Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
73 words
A method for outgassing an ion source comprising the steps of assembling the ion source electrodes in the correct positions relative to each other, heating said ion source electrodes to approximately 600*C, evacuating gas emanating from said electrodes, cooling said ion source electrodes to substantially less than 600*C, and inducing a permanent magnetic field in at least one of said electrodes to produce a magnetic flux density of about 400 Gauss or more.
Claim 2
Independent Claim
73 words
A method for outgassing an ion source comprising the steps of assembling the ion source electrodes in the correct positions relative to each other, heating said ion source electrodes to approximately 600*C, evacuating gas emanating from said electrodes, cooling said ion source electrodes to substantially less than 600*C, and inducing a permanent magnetic field in at least one of said electrodes to produce a magnetic flux density of about 400 Gauss or more.
Claim 3
Dependent Claim
58 words
A method of assembling an ion source according to claim 1 wherein prior to the step of inducing a permanent field, said outgassed ion source is placed within a gas-tight enclosure, and the following steps are performed, heating said enclosure and said ion source to about 400*C, and evacuating gas released from said ion source and said enclosure.
Claim 4
Dependent Claim
27 words
A method of assembling an ion source according to claim 1 wherein said gas evacuating step comprises establishing a gas pressure of about 105 mm of hg.
Claim 5
Independent Claim
108 words
A method for outgassing an ion source comprising the steps of assembling the ion source electrodes in predetermined positions relative to each other, heating said ion source electrodes to a temperature which is sufficiently high to outgas said electrodes but which, at the same time, is less than the temperature at which the electrodes will undergo a change adversely affecting the magnetic properties of said electrodes, evacuating gas emanating from said electrodes, cooling said ion source electrodes to a substantially lower temperature, and inducing a permanent magnetic field in at least one of said electrodes to produce an average magnetic flux density of about 400 Gauss or More.
Claim 6
Independent Claim
108 words
A method for outgassing an ion source comprising the steps of assembling the ion source electrodes in predetermined positions relative to each other, heating said ion source electrodes to a temperature which is sufficiently high to outgas said electrodes but which, at the same time, is less than the temperature at which the electrodes will undergo a change adversely affecting the magnetic properties of said electrodes, evacuating gas emanating from said electrodes, cooling said ion source electrodes to a substantially lower temperature, and inducing a permanent magnetic field in at least one of said electrodes to produce an average magnetic flux density of about 400 Gauss or More.
Claim 7
Dependent Claim
23 words
The method of claim 4 wherein said gas evacuating step comprises establishing a gas pressure of about 105 mm of hg or less.