US3739170A
Expired / Lapsed
US
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Auger electron spectroscopy
Assignee: Physical Electronics Inc
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Filing: 1971-12-20
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Granted: 1973-06-12
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Expires: 1991-12-20
Abstract
Abstract An apparatus is disclosed having special utility for performing analyses utilizing the Auger effect. A coaxial cylindrical electron analyzer is combined with a coaxial electron gun between the apertures in the inner tube of the analyzer. A structure for a cylindrical analyzer having an electrical field free of fringing between cylinders is also disclosed, as is a simplified off-axis exit aperture.
Inventors
- 👤 G Bohn
- 👤 R Weber
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 07:48
CPC Classifications
H; H01; H01J; H01J49/00; H01J49/44; H01J49/46; H01J49/48; H01J49/482
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
221 words
Apparatus for performing analyses comprising: a. means defining an evacuated region; b. an electron analyzer within said region including inner and outer electrically conductive concentric cylinders, the inner of said cylinders having openings in the wall thereof at sapced intervals from each end thereof, said openings being arranged in generally annular configuration and the annular opening at one end thereof being an entry and the annular opening at the other end thereof being an exit for electrons being analyzed; c. an electron gun mounted within said inner cylinder and positioned intermediate said annular openings in said inner cylinder, said electron gun oriented and arranged to direct a beam of electrons toward a first end of said inner cylinder; d. support means for positioning a sample to be analyzed near said first end of said inner cylinder and in line with the beam of electrons emitted by said electron gun whereby Auger electrons are emitted from said sample and pass through the entry annular opening in said inner cylinder; e. means for impressing unidirectional voltage across said cylinders whereby the Auger electrons which have passed through said entry opening are deflected and those of predetermined energy pass through said exit opening; and, f. detecting means near the opposite end of said inner cylinder for detecting the electrons which pass through the analyzer.
Claim 2
Dependent Claim
221 words
Apparatus for performing analyses comprising: a. means defining an evacuated region; b. an electron analyzer within said region including inner and outer electrically conductive concentric cylinders, the inner of said cylinders having openings in the wall thereof at sapced intervals from each end thereof, said openings being arranged in generally annular configuration and the annular opening at one end thereof being an entry and the annular opening at the other end thereof being an exit for electrons being analyzed; c. an electron gun mounted within said inner cylinder and positioned intermediate said annular openings in said inner cylinder, said electron gun oriented and arranged to direct a beam of electrons toward a first end of said inner cylinder; d. support means for positioning a sample to be analyzed near said first end of said inner cylinder and in line with the beam of electrons emitted by said electron gun whereby Auger electrons are emitted from said sample and pass through the entry annular opening in said inner cylinder; e. means for impressing unidirectional voltage across said cylinders whereby the Auger electrons which have passed through said entry opening are deflected and those of predetermined energy pass through said exit opening; and, f. detecting means near the opposite end of said inner cylinder for detecting the electrons which pass through the analyzer.
Claim 3
Dependent Claim
29 words
Apparatus in accordance with claim 1 wherein said inner and outer cylinders are spaced from one another by an annularly shaped ceramic insulator positioned adjacent each outer end thereof.
Claim 4
Dependent Claim
44 words
Apparatus in accordance with claim 2 wherein each of said ceramic insulators has a conductive coating over the interior surface thereof and in electrical contact with said inner and outer cylinders providing a resistance of from about 10 up to about 100 megohms therebetween.
Claim 5
Dependent Claim
27 words
Apparatus in accordance with claim 3 wherein said conductive coating is a cermet of nickel and a ceramic selected from the group consisting of quartz and alumina.
Claim 6
Dependent Claim
19 words
Apparatus in accordance with claim 1 wherein the annular openings in said inner cylinder have a metallic mesh thereacross.
Claim 7
Dependent Claim
56 words
Apparatus in accordance with claim 1 wherein an off-axis exit aperture is provided within said inner cylinder intermediate said exit annular opening and said detecting means, said aperture being defined by a plurality of arcuate openings of a generally annular configuration in a thin disc-shaped member positioned perpendicular to the longitudinal axis of said inner cylinder.
Claim 8
Dependent Claim
35 words
Apparatus in accordance with claim 6 wherein said exit aperture is formed in a disc-shaped member of about 0.003 inches thickness formed of a metal selected from the group consisting of copper, gold and molybdenum.
Claim 9
Dependent Claim
48 words
Apparatus in accordance with claim 2 wherein each of said ceramic insulators has a coating over the interior surface thereof which is electrically conductive relative to said insulator and highly resistive relative to said cylinders, said coating being in electrical contact with said inner and said outer cylinders.
Claim 10
Dependent Claim
116 words
Apparatus for performing analyses comprising: a. an electron analyzer including inner and outer electrically conductive cylinders; b. the inner of said cylinders having openings in the walls thereof at spaced intervals from each end thereof, said openings being arranged in generally annular configuration; c. an electron gun mounted within said inner cylinder and positioned intermediate said annular openings in said inner cylinder, said electron gun oriented and arranged to direct a beam of electrons outwardly toward an open end of said inner cylinder and onto a sample to be analyzed; d. means for impressing unidirectional electrical voltage across said cylinders; and e. means for detecting the electrons emitted by a sample which pass through the analyzer.
