Method of making semiconductor diodes

Abstract

Abstract A METHOD OF MAKING A NUMBER OF SEMICONDUCTOR DIODES ON A SINGLE WATER WITHOUT BREAKAGE DURING HANDLING AND PROCESSING, COMPRISING THE STEPS OF FORMING A PLURALITY OF MESAS ON ONE SURFACE OF AN INTRINSIC SUBSTRATE, DIFFUSING A SELECTED FIRST CONDUCTIVITY-TYPE REGION INTO EACH MESA, COATING THE FRONT SURFACE OF THE SUBBSTRATE AND MESAS WITH OXIDE, CHEMICALLY MILLING RECESSES INTO THE OPPOSITE SIDE OF THE SUBSTRATE IN ALIGNMENT WITH THE MESAS TO A PREDETERMINED DEPTH WHERE THE MESAS ARE EACH SUPPROTED BY A THIN ANNULAR AREA OF SUBSTRATE MATERIAL PERMITTING TRANSFER OF THE DEVICE INTO AN EPITAXIAL REACTOR, GAS ETCHING THE RECESSES TO A DEPTH BEYOND THE OXIDE INTERFACE TO PHYSICALLY SEPARATE THE MESAS FROM THE SUBSTRATE MATERIAL, GROWING A THIN EPITAXIAL LAYER OF OPPOSITE CONDUCTIVITY TYPE OVER THE BACK SURFACE OF THE DEVICE, APPLYING OHMIC CONTACTS TO THE DEVICE, AND SEPARATING THE INDIVIDUAL MESAS.

Inventors

• 👤 W Rosvold

Bibliographic Details