US3744902A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Device for producing a photo-varnish mask
Assignee: Siemens AG
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Filing: 1971-07-14
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Granted: 1973-07-10
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Expires: 1991-07-14
Abstract
Abstract A device for producing a photo-varnish mask with a plurality of equal, mutually displaced structures, where a photo-varnish layer, attached to a plate or disc-shaped carrier, is gradually locally illuminated by projection at individual discrete places, for the purpose of producing one structure, and following all illuminating processes is developed and processed into a photovarnish mask. A table provided with a defined attachment for the carrier of the photo-varnish layer is mechanically coupled with a second table and displaceable upon the latter in two coordinate directions. Mechanical gears are provided to adjust the position of the second table with respect to the stationary surrounding or reference plane. A gearless fine adjustment is provided between the first table and the second table which works continuously to adjust the position of the first table with respect to the second table. A mark, which is stationary at least with respect to both tables, is provided to aid in adjusting the exact position of the first table in the horizontal plane, by optical interferences, and particularly laser interferences.
Inventors
- 👤 H Henker
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 23:25
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70691; G03F7/70716; Y; Y10; Y10T; Y10T408/00; Y10T408/55; Y10T408/561; Y10T408/5617; Y10T83/00; Y10T83/647; Y10T83/654; Y10T83/6563
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
219 words
A device for producing a photo-varnish mask with a plurality of equal, mutually displaced structures, where a photo-varnish layer, attached to a plate or disc-shaped carrier, is gradually locally illuminated by projection at individual discrete places, for the purpose of producing one structure, and following all illuminating processes, is developed and processed into a photovarnish mask, which comprises a first table provided with a defined attachment for the carrier of the photo-varnish layer, a second table, said first table being mechanically coupled with the second table and displaceable upon the latter in two coordinate directions with respect to a stationary reference plane, mechanical gear means to adjust the position of the second table with respect to the stationary reference plane, fine adjustment means to adjust the position of the first table with respect to the second table, said fine adjustment means provided between the first and second tables being suitable for continuous operation, means for a controllable expansion or contraction of the fine adjustment means in response to the effect of a temperature change upon said adjustment means to determine the position of the two tables relative to each other, and a marker which is stationary at least to both tables being provided to aid the exact positioning of the first table in the horizontal plane, by optical interferences.
Claim 2
Independent Claim
219 words
A device for producing a photo-varnish mask with a plurality of equal, mutually displaced structures, where a photo-varnish layer, attached to a plate or disc-shaped carrier, is gradually locally illuminated by projection at individual discrete places, for the purpose of producing one structure, and following all illuminating processes, is developed and processed into a photovarnish mask, which comprises a first table provided with a defined attachment for the carrier of the photo-varnish layer, a second table, said first table being mechanically coupled with the second table and displaceable upon the latter in two coordinate directions with respect to a stationary reference plane, mechanical gear means to adjust the position of the second table with respect to the stationary reference plane, fine adjustment means to adjust the position of the first table with respect to the second table, said fine adjustment means provided between the first and second tables being suitable for continuous operation, means for a controllable expansion or contraction of the fine adjustment means in response to the effect of a temperature change upon said adjustment means to determine the position of the two tables relative to each other, and a marker which is stationary at least to both tables being provided to aid the exact positioning of the first table in the horizontal plane, by optical interferences.
Claim 3
Dependent Claim
90 words
The device of claim 7, wherein the position of the first table A on the second table B is controlled with the aid of a fixed adjustment body whose one end is tightly connected with the first table and the other end with the second table, and whose length is determined by an electric current which flows through the adjusting body, or by an electrical or magnetic field which penetrates the adjusting body, and means for changing the intensity of the indicated current or of the electric or magnetic field.
Claim 4
Dependent Claim
32 words
The device of claim 2, wherein the adjustment means is produced of electromagnetic-responsive material and its length may be regulated through the action of an apparatus portion which produces an electromagnetic field.
Claim 5
Dependent Claim
28 words
The device of claim 1 wherein the entire adjustment range in any direction of the second table with respect to the first table is less than 1 mm.
Claim 6
Dependent Claim
39 words
The device of claim 1, wherein the rough adjustment which determines the position of the second table and the fine adjustment which determines the position of the first table with respect to the second table may be automatically controlled.
Claim 7
Independent Claim
219 words
A device for producing a photo-varnish mask with a plurality of equal, mutually displaced structures, where a photo-varnish layer, attached to a plate or disc-shaped carrier, is gradually locally illuminated by projection at individual discrete places, for the purpose of producing one structure, and following all illuminating processes, is developed and processed into a photo-varnish mask, which comprises a first table provided with a defined attachment for the carrier of the photo-varnish layer, a second table, said first table being mechanically coupled with the second table and displaceable upon the latter in two coordinate directions with respect to a stationary reference plane, mechanical gear means to adjust the position of the second table with respect to the stationary reference plane, fine adjustment means to adjust the position of the first table with respect to the second table, said fine adjustment means provided between the first and sEcond tables being suitable for continuous operation, means for a controllable expansion or contraction of the fine adjustment means in response to the effect of an electromagnetic force upon said adjustment means to determine the position of the two tables relative to each other, and a marker which is stationary at least to both tables being provided to aid the exact positioning of the first table in the horizontal plane, by optical interferences.
Claim 8
Independent Claim
219 words
A device for producing a photo-varnish mask with a plurality of equal, mutually displaced structures, where a photo-varnish layer, attached to a plate or disc-shaped carrier, is gradually locally illuminated by projection at individual discrete places, for the purpose of producing one structure, and following all illuminating processes, is developed and processed into a photo-varnish mask, which comprises a first table provided with a defined attachment for the carrier of the photo-varnish layer, a second table, said first table being mechanically coupled with the second table and displaceable upon the latter in two coordinate directions with respect to a stationary reference plane, mechanical gear means to adjust the position of the second table with respect to the stationary reference plane, fine adjustment means to adjust the position of the first table with respect to the second table, said fine adjustment means provided between the first and sEcond tables being suitable for continuous operation, means for a controllable expansion or contraction of the fine adjustment means in response to the effect of an electromagnetic force upon said adjustment means to determine the position of the two tables relative to each other, and a marker which is stationary at least to both tables being provided to aid the exact positioning of the first table in the horizontal plane, by optical interferences.
Claim 9
Dependent Claim
28 words
The device of claim 6, wherein the entire adjustment range in any direction of the second table with respect to the first table is less than 1 mm.
Claim 10
Dependent Claim
39 words
The device of claim 6, wherein the rough adjustment which determines the position of the second table and the fine adjustment which determines the position of the first table with respect to the second table may be automatically controlled.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1976-07-09 | 1977-01-08 | 1977-07-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1980-07-09 | 1981-01-08 | 1981-07-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1984-07-09 | 1985-01-08 | 1985-07-10 | $7700.00 | Window Closed / Lapsed |