US3747486A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Light-optical apparatus for drafting very small figures with very fine line widths and/or extremely short line lengths
Assignee: Siemens AG
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Filing: 1972-03-09
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Granted: 1973-07-24
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Expires: 1992-03-09
Abstract
Abstract Apparatus for the optical drafting of very small figures with line widths and lengths of for example, on the order of 1.0 Mu m or less, by means of an optical light beam projected from a stationary optical system upon a photoplate movable in the plane thereof, to trace lines thereon with said light beam, the latter having a rectangular transverse cross-section and rotatable about the beam axis whereby a pair of parallel edges of the beam are maintained substantially parallel to the direction of movement of the photoplate.
Inventors
- 👤 K Herrmann
- 👤 K Noss
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 21:06
CPC Classifications
G; G06; G06K; G06K15/00; G06K15/22; G06K15/225
Claims Analysis
Total Claims: 19
Claim 1
Independent Claim
211 words
A device for the optical drafting of very small figures with line width and/or line lengths, for example on the order of 1.0 Mu mm or less, by means of an optical light system, particularly for use in the production of masks for semi-conductor component elements and the like, comprising meanS including an aperture slot for producing a light beam having a stationary axis, a rectangular cross-sectional configuration and predetermined size, means for projecting said beam in the form of an image of the aperture slot upon a cooperable photoplate, a movable table for supporting such a photoplate with the axis of the impacting beam extending perpendicular to the plane of such a plate, means for moving the supporting table to move such a photoplate, in its plane, relative to the axis of the impacting beam to optically trace a correspondingly shaped line on such a plate, means for rotating the light beam and thus said image about its axis in correspondence to changes in direction of movement of the table, for maintaining a pair of parallel edges of the beam image substantially parallel to the direction of movement of said table and such a photoplate thereon, and means responsive to the movement of said table for controlling said beam-rotating means.
Claim 2
Independent Claim
211 words
A device for the optical drafting of very small figures with line width and/or line lengths, for example on the order of 1.0 Mu mm or less, by means of an optical light system, particularly for use in the production of masks for semi-conductor component elements and the like, comprising meanS including an aperture slot for producing a light beam having a stationary axis, a rectangular cross-sectional configuration and predetermined size, means for projecting said beam in the form of an image of the aperture slot upon a cooperable photoplate, a movable table for supporting such a photoplate with the axis of the impacting beam extending perpendicular to the plane of such a plate, means for moving the supporting table to move such a photoplate, in its plane, relative to the axis of the impacting beam to optically trace a correspondingly shaped line on such a plate, means for rotating the light beam and thus said image about its axis in correspondence to changes in direction of movement of the table, for maintaining a pair of parallel edges of the beam image substantially parallel to the direction of movement of said table and such a photoplate thereon, and means responsive to the movement of said table for controlling said beam-rotating means.
Claim 3
Dependent Claim
63 words
A device according to claim 1, comprising in further combination, a front lens disposed on the axis of said light beam between said aperture slot and said beam rotating means, operative to create a telecentric beam path at said beam rotating means, a first and a second lens arrangement disposed on the axis of said beam between said rotating means and said table.
Claim 4
Dependent Claim
14 words
A device according to claim 1, wherein the rotating means is a Dove prism.
Claim 5
Dependent Claim
26 words
A device according to claim 1, wherein the optical characteristics of the first and second lens arrangements taken together correspond to the characteristics of a microscope.
Claim 6
Dependent Claim
40 words
A device according to claim 1, corresponding in further combination, a glare prevention diaphragm, a heat filter, a color filter, a light condenser and two gray filters disposed on the beam axis between the light source and the aperture slot.
Claim 7
Dependent Claim
64 words
A device according to claim 5 wherein each of the two gray filters comprises a neutral or gray wedge positioned in planes normal to the beam direction, whereby the neutral wedges are positioned antiparallel with respect to each other and are shiftably in their respective planes relative to a fixed dimension of the aperature slot whereby light permeability through the filters can be varied.
Claim 8
Dependent Claim
26 words
A device according to claim 2, comprising in further combination, light deflection means interposed on the beam axis between the first and the second lens arrangements.
Claim 9
Dependent Claim
16 words
A device according to claim 7, wherein said deflection means deflects the beam through 90* .
Claim 10
Dependent Claim
43 words
A device according to claim 7, comprising in further combination, a photo cell which can be rotated into the beam path between the second lens arrangement and the reflecting means, for use in connection with control of the brightness of the light beam.
Claim 11
Dependent Claim
56 words
A device according to claim 9, comprising in further combination an observation ocular disposed on the axis of the impacting beam extending between the objective and the light reflection means at the opposite side of the latter, being in the form of a light divider, for use in effecting a sharp adjustment of the light beam.
Claim 12
Dependent Claim
25 words
A device according to claim 1, wherein said table is air supported on a base member, the table having means for supporting a photoplate thereon.
Claim 13
Dependent Claim
69 words
A device according to claim 6, wherein one of the two gray filters is controlled in relation to the speed of the light beam by an automatic control device whereby the same exposure results in per unit of surface of the photoplate during scanning by the light beam during a drawing operation and that during a state of rest, the passage of light through the aperture slot is prevented.
Claim 14
Dependent Claim
28 words
A device according to claim 12, wherein the control of the other one of the two gray filters is effected manually, for providing a preadjustment of the brightness.
Claim 15
Dependent Claim
40 words
A device according to claim 6, wherein the rotary means, the aperture slot, one of the two gray filters and the supporting table are operatively connected with an automatic control device operative to coNtrol the operation of the respective components.
Claim 16
Dependent Claim
54 words
A device according to claim 14, wherein said beam rotating means comprises a prism, the rotation of which, the change of the aperture length, the automatic shifting of the one of the two gray filters, and the shifting of the air supported table in its plane are effected by means of respective stepping motors.
Claim 17
Dependent Claim
38 words
A device according to claim 1, wherein a stage aperture construction is provided for changing the length of the aperture slot, which can be shifted relative to the slot and which is connected with an automatic control device.
Claim 18
Dependent Claim
17 words
A device according to claim 1, wherein the foca distance of the front lens is 250 mm.
Claim 19
Dependent Claim
38 words
A device according to claim 15, wherein a stage aperture construction is provided for changing the length of the aperture slot, which can be shifted relative to the slot and which is connected with an automatic control device.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1976-07-23 | 1977-01-22 | 1977-07-24 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1980-07-23 | 1981-01-22 | 1981-07-24 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1984-07-23 | 1985-01-22 | 1985-07-24 | $7700.00 | Window Closed / Lapsed |