US3744650A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Boat mover for semiconductor fusion process
Assignee: SEMICONDUCTOR ELECT MEMORIES
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Filing: 1971-10-26
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Granted: 1973-07-10
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Expires: 1991-10-26
Abstract
Abstract An arrangement for moving a boat carrying semiconductor wafers through a diffusion furnace is provided wherein the boat is supported free of the walls of the furnace while being moved therethrough, whereby damage to the wafers caused by sudden stops and starts of the boat is avoided.
Inventors
- 👤 T Henebry
- 👤 S Platter
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 23:03
CPC Classifications
C; C30; C30B; C30B31/00; C30B31/06; C30B31/14; C30B31/10; C30B31/103; F; F27; F27D; F27D7/00
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
61 words
In a system for heat treating semiconductor material which is supported in a boat which is moved through a diffusion furnace, the improvement comprising: means for supporting and moving said boat through said furnace free of all structures including the walls of said furnace, said means extending from within said furnace to the outside during the entire motion of said boat.
Claim 2
Dependent Claim
61 words
In a system for heat treating semiconductor material which is supported in a boat which is moved through a diffusion furnace, the improvement comprising: means for supporting and moving said boat through said furnace free of all structures including the walls of said furnace, said means extending from within said furnace to the outside during the entire motion of said boat.
Claim 3
Dependent Claim
62 words
In a system for heat treating semiconductor material which is supported in a boat which is moved through a diffusion furnace, the improvement comprising: a rod or tube supporting and moving said boat within said furnace free of all structures including the furnace walls throughout the entire motion of said boat, and means for movably supporting said rod outside of said furnace.
Claim 4
Dependent Claim
62 words
In a system for heat treating semiconductor material which is supported in a boat which is moved through a diffusion furnace, the improvement comprising: a rod or tube supporting and moving said boat within said furnace free of all structures including the furnace walls throughout the entire motion of said boat, and means for movably supporting said rod outside of said furnace.
Claim 5
Dependent Claim
68 words
Apparatus as recited in claim 2 wherein said means for rollably supporting said rod outside of said furnace includes at least three roller guides, two of said roller guides being positioned underneath said rod and the third of said roller guides being positioned on top of said rod between the locations of said other two guides, and means for yieldably biasing said third roller guide against said rod.
Claim 6
Dependent Claim
20 words
Apparatus as recited in claim 3 including means for rotating one of said roller guides which is beneath said rod.
Claim 7
Dependent Claim
16 words
Apparatus as recited in claim 2 wherein said boat and said rod are made of quartz.
References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1976-07-09 | 1977-01-08 | 1977-07-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1980-07-09 | 1981-01-08 | 1981-07-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1984-07-09 | 1985-01-08 | 1985-07-10 | $7700.00 | Window Closed / Lapsed |