US3755048A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Apparatus for use in semiconductor cleaning and transferring processes
Assignee: Texas Instruments Inc
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Filing: 1970-04-03
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Granted: 1973-08-28
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Expires: 1990-04-03
Abstract
Abstract In a method of cleaning and transferring semiconductors, a paper chip transfer member is glued to a plurality of beam lead chips while the chips are secured to a saphire disk by a layer of wax. Then, the wax is melted to release the chips, and the chips are cleaned by immersing the chips and the transfer member in a wax solvent. After the cleaning step, the chips are secured to a polyester chip receiving member by the simultaneous application of heat and pressure. The transfer member is then released from the chips by immersing the transfer member, the chips and the receiving member in a glue solvent. Finally, the chips are cleaned by immersing the chips and the receiving member in another solvent.
Inventors
- 👤 W Schubert
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 23:43
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/04; H10P72/0402; H10P72/0406; H10P72/0411; H10P72/0416; Y; Y10; Y10S; Y10S269/00; Y10S269/903; Y10T; Y10T156/00; Y10T156/17; Y10T156/1702; Y10T156/1705; Y10T156/1707; Y10T29/00; Y10T29/53; Y10T29/53539
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
217 words
Apparatus of the type used in semiconductor cleaning and transferring processes, comprising in combination: a. a first ring member having a central aperture of a first diameter and a plurality of selectively located openings formed in close proximity to the outer edge thereof, said first ring member having a tapered portion substantially circumscribing said central aperture to form a substantially conical male gripping surface; b. a second ring member having a central aperture of a second diameter slightly larger than said first diameter of said first ring member, and a plurality of selectively located openings formed in close proximity to the outer edge thereof with said central aperture having a tapered side wall to form a substantially conical female gripping surface; c. securing means for selectively passing through respective openings in said first ring member and a co-axial opening in said second ring member for releasably securing together said first and second ring members so that said male gripping surface tightly abuts said female gripping surface; and d. a flexible membrane having a diameter larger than the central apertures of said first and second ring members positioned therebetween with the peripheral edge thereof lying between said male and female gripping edges in a stretched condition tightly across said central apertures of said first and second ring members.
Claim 2
Dependent Claim
217 words
Apparatus of the type used in semiconductor cleaning and transferring processes, comprising in combination: a. a first ring member having a central aperture of a first diameter and a plurality of selectively located openings formed in close proximity to the outer edge thereof, said first ring member having a tapered portion substantially circumscribing said central aperture to form a substantially conical male gripping surface; b. a second ring member having a central aperture of a second diameter slightly larger than said first diameter of said first ring member, and a plurality of selectively located openings formed in close proximity to the outer edge thereof with said central aperture having a tapered side wall to form a substantially conical female gripping surface; c. securing means for selectively passing through respective openings in said first ring member and a co-axial opening in said second ring member for releasably securing together said first and second ring members so that said male gripping surface tightly abuts said female gripping surface; and d. a flexible membrane having a diameter larger than the central apertures of said first and second ring members positioned therebetween with the peripheral edge thereof lying between said male and female gripping edges in a stretched condition tightly across said central apertures of said first and second ring members.
Claim 3
Dependent Claim
50 words
The apparatus of claim 1 wherein at least one of any two coaxially positioned openings in said first and second ring members is internally threaded, and wherein said securing means are externally threaded screws, whereby said screws threadably engage respective openings for securing together said first and second ring members.
Claim 4
Dependent Claim
57 words
The apparatus of claim 2 and further including a plurality of indentations formed in close proximity to the edge of said second ring member wherein at least two of said apparatus are relatively aligned in overlying relationship with each other by the respective positioning of the screws of one apparatus and the indentations of the adjacent apparatus.
Claim 5
Dependent Claim
48 words
The apparatus of claim 3 wherein one of said aligned apparatus is a chip receiving member and the other is a chip transistor member, whereby a semiconductor chip positioned between the membranes thereof and releasably secured to one of said apparatus is adapted for cleaning and transferring purposes.
References Cited (Backward Citations)
US2760299A
Cited
US2957269A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1976-08-27 | 1977-02-26 | 1977-08-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1980-08-27 | 1981-02-26 | 1981-08-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1984-08-27 | 1985-02-26 | 1985-08-28 | $7700.00 | Window Closed / Lapsed |