US3743587A
Expired / Lapsed
US
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Method for reactive sputter deposition of phosphosilicate glass
Assignee: International Business Machines Corp
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Filing: 1972-03-01
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Granted: 1973-07-03
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Expires: 1992-03-01
Abstract
Abstract A METHOD FOR REACTIVE SPUTTER DEPOSITING PHOSPHOSILICATE GLASS ON A SUBSTRATE UTILIZING A SPUTTERING CHAMBER HAVING A FUSED QUARTZ TARGET DISPOSED ON A TARGET ELECTRODE, AND A SUBSTRATE HOLDER SPACED FROM THE TARGET HOLDER ELECTRODE. SUBSTRATES TO BE COVERED ARE INTRODUCED INTO THE SPUTTERING CHAMBER AND LOCATED ON THE SUBSTRATE HOLDER ELECTRODE, A R.F. POTENTIAL IS APPLIED ACROSS THE TARGET ELECTRODE AND THE SUBSTRATE HOLDER ELECTRODE TO ESTABLISH A GLOW DISCHARGE IN THE REGION BETWEEN THE ELECTRODES, AND VAPORIZED P2O5 IS INTRODUCED INTO THE REGION OF THE GLOW DISCHARGE. THE VAPORIZED P2O5 AND TARGET MATERIAL RESULT IN THE DEPOSTION OF A PHOSPHOSILICATE GLASS LAYER.
Inventors
- 👤 T Kennedy
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 23:19
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/60; H10P14/63; H10P14/6326; H10P14/6328; H10P14/6334; H10P14/6336; C; C23; C23C; C23C14/00; C23C14/0021; C23C14/0036; C23C14/0057; C23C14/06; C23C14/10; H10P14/69; H10P14/692; H10P14/6921; H10P14/6922; H10P14/6923
Claims Analysis
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References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1976-07-02 | 1977-01-01 | 1977-07-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1980-07-02 | 1981-01-01 | 1981-07-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1984-07-02 | 1985-01-01 | 1985-07-03 | $7700.00 | Window Closed / Lapsed |