Probing device for microcircuits

Claim 2

A multidirectional movement probe support comprising: a. a C-frame of resilient material providing spring action between its legs; b. probe support table means positioned between said legs of said C-frame and extending therefrom; c. laterally and longitudinal movable means adjacent said table means positioned between said legs of said C-frame; d. friction drive means bearing on said table means and one leg of said C-frame whereby said table means and said movable means are retained together by spring biased action of said legs of said C-frame; e. means extending through said one leg of said C-frame for moving said friction drive means bearing on said table means and thereby moving said table means; and f. means for moving one end of said C-frame vertically and thereby moving said table means in a vertical path.

Claim 3

A multidirectional movement probe support according to claim 1 wherein said laterally and longitudinal movable means includes a series of ball bearings and bearing retainers means for free lateral and longitudinal movement of said probe support table.

Claim 4

A multidirectional movement probe support according to claim 2 wherein said series of ball bearings are formed in two sets, and one set is arranged in lateral bearing race grooves and the other set is arranged in longitudinal grooves in said bearing retainer means.

Claim 5

A multidirectional movement probe support according to claim 1 wherein said friction drive means bearing on said table means is an enlarged ball bearing frictionally engaging said probe support table.

Claim 6

A multidirectional movement probe support according to claim 4 wherein said enlarged ball bearing is mounted in a mating recess in said one leg of said C-frame.

Claim 7

A multidirectional movement probe support according to claim 4 wherein said means extending through said one leg of said C-frame is a joy stick secured to said enlarged ball bearing providing complete circular movement in a plane of any point on said table means.

Claim 8

A multidirectional movement probe support according to claim 6 wherein said joy stick movement is transmitted to said table means at a fixed ratio of movement reduction.

Claim 9

A multidirectional movement probe support according to claim 7 wherein said fixed ratio of movement reduction is in a range of 5:1 to 20:1.

Claim 10

A multidirectional movement probe support according to claim 1 wherein said means for moving said C-frame in a vertical path includes base means pivotally secured to said C-frame, and means to provide vertical pivotal movement of said C-frame in said base means.

Claim 11

A multidirectional movement probe support according to claim 9 wherein said means to provide pivotal movement includes extendable screw means extended through said C-frame legs said table means and said laterally and longitudinally movable means and spaced from the pivotal connection between said C-frame and base means for providing angular displacement of said C-frame in relation to said base means.

Claim 12

A multidirectional movement probe support according to claim 9 wherein said base is hingedly mounted from one end to said C-frame, and spring means therebetween biases said members toward open position.

Claim 13

A multidirectional movement probe support comprising: a. C-frame means; b. a stack of at least two movable planar elements, one of which includes means for supportiNg a probe mounted in said C-frame means; c. a set of ball bearings mounted between and spacing said at least two movable planar elements apart; d. guide means for said ball bearings associated with said at least two movable planar elements permitting relative movement of said elements in a single direction on said ball bearings; e. ball bearing means on either side of said two movable planar elements bearing against said C-frame means and thereby securing said elements and C-frame means in an assembly; and f. guide means associated with said C-frame means and said either side of said movable planar elements permitting movement of said two planar elements in a direction 90* to the movement between said two planar elements.

Claim 14

A multidirectional movement probe support comprising: a. C-frame means; b. a stack of at least two movable planar elements, one of which includes means for supportiNg a probe mounted in said C-frame means; c. a set of ball bearings mounted between and spacing said at least two movable planar elements apart; d. guide means for said ball bearings associated with said at least two movable planar elements permitting relative movement of said elements in a single direction on said ball bearings; e. ball bearing means on either side of said two movable planar elements bearing against said C-frame means and thereby securing said elements and C-frame means in an assembly; and f. guide means associated with said C-frame means and said either side of said movable planar elements permitting movement of said two planar elements in a direction 90* to the movement between said two planar elements.

Claim 15

A multidirectional movement probe support having at least a pair of planar elements movable relative to each other in one direction and both movable conjointly in a direction which is 90* to said one direction, and frame means securing said elements in an assembly, the improvement of ball means mounted between said pair of planar elements and said frame means frictionally engaging one said planar element and movable thereon, a depression in said frame means and said ball means rotatably mounted in said depression and retained in one position on said frame, whereby rotative movement of said ball means moves said planar elements.

Claim 16

A multidirectional movement probe support having at least a pair of planar elements movable relative to each other in one direction and both movable conjointly in a direction which is 90* to said one direction, and frame means securing said elements in an assembly, the improvement of ball means mounted between said pair of planar elements and said frame means frictionally engaging one said planar element and movable thereon, a depression in said frame means and said ball means rotatably mounted in said depression and retained in one position on said frame, whereby rotative movement of said ball means moves said planar elements.

Claim 17

A multidirectional movement probe support according to claim 13 wherein a joy stick is attached to said ball means providing means for rotation of said ball means and thereby movement of said pair of planar elements in 360* in a plane.