiving a non-opaque object for study; a micro-objective lens system disposed in the first optical path for receiving the system beam from said beam splitter and for projecting the system beam through a non-opaque object in the subject plane; a hologram including the system holographic wavefront optically aligned with the holographic reference beam in the second optical path; reflectance means disposed in the second optical path to direct the holographic reference beam through the optically aligned system hologram to holographically provide a reconstructed system beam providing the system holographic wavefront for intersecting a wavefront of the reflected system beam traversing the first optical path to form an interference pattern constructed by the wavefront of the reflected system beam in the first optical path and the system holographic wavefront from the second optical path; and optical means for observing the last mentioned interference pattern, formed when studying a non-opaque object disposed at the subject plane, the last mentioned interference pattern formed by the system holographic wavefront from the aligned hologram in the second optical path and by an object wavefront traversing the first optical path which includes the micro-objective lens system and the subject plane having disposed therEin the non-opaque object under study, to thereby provide for viewing the last mentioned interference pattern which is a function of the object under study and which is generally independent of optical effects provided by generally undesirable intrinsic optical properties of the microscope elements.
Claim 14
Independent Claim
271 words
A method of producing for viewing in an optical instrument, an interference pattern constructed by a wavefront traversing from an object under study in the optical instrument intersecting a wavefront from a hologram formed of the optical path of the optical instrument, comprising the steps of: mounting radiation sensitive film in the optical path of a conventional microscope for receiving for recording a first interference pattern formed by a first wavefront traversing the optical path of the conventional microscope, intersecting with a second wavefront bypassing the optical path of the conventional microscope, wherein the first and second wavefronts originate from a single beam split to, respectively, traverse the optical path and the bypass path; exposing the film in the microscope to the first interference pattern at the intersection of the wavefronts to record the first interference pattern; removing and developing the film to thereby form a hologram and permanently register the first interference pattern on the film; remounting the film displaying the first interference pattern; aligning the first interference pattern of the exposed film with the first and second wavefronts which formed the first interference pattern; mounting an object for study in a study plane disposed in the optical path of the conventional microscope; and viewing a second interference pattern formed by and at the intersection of the wavefront of the hologram and the wavefront traversing from the object under study disposed in the subject plane, to provide for viewing an interference pattern which is a function of the object under study and which is generally independent of optical effects provided by generally undesirable intrinsic optical properties of the conventional microscope.
Claim 15
Independent Claim
271 words
A method of producing for viewing in an optical instrument, an interference pattern constructed by a wavefront traversing from an object under study in the optical instrument intersecting a wavefront from a hologram formed of the optical path of the optical instrument, comprising the steps of: mounting radiation sensitive film in the optical path of a conventional microscope for receiving for recording a first interference pattern formed by a first wavefront traversing the optical path of the conventional microscope, intersecting with a second wavefront bypassing the optical path of the conventional microscope, wherein the first and second wavefronts originate from a single beam split to, respectively, traverse the optical path and the bypass path; exposing the film in the microscope to the first interference pattern at the intersection of the wavefronts to record the first interference pattern; removing and developing the film to thereby form a hologram and permanently register the first interference pattern on the film; remounting the film displaying the first interference pattern; aligning the first interference pattern of the exposed film with the first and second wavefronts which formed the first interference pattern; mounting an object for study in a study plane disposed in the optical path of the conventional microscope; and viewing a second interference pattern formed by and at the intersection of the wavefront of the hologram and the wavefront traversing from the object under study disposed in the subject plane, to provide for viewing an interference pattern which is a function of the object under study and which is generally independent of optical effects provided by generally undesirable intrinsic optical properties of the conventional microscope.
Claim 16
Independent Claim
287 words
A method of producing for viewing in an optical instrument, an interference pattern constructed by a wavefront traversing from an object under study in the optical instrument intersecting a wavefront from a hologram formed of the optical path of the optical instrument and a standard object disposed in the optical path, comprising the steps of: mounting radiation sensitive film in the optical path of a conventional microscope for receiving for recording a first interference pattern formed by a first wavefront traversing the optical path of the conventional microscope with a standard object disposed therein, intersecting with a second wavefront bypassing the optical path of the conventional microscope, wherein the first and second wavefronts originate from a single beam split to, respectively, traverse the optical path and the bypass path; exposing the film in the microscope to the first interference pattern at the intersection of the wavefronts to record the first interference pattern; removing and developing the film to thereby form a hologram and permanently register the first interference pattern on the film; remounting the film displaying the first interference pattern; aligning the first interference pattern of the exposed film with the first and second wavefronts which formed the first interference pattern; mounting an object for study in a study plane disposed in the optical path of the conventional microscope; and viewing a second interference pattern formed by and at the intersection of the wavefront of the hologram and by the wavefront traversing from the object under study disposed in the subject plane, to provide for viewing an interference pattern which is a function of the object under study and which is generally independent of optical effects provided by generally undesirable intrinsic optical properties of the conventionAl microscope.
Claim 17
Independent Claim
287 words
A method of producing for viewing in an optical instrument, an interference pattern constructed by a wavefront traversing from an object under study in the optical instrument intersecting a wavefront from a hologram formed of the optical path of the optical instrument and a standard object disposed in the optical path, comprising the steps of: mounting radiation sensitive film in the optical path of a conventional microscope for receiving for recording a first interference pattern formed by a first wavefront traversing the optical path of the conventional microscope with a standard object disposed therein, intersecting with a second wavefront bypassing the optical path of the conventional microscope, wherein the first and second wavefronts originate from a single beam split to, respectively, traverse the optical path and the bypass path; exposing the film in the microscope to the first interference pattern at the intersection of the wavefronts to record the first interference pattern; removing and developing the film to thereby form a hologram and permanently register the first interference pattern on the film; remounting the film displaying the first interference pattern; aligning the first interference pattern of the exposed film with the first and second wavefronts which formed the first interference pattern; mounting an object for study in a study plane disposed in the optical path of the conventional microscope; and viewing a second interference pattern formed by and at the intersection of the wavefront of the hologram and by the wavefront traversing from the object under study disposed in the subject plane, to provide for viewing an interference pattern which is a function of the object under study and which is generally independent of optical effects provided by generally undesirable intrinsic optical properties of the conventionAl microscope.
References Cited (Backward Citations)
US2770166A
Cited
US3511554A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1976-10-08 | 1977-04-09 | 1977-10-09 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1980-10-08 | 1981-04-09 | 1981-10-09 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1984-10-08 | 1985-04-09 | 1985-10-09 | $7700.00 | Window Closed / Lapsed |