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US3752713A Expired / Lapsed US ⏱️ 0.0 years remaining

Method of manufacturing semiconductor elements by liquid phase epitaxial growing method

Assignee: Oki Electric Industry Co Ltd
•
Filing: 1971-02-10
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Granted: 1973-08-14
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Expires: 1991-02-10
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Abstract

Abstract A SEMICONDUCTOR ELEMENT OF MULTI-LAYER CONSTRUCTION WITH P-N JUCTIONS BETWEEN LAYERS IS PREPARED BY CONTACTING A SEMICONDUCTOR SUBSTRATE WITH A SOLUTION CONTAINING AT LEAST THREE ELEMENTS OF GROUPS III AND V AND DOPED WITH A P-TYPE IMPURITY AND A N-TYPE IMPURITY, CONTACTING A SEMICONDUCTOR SUBSTRATE WITH THE SOLUTION, HEATING THE SEMICONDUCTOR SUBSTRATE AND THE SOLUTION TO A PREDETERMINED TEMPERATURE AND REPEATING ALTERNATELY A RELATIVELY SLOW COOLING AND A RELATIVELY FAST COOLING TO GROW LAYERS OF SEMICONDUCTOR CRYSTALS OF THE III-V COMPOUNDS.

Inventors

  • 👤 M Sakuta
  • 👤 T Ishida

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-24 02:09
CPC Classifications
H; H10; H10D; H10D99/00; H10P; H10P14/00; H10P14/20; H10P14/26; H10P14/263; H10P14/265; H10P14/29; H10P14/2901; H10P14/2907; H10P14/2909; H10P14/2911; H10P14/34; H10P14/3402; H10P14/3414; H10P14/3418; H10P14/3421; H10P14/3438; H10P14/3441; H10P14/3442; H10P14/3444; H10P14/3446; Y; Y10; Y10S; Y10S148/00; Y10S148/056; Y10S148/065; Y10S148/067; Y10S148/072; Y10S148/107

Claims Analysis

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References Cited (Backward Citations)

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USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1976-08-13 1977-02-12 1977-08-14 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1980-08-13 1981-02-12 1981-08-14 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1984-08-13 1985-02-12 1985-08-14 $7700.00 Window Closed / Lapsed

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