US3746569A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Silicon nitride coating on quartz walls for diffusion and oxidation reactors
Assignee: Siemens AG
•
Filing: 1970-11-10
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Granted: 1973-07-17
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Expires: 1990-11-10
Abstract
Abstract A QUARTZ TUBE FOR OXIDATION AND REDUCTION PROCESSES. THE QUARTZ TUBE HAS ON ITS INNER WALL A PASSIVATING LAYER WHICH IS AT LEAST PARTIALLY COMPOSED OF SILICON NITRIDE. THE PASSIVATING LAYER IS APPLIED THROUGH PYROLYSIS OF ITS RESPECTIVE COMPOUND.
Inventors
- 👤 E Pammer
- 👤 E Folkmann
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 16:34
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/04; C23C16/045; C23C16/22; C23C16/30; C23C16/34; C23C16/345; C23C16/36; C30; C30B; C30B31/00; C30B31/06; C30B31/10; Y; Y10; Y10S; Y10S148/00; Y10S148/007; Y10S65/00; Y10S65/08
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1976-07-16 | 1977-01-15 | 1977-07-17 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1980-07-16 | 1981-01-15 | 1981-07-17 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1984-07-16 | 1985-01-15 | 1985-07-17 | $7700.00 | Window Closed / Lapsed |