US3751163A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Step and repeat apparatus with gas bearing suspension
Assignee: International Business Machines Corp
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Filing: 1972-02-24
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Granted: 1973-08-07
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Expires: 1992-02-24
Abstract
Abstract Apparatus for step and repeat exposure of a photosensitive plate which eliminates the necessity of removing the exposure head from the plate during stepping and thereafter repositioning the head for the next exposure. The exposure head has a planar bearing surface for movement adjacent the photosensitive plate and a curved bearing surface for engagement with a complementarily curved bearing surface of the exposure head support. Both the planar and curved bearing surfaces are provided with gas films therebetween in order to practically eliminate friction and allowing omnidirectional movement of the exposure head relative to the support. The gas film provided at the planar bearing surface of the support head is used to maintain the support head out of contact with the photosensitive plate to thereby allow relative movement in either of two coordinate directions parallel with the plate. This construction permits the exposure head to accommodate variations in the thickness of the photosensitive plate during movement under the head.
Inventors
- 👤 W Sutton
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 07:04
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70691; G03F7/70716
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
161 words
In apparatus for step and repeat exposure of a planar photosensitive plate, a device for supporting an image element in near-contact with said plate and for relative movement therebetween which comprises: exposure head means for holding said image element substantially parallel to said plate, said exposure head means having a planar bearing surface adjacent said plate and an arcuate bearing surface opposite said planar surface; means for supporting said exposure head means adjacent said plate and having an arcuate bearing surface complementary with said arcuate bearing surface of said exposure head means; clamping means resiliently restricting relative motion between said exposure head means and said support means; means for producing a gas film between said mating arcuate surfaces tending to counteract the clamp means to allow relative motion between said exposure head means and said support means; and means for producing a gas film separating said planar bearing surface from said plate when the same are in near-contact with each other.
Claim 2
Dependent Claim
161 words
In apparatus for step and repeat exposure of a planar photosensitive plate, a device for supporting an image element in near-contact with said plate and for relative movement therebetween which comprises: exposure head means for holding said image element substantially parallel to said plate, said exposure head means having a planar bearing surface adjacent said plate and an arcuate bearing surface opposite said planar surface; means for supporting said exposure head means adjacent said plate and having an arcuate bearing surface complementary with said arcuate bearing surface of said exposure head means; clamping means resiliently restricting relative motion between said exposure head means and said support means; means for producing a gas film between said mating arcuate surfaces tending to counteract the clamp means to allow relative motion between said exposure head means and said support means; and means for producing a gas film separating said planar bearing surface from said plate when the same are in near-contact with each other.
Claim 3
Dependent Claim
145 words
In apparatus for step and repeat exposure of a planar photosensitive plate, the combination comprising: first and second members forming an exposure head, said members having respective complementary concave and convex bearing surfaces so as to permit movement of one said member relative to the other, said first member also having a planar bearing surface for mating with said photosensitive plate; clamping means resiliently restricting relative motion between said first and second members along their adjacent arcuate bearing surfaces; first gas bearing means producing a gas film along said arcuate bearing surface and separating said members from actual contact; second gas bearing means for separating said first member at its planar bearing surface and said photosensitive plate by a gas film when said first member is adjacent said plate; and means for supporting an image element within said first member in near-contact with said plate.
Claim 4
Dependent Claim
145 words
In apparatus for step and repeat exposure of a planar photosensitive plate, the combination comprising: first and second members forming an exposure head, said members having respective complementary concave and convex bearing surfaces so as to permit movement of one said member relative to the other, said first member also having a planar bearing surface for mating with said photosensitive plate; clamping means resiliently restricting relative motion between said first and second members along their adjacent arcuate bearing surfaces; first gas bearing means producing a gas film along said arcuate bearing surface and separating said members from actual contact; second gas bearing means for separating said first member at its planar bearing surface and said photosensitive plate by a gas film when said first member is adjacent said plate; and means for supporting an image element within said first member in near-contact with said plate.
Claim 5
Dependent Claim
148 words
In apparatus for exposing a movable planar photosensitive plate with an image mask, the combination comprising: a first member for holding said image mask, said first member having a planar bearing surface for support adjacent said plate and having opposite thereto an arcuate bearing surface; a second member having an arcuate bearing surface complementary to that of said first member; resilient clamping means for restricting relative angular motion between said first and second members along their said arcuate bearing surfaces; first gas means for providing a gas film throughout said adjacent arcuate bearing surfaces of said members and counteracting said clamping means to permit relative omnidirectional movement of said members, and second gas means for providing a gas film between said planar bearing surface and said plate to prevent actual contact therebetween during relative movement of said plate and first member while maintaining a substantially constant separation gap.
Claim 6
Dependent Claim
148 words
In apparatus for exposing a movable planar photosensitive plate with an image mask, the combination comprising: a first member for holding said image mask, said first member having a planar bearing surface for support adjacent said plate and having opposite thereto an arcuate bearing surface; a second member having an arcuate bearing surface complementary to that of said first member; resilient clamping means for restricting relative angular motion between said first and second members along their said arcuate bearing surfaces; first gas means for providing a gas film throughout said adjacent arcuate bearing surfaces of said members and counteracting said clamping means to permit relative omnidirectional movement of said members, and second gas means for providing a gas film between said planar bearing surface and said plate to prevent actual contact therebetween during relative movement of said plate and first member while maintaining a substantially constant separation gap.
Claim 7
Dependent Claim
22 words
Apparatus as described in claim 1 wherein said clamping means prevents relative angular motion between said carrier means and said support means.
Claim 8
Dependent Claim
37 words
Apparatus as described in claim 1 further comprising means for variably controlling the weight of said carrier means and said supporting means when supported by said gas film separating the said planar bearing surface and said plate.
Claim 9
Dependent Claim
20 words
Apparatus as described in claim 5 wherein said variable control means includes an air cylinder attached to said support means.
Claim 10
Dependent Claim
30 words
Apparatus as described in claim 1 wherein said carrier means includes an image mask having opaque and transparent areas therein and a source of radiant energy for illuminating said mask.
Claim 11
Dependent Claim
30 words
Apparatus as described in claim 7 further comprising chase-forming means for holding said image mask in position which includes means for attracting said mask to said holding means by vacuum.
Claim 12
Dependent Claim
25 words
Apparatus as described in claim 7 further comprising chase-forming means for holding said image mask which can be variably positioned relative to said carrier means.
Claim 13
Dependent Claim
27 words
Apparatus as described in claim 1 wherein said first gas bearing means includes a plurality of gas outlets to produce said film between said mating arcuate surfaces.
Claim 14
Dependent Claim
30 words
Apparatus as described in claim 1 wherein said second gas means includes a plurality of independent gas outlets, whereby said separation is maintained when one of said outlets is ineffective.
References Cited (Backward Citations)
US3204544A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1976-08-06 | 1977-02-05 | 1977-08-07 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1980-08-06 | 1981-02-05 | 1981-08-07 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1984-08-06 | 1985-02-05 | 1985-08-07 | $7700.00 | Window Closed / Lapsed |