US3757120A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Etic coils of corpusular beam apparatus control and regulating arrangement for the current fed to electromagn
Assignee: Siemens AG
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Filing: 1972-09-15
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Granted: 1973-09-04
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Expires: 1992-09-15
Abstract
Abstract An improved setting device for providing accurately reproducible, incrementally variable control voltages to the input of a control and regulating circuit for adjusting electromagnetic coil current in charged-particle beam apparatus such as electron microscopes. The setting device includes a digital counter, preferably a forward-backward counter, connected to the input of the control circuit through a digital-to-analog converter. A pulse source, preferably pushbutton-controlled, provides stepping pulses, either one-by-one, or in a series of pulses of variable repetition rate and/or preselectable number, for adjusting the output voltage of the setting device to achieve, for example, desired values of magnification or focus as indicated by a numeric display device connected to the output of the pulse source and/or the output of the digital counter.
Inventors
- 👤 K Muller
- 👤 V Rindfleisch
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 16:53
CPC Classifications
G; G05; G05B; G05B19/00; G05B19/02; G05B19/04; G05B19/07; G05B19/075; G21; G21K; G21K1/00; G21K1/08; G21K1/093; H; H01; H01J; H01J37/00; H01J37/02; H01J37/24
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
88 words
A setting device for providing a range of control voltages in incremental steps to the input of a control circuit for regulating the current through an electromagnetic coil of a charged-particle beam apparatus comprising: a. a digital counter having an input for receiving counting pulses and an output for providing a digital count of the counting pulses supplied to the input and, b. a digital-to-analog converter having an input connected to the output of the digital counter and an output connected to the input of the control circuit.
Claim 2
Dependent Claim
88 words
A setting device for providing a range of control voltages in incremental steps to the input of a control circuit for regulating the current through an electromagnetic coil of a charged-particle beam apparatus comprising: a. a digital counter having an input for receiving counting pulses and an output for providing a digital count of the counting pulses supplied to the input and, b. a digital-to-analog converter having an input connected to the output of the digital counter and an output connected to the input of the control circuit.
Claim 3
Dependent Claim
14 words
The setting device of claim 1 wherein the digital counter comprises a forward-backward counter.
Claim 4
Dependent Claim
28 words
The setting device of claim 1 further comprising: a pulse generating means connected to the input of the digital counter for supplying counting pulses to the digital counter.
Claim 5
Dependent Claim
34 words
The setting device of claim 3 wherein the pulse generating means comprises a manually-operated control means, the pulse generating means supplying a single counting pulse in response to each operation of the control means.
Claim 6
Dependent Claim
35 words
The setting device of claim 3 wherein the pulse generating means comprises a manually operated control means, the pulse generating means supplying a series of pulses in response to each operation of the control means.
Claim 7
Dependent Claim
43 words
The setting device of claim 5 wherein the pulse generating means further comprises a rate control means for presetting the repetition rate of the series of pulses supplied by the pulse generating means in response to each operation of the manually-operated control means.
Claim 8
Dependent Claim
44 words
The setting device of claim 5 wherein the pulse generating means further comprises a numerical control means for presetting the number of pulses in the series of pulses supplied by the pulse generating means in response to each operation of the manually-operated control means.
Claim 9
Dependent Claim
21 words
The setting device of claim 1 further comprising a numeric display device connected to the output of the pulse generating means.
Claim 10
Dependent Claim
32 words
The setting device of claim 8 wherein the numeric display device comprises a zero-setting means for setting the count of the display to zero independently of the count of the digital counter.
Claim 11
Dependent Claim
33 words
The setting device of claim 9 wherein the electromagnetic coil comprises the objective lens coil of an electron microscope and the numeric display device is calibrated to indicate defocusing values in length units.
Claim 12
Dependent Claim
40 words
The setting device of claim 6 wherein the electromagnetic coil comprises the objective lens coil of an electron microscope and further comprising a means for adjusting the rate control means as a function of the magnification power of tHe microscope.
Claim 13
Dependent Claim
40 words
The setting device of claim 7 wherein the electromagnetic coil comprises the objective lens coil of an electron microscope and further comprising a means for adjusting the numerical control means as a function of the magnification power of the microscope.
References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1976-09-03 | 1977-03-05 | 1977-09-04 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1980-09-03 | 1981-03-05 | 1981-09-04 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1984-09-03 | 1985-03-05 | 1985-09-04 | $7700.00 | Window Closed / Lapsed |