Sputtering system and target electrode construction for use therewith
Abstract
Abstract SPUTTERING SYSTM HVING A HOUSING FORMING AN ENCLOSED CHAMBER WITH MEANS FOR SUPPLYING A VACUUM TO THE CHAMBER IN THE HOUSING. SUPPORTING MEANS IS PROVIDED WITHIN THE CHAMBER FOR SUPPORTING MEANS IS PROVIDED THE HOUSING IS PROVIDED WITH A SUPPORT PLATE HAVING AN OPENING THEREIN WHICH IS GENERALLY OPPOSITE THE SUPPORT MEANS. A TARGET ELECTRODE IS DISPOSED IN OPENING AND FACES THE SUPPORT MEANS. AN INSULATING MEMBER IS SECURED TO THE TARGET ELECTRODE AND TO THE SUPPORT PLATE TO SUPPORT TH TARGET ELECTRODE SO THAT IT IS SPACED FROM THE SIDE WALL OF THE SUPPORT PLATE FORMING THE OPENING AND HAS ITS INNERMOST SURFACE GENERALLY FLUSH WITH THE INNERMOST SURFACE OF THE SUPPORT PLATE AND SO THAT THE SPACE BETWEEN THE EDGE OF THE TARGET ELCTRODE AND TH WALL OF THE SUPPORT PLATE DEFINING TH OPENING IS LESS THAN ONE DEBYE LENGTH. MEANS IS PROVIDED FOR SUPPLYING A VOLTAGE TO THE TARGET ELECTRODE. D R A W I N G
Inventors
- 👤 K Urbanek
- 👤 E Kerswill
Bibliographic Details
Claims Analysis
Total Claims: 0References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1976-06-25 | 1976-12-25 | 1977-06-26 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1980-06-25 | 1980-12-25 | 1981-06-26 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1984-06-25 | 1984-12-25 | 1985-06-26 | $7700.00 | Window Closed / Lapsed |