US3743552A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Process for coplanar semiconductor structure
Assignee: Boeing North American Inc
•
Filing: 1970-01-30
•
Granted: 1973-07-03
•
Expires: 1990-01-30
Abstract
Abstract A COMPOSITE COMPRISING A MONOCRYSTALLINE, ELECTRICALLY INSULATING SUBSTRATE DISPOSED ATOP WHICH ARE SEMICONDUCTOR SEGMENTS SEPARATED BY ISOLATION SIDEWALLS. THE SEMICONDUCTOR SEGMENTS AND THE ISOLATION SIDEWALLS ARE SUBSTANTIALLY CONTIGUOUS AND COPLANAR. THE COMPOSITE MAY BE PRODUCED BY PROVIDING A FILM OF PHOSPHOSILICATE GLASS ON A SAPPHIRE SUBSTRATE. THE GLASS IS ETCHED AWAY IN LOCATIONS WHERE SIDEWALLS ARE DESIRED. THE SUBSTRATE IS HEATED TO AN ELEVATED TEMPERATURE AT WHICH THE PHOSPHORUS IN THE GLASS REACTS TO CORRODE AWAY THE SUBSTRATE. AFTER REMOVAL OF THE RESIDUAL GLASS, DEVICE GRADE SEMICONDUCTOR IS DEPOSITED ATOP THE SUBSTRATE BETWEEN THE ISOLATION SIDEWALLS.
Inventors
- 👤 C Fa
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 06:38
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/60; H10P14/69; H10P14/692; H10P14/6921; H10P14/6922; H10P14/6923; H10D; H10D86/00; H10D86/01; H10D86/03; H10P14/63; H10P14/6326; H10P14/6328; H10P14/6334; Y; Y10; Y10S; Y10S148/00; Y10S148/026; Y10S148/051; Y10S148/085; Y10S148/15; Y10S438/00; Y10S438/967
Claims Analysis
Total Claims: 0
No claims parsed yet. Click Sync Now above to re-index claims from Google Patents.
References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1976-07-02 | 1977-01-01 | 1977-07-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1980-07-02 | 1981-01-01 | 1981-07-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1984-07-02 | 1985-01-01 | 1985-07-03 | $7700.00 | Window Closed / Lapsed |