US3753623A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Turbo molecular vacuum pump
Assignee: WC Heraus GmbH and Co KG
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Filing: 1972-07-27
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Granted: 1973-08-21
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Expires: 1992-07-27
Abstract
Abstract A housing retains stationary turbine blade rings, extending radially inwardly therefrom; interleaved between the stationary blade rings are rotatable blades, secured to a shaft; the shaft has a lower hollow portion surrounding an upright bolt, extending from the housing. Lubricant under pressure is introduced through a duct centrally of the bolt between the top surface of the bolt and the bottom surface of the lower portion of the shaft, which forms a hollow surrounding the bolt, to journal the bolt, in a hydrodynamic or hydrostatic bearing, and prevent splatter of lubricating oil into the high vacuum region above the lower end of the shaft, and where the turbine blade rings are located.
Inventors
- 👤 M Wutz
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 11:12
CPC Classifications
F; F04; F04D; F04D19/00; F04D19/02; F04D19/04; F04D19/042; F04D29/00; F04D29/05; F04D29/056; F04D29/057; F04D29/06; F04D29/063; F16; F16C; F16C2360/00; F16C2360/44; F16C2360/45
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
165 words
Turbo molecular vacuum pump comprising a housing (1); stationary turbine blade rings (21) mounted in the housing and extending radially inwardly from the housing walls in parallel, essentially horizontally spaced rings; a turbine rotor including a vertical shaft (24) rotatable in the housing and rotatable turbine blade rings (20) secured to the shaft and extending radially outwardly from the shaft in parallel, essentially horizontally spaced layers located intermediate the stationary turbine blade rings; a stationary bolt (4) extending upwardly from the bottom wall of the housing; the turbine rotor terminating in a hollow lower portion (3) surrounding said bolt (4); forced lubricating means (5, 6, 15, 16) extending into the space (11) within the hollow portion and the bolt and between the downwardly facing top wall (25) of said lower portion and the top surface (26) of the bolt (4) to fill said space with lubricant and form a hydrostatic and hydrodynamic bearing for the turbine rotor; and motor means (2) driving said turbine rotor.
Claim 2
Dependent Claim
165 words
Turbo molecular vacuum pump comprising a housing (1); stationary turbine blade rings (21) mounted in the housing and extending radially inwardly from the housing walls in parallel, essentially horizontally spaced rings; a turbine rotor including a vertical shaft (24) rotatable in the housing and rotatable turbine blade rings (20) secured to the shaft and extending radially outwardly from the shaft in parallel, essentially horizontally spaced layers located intermediate the stationary turbine blade rings; a stationary bolt (4) extending upwardly from the bottom wall of the housing; the turbine rotor terminating in a hollow lower portion (3) surrounding said bolt (4); forced lubricating means (5, 6, 15, 16) extending into the space (11) within the hollow portion and the bolt and between the downwardly facing top wall (25) of said lower portion and the top surface (26) of the bolt (4) to fill said space with lubricant and form a hydrostatic and hydrodynamic bearing for the turbine rotor; and motor means (2) driving said turbine rotor.
Claim 3
Dependent Claim
36 words
Turbine pump according to claim 1, wherein the top surface (26) of the bolt (4) and the facing downwardly directed surface (25) of the hollow rotor portion (3) are formed with a mating recess and projection.
Claim 4
Dependent Claim
15 words
Turbine pump according to claim 2, wherein the mating recess and projection are substantially hemispherical.
Claim 5
Dependent Claim
31 words
Turbine pump according to claim 2, wherein the recess is formed in the top surface (26) of the bolt and the projection extends from the facing surface of the rotor portion.
Claim 6
Dependent Claim
28 words
Turbine pump according to claim 1, further comprising at least one radial bearing (12) located laterally between the bolt and the inner surrounding wall of the rotor portion.
Claim 7
Dependent Claim
34 words
Turbine pump according to claim 5, wherein one radial bearing (12) is located adjacent the top end of the bolt and another radial bearing is located adjacent the lower end of the rotor portion.
Claim 8
Dependent Claim
19 words
Turbine pump according to claim 5, wherein the radial bearing (12'') is unitary with the rotatable lower rotor portion.
Claim 9
Dependent Claim
33 words
Turbine pump according to claim 1, wherein the cross-sectional area included within the lower rotor portion is smaller in the region adjacent its inner end than in the region adjacent its outer end.
Claim 10
Dependent Claim
33 words
Turbine pump according to claim 1, wherein the forced lubrication supply means comprises a longitudinal duct (15) formed in the bolt (4) and connected to a source of lubricant (5, 6) under pressure.
Claim 11
Dependent Claim
49 words
Turbine pump according to claim 5, wherein the forced lubrication means comprises a central longitudinal duct (15) formed within the bolt (4) and connected to a source of lubricant (5, 6) under pressure, and lubricant duct means (16) communicating with the central duct (15) and the radial bearings (12).
Claim 12
Dependent Claim
18 words
Turbine pump according to claim 1, wherein the forced lubrication supply means coMprises a volumetric lubricant pump (5).
Claim 13
Dependent Claim
36 words
Turbine pump according to claim 11, further comprising emergency pneumatic pressure means (9, 10) connected to the forced lubricating supply means to apply pressure to lubricant contained therein in case of failure of said volumetric pump.
Claim 14
Dependent Claim
28 words
Turbine pump according to claim 1, wherein the motor means comprises an electric motor, the hollow lower portion of the turbine rotor forming the rotor for said motor.
Claim 15
Dependent Claim
34 words
Turbine pump according to claim 13, wherein the motor is a medium frequency motor, the stator (2) of which is located opposite the rotor, a sealing gap (17) separating the rotor and the stator.
Claim 16
Dependent Claim
103 words
Turbine pump according to claim 1, wherein the forced lubricating means comprises a closed lubricating circuit including lubricant pressure means (5, 6, 9, 10) located externally of the housing; a duct extending from said pressure means longitudinally through the bolt to supply lubricant under pressure between the downwardly facing inner wall surface (25) of the lower portion (3) of the turbine rotor and the upwardly facing top surface (26) of the bolt (4) and laterally thereof to journal said rotor hydrostatically and hydrodynamically; and duct means (19) formed in the lubricant connecting return lubricant to the inlet side of the lubrican pressure means.
Claim 17
Dependent Claim
23 words
Turbine pump according to claim 2, wherein the mating recesses and projections are formed as a spherical spiral groove bearing (FIG. 2b: 32).
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1976-08-20 | 1977-02-19 | 1977-08-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1980-08-20 | 1981-02-19 | 1981-08-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1984-08-20 | 1985-02-19 | 1985-08-21 | $7700.00 | Window Closed / Lapsed |