US3746571A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of vacuum evaporation
Assignee: Xerox Corp
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Filing: 1971-06-29
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Granted: 1973-07-17
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Expires: 1991-06-29
Abstract
Abstract A METHOD OF VAPOR DEPOSITING A UNIFORM LAYER OF MATERIAL ON THE SURFACE OF A PLANAR SUBSTRATE WHICH COMPRISES ROTATING SAID SUBSTRATE ABOUT ITS PERPENDICULAR AXIS WHILE MAINTAINING THE SUBSTRATE AT A PLANE INCLINE TO THE HORIZONTAL, WITH A SMALL SURFACE SOURCE OF EVAPORANT LOCATED BELOW SAID ROTATING SUBSTRATE, WITH THE RATIO OF THE RADIUS OF THE SUBSTRATE TO THE SOURCE-TO-SUBSTRATE DISTANCE BEING MAINTAINED FROM ABOUT 0 TO 1.0, SAID EVAPORANT SOURCE EMITTING A VAPOR FLUX OF SAID SUBSTRATE, WHILE MAINTAINING SAID SUBSTRATE AND EVAPORANT SOURCE UNDER VACUUM CONDITIONS DURING THE ENTIRE EVAPORATION CYCLE.
Inventors
- 👤 W Little
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 18:56
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/50; C23C14/505
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1976-07-16 | 1977-01-15 | 1977-07-17 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1980-07-16 | 1981-01-15 | 1981-07-17 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1984-07-16 | 1985-01-15 | 1985-07-17 | $7700.00 | Window Closed / Lapsed |