US3749528A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Vacuum pumps
Assignee: Pfeiffer Vacuum Technology AG
•
Filing: 1971-03-25
•
Granted: 1973-07-31
•
Expires: 1991-03-25
Abstract
Abstract The vertical rotating assembly of a vacuum pump (comprising a turbomolecular rotor and the rotating member of an electric driving motor located under the rotor) is centered by a magnetic bearing located above the pump rotor and is supported by a ball bearing assembly located under the rotor and the motor. The ball bearing assembly is so constructed or connected to the pump housing as to tolerate radial deflection of the rotor.
Inventors
- 👤 M Rousseau
- 👤 R Berthoumieux
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 16:15
CPC Classifications
F; F16; F16C; F16C32/00; F16C32/04; F16C32/0406; F16C32/044; F04; F04D; F04D19/00; F04D19/02; F04D19/04; F04D19/042; F04D19/048; F16C23/00; F16C23/06; F16C23/08; F16C23/082; F16C32/0402; F16C2360/00; F16C2360/44; F16C2360/45; F16C35/00; F16C35/04; F16C35/06; F16C35/07; F16C35/077
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
113 words
A vacuum pump for producing and maintaining a pressure difference between an outlet adapted to be connected to a primary vacuum source and an inlet, said vacuum pump comprising : a housing provided with said inlet and outlet ; a rotor carried by a vertical shaft and separating said inlet and outlet ; motor means under said rotor for rotating said shaft ; and means for supporting and centering said shaft, including a mechanical axial thrust-bearing located under said rotor and constructed and arranged to permit angular movement of said shaft about said thrust-bearing means and centering magnetic bearing means located above said rotor and centering the shaft with respect to said housing.
Claim 2
Dependent Claim
113 words
A vacuum pump for producing and maintaining a pressure difference between an outlet adapted to be connected to a primary vacuum source and an inlet, said vacuum pump comprising : a housing provided with said inlet and outlet ; a rotor carried by a vertical shaft and separating said inlet and outlet ; motor means under said rotor for rotating said shaft ; and means for supporting and centering said shaft, including a mechanical axial thrust-bearing located under said rotor and constructed and arranged to permit angular movement of said shaft about said thrust-bearing means and centering magnetic bearing means located above said rotor and centering the shaft with respect to said housing.
Claim 3
Dependent Claim
37 words
A pump in accordance with claim 1, wherein said thrust-bearing means comprises a bearing ring secured to the shaft, a ring non-rotatably connected to the pump housing by a swivel connection and bearing members between said rings.
Claim 4
Dependent Claim
60 words
A pump in accordance with claim 2, having first and second bearing rings secured to the shaft and separated by a spacer member, first and second stationary rings and a universal-joint assembly providing a swivel connection between said stationary rings and the casing, said bearing rings being formed with raceways located in register with raceways formed in said stationary rings.
Claim 5
Dependent Claim
28 words
A pump in accordance with claim 3, having resilient means compressed between the casing and the lower of said first and second stationary rings and biasing it upwardly.
Claim 6
Dependent Claim
66 words
A pump in accordance with claim 1, wherein said mechanical thrust-bearing comprises a bearing ring secured to the shaft and formed with raceways, a stationary bearing ring secured to the casing and formed with raceways, bearing elements disposed between the rings and rolling on said raceways, said element and raceways being so constructed as to permit angular displacement of said rings with respect to each other.
Claim 7
Dependent Claim
82 words
A pump in accordance with claim 1, wherein said magnetic bearing means comprises a rotary plate secured to the shaft, two stationary plates, each of the two end faces of said rotary plate having centering teeth which cooperate with similar teeth carried by said stationary plates, and a box secured to said housing, carrying said stationary plates and provided With magnets for producing a magnetic flux which is closed by air-gaps between oppositely-facing teeth of said rotary plate and said stationary plates.
Claim 8
Dependent Claim
46 words
A pump in accordance with claim 6, wherein the box is connected to the pump housing by small columns which are parallel to the axis of the shaft and having a flexibility sufficient for them to follow high-frequency oscillations of the box transversal to the axis.
Claim 9
Dependent Claim
25 words
A pump in accordance with claim 7, having friction members located between the box and the pump housing for damping the oscillations of the box.
Claim 10
Dependent Claim
50 words
A pump in accordance with claim 7, having a vertical rod, a weight at the lower end of said rod and means for securing the upper end of said rod, axially in said shaft at a location close to the magnetic bearing means for counteracting the oscillations of the shaft.
Claim 11
Dependent Claim
21 words
A pump in accordance with claim 2, having means for maintaining an oil film between the components of the universal-joint assembly.
Claim 12
Dependent Claim
48 words
A pump in accordance with claim 1, having a universal joint assembly comprising a stationary member secured to the casing, a swiveling member carrying said thrust bearing means and having a tail-piece, and resilient means between said tail-piece and housing adapted to damp angular oscillations of said shaft.
Claim 13
Dependent Claim
44 words
A vacuum pump in accordance with claim 1, having a turbomolecular pump rotor comprising a stack of disks, wherein said thrust-bearing is located beneath the rotor and in the primary vacuum whilst said magnetic bearing means is above thr rotor in a secondary vacuum.
Claim 14
Dependent Claim
92 words
A vertical turbomolecular pump comprising : a stationary housing provided with an inlet and an outlet ; a driving motor having a stationary part and a part rotatable about a vertical axis ; a turbomolecular pump rotor located coaxially with said motor, separating said inlet and outlet ; a transmission shaft drivably connecting said rotor and rotatable part, and means for supporting and centering said rotor, shaft and rotating part, with respect to said housing, including magnetic centering means located above said rotor and mechanical thrust bearing means located under said rotor.
Claim 15
Dependent Claim
92 words
A vertical turbomolecular pump comprising : a stationary housing provided with an inlet and an outlet ; a driving motor having a stationary part and a part rotatable about a vertical axis ; a turbomolecular pump rotor located coaxially with said motor, separating said inlet and outlet ; a transmission shaft drivably connecting said rotor and rotatable part, and means for supporting and centering said rotor, shaft and rotating part, with respect to said housing, including magnetic centering means located above said rotor and mechanical thrust bearing means located under said rotor.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1976-07-30 | 1977-01-29 | 1977-07-31 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1980-07-30 | 1981-01-29 | 1981-07-31 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1984-07-30 | 1985-01-29 | 1985-07-31 | $7700.00 | Window Closed / Lapsed |