Claim 11
Dependent Claim
116 words
Apparatus for performing analyses comprising: a. an electron analyzer including inner and outer electrically conductive cylinders; b. the inner of said cylinders having openings in the walls thereof at spaced intervals from each end thereof, said openings being arranged in generally annular configuration; c. an electron gun mounted within said inner cylinder and positioned intermediate said annular openings in said inner cylinder, said electron gun oriented and arranged to direct a beam of electrons outwardly toward an open end of said inner cylinder and onto a sample to be analyzed; d. means for impressing unidirectional electrical voltage across said cylinders; and e. means for detecting the electrons emitted by a sample which pass through the analyzer.
Claim 12
Dependent Claim
29 words
Apparatus in accordance with claim 9 wherein said inner and outer cylinders are spaced from one another by an annularly shaped ceramic insulator pOsitioned adjacent each outer end thereof.
Claim 13
Dependent Claim
43 words
Apparatus in accordance with claim 10 wherein each of said insulators has a conductive coating over the interior surface thereof and in electrical contact with said inner and outer cylinders providing a resistance of from about 10 up to about 100 megohms therebetween.
Claim 14
Dependent Claim
46 words
Apparatus in accordance with claim 10 wherein each of said insulators has a coating over the interior surface thereof which is electrically conductive relative to said insulator and highly resistive relative to said cylinders, said coating being in electrical contact with said inner and outer cylinders.
Claim 15
Dependent Claim
19 words
Apparatus in accordance with claim 9 wherein said annular openings in said inner cylinder have a metallic mesh thereacross.
Claim 16
Dependent Claim
64 words
Apparatus in accordance with claim 9 wherein an off-axis exit aperture is provided within said inner cylinder intermediate the exit annular opening in said inner cylinder for electrons being analyzed and said detecting means, said aperture being defined by a plurality of arcuate openings in a generally annular configuration in a thin disc-shaped member positioned perpendicular to the longitudinal axis of said inner cylinder.
Claim 17
Dependent Claim
162 words
In an electron analyzer including a source of high energy electrons for irradiating a specimen, inner and outer electrically conductive concentric cylinders, the inner of said cylinders having openings in the walls thereof in generally annular configuration near each end thereof to permit electrons to pass therethrough and be analyzed by the presence of an electric field between said inner and outer cylinders and wherein a detector of said analyzed electrons is provided at the exit end of said inner cylinder, the improvement comprising an exit aperture disc positioned intermediate said detector and the exit opening in the wall of said inner cylinder, said disc being of a thin metallic plate having a plurality of arcuate openings therethrough in a generally annular configuration and spaced from the center axis thereof so as to pass substantially only electrons of a predetermined energy that have been analyzed by said cylinders, said disc mounted within and perpendicular to the longitudinal axis of said inner cylinder.
Claim 18
Dependent Claim
162 words
In an electron analyzer including a source of high energy electrons for irradiating a specimen, inner and outer electrically conductive concentric cylinders, the inner of said cylinders having openings in the walls thereof in generally annular configuration near each end thereof to permit electrons to pass therethrough and be analyzed by the presence of an electric field between said inner and outer cylinders and wherein a detector of said analyzed electrons is provided at the exit end of said inner cylinder, the improvement comprising an exit aperture disc positioned intermediate said detector and the exit opening in the wall of said inner cylinder, said disc being of a thin metallic plate having a plurality of arcuate openings therethrough in a generally annular configuration and spaced from the center axis thereof so as to pass substantially only electrons of a predetermined energy that have been analyzed by said cylinders, said disc mounted within and perpendicular to the longitudinal axis of said inner cylinder.
Claim 19
Dependent Claim
143 words
In a cylindrical electron analyzer including a source of high energy of electrons for irradiating a specimen, inner and outer concentric electrically conductive cylinders, the inner of said cylinders having openings in the walls thereof near each end thereof to permit electrons to pass therethrough and be analyzed by the presence of an electric field between said inner and outer cylinders and a detecting means for electrons so analyzed, the improvement comprising spacing said inner and outer cylinders by means of a ceramic insulator at each end thereof, said insulators having a conductive coating on the face thereof interior to said cylinders, and in electrical contact therewith, said conductive coating being formed of a cermet material and providing a resistance of from about 10 up to about 100 megohms between said cylinders whereby a more uniform potential field is formed between said cylinders.
Claim 20
Dependent Claim
143 words
In a cylindrical electron analyzer including a source of high energy of electrons for irradiating a specimen, inner and outer concentric electrically conductive cylinders, the inner of said cylinders having openings in the walls thereof near each end thereof to permit electrons to pass therethrough and be analyzed by the presence of an electric field between said inner and outer cylinders and a detecting means for electrons so analyzed, the improvement comprising spacing said inner and outer cylinders by means of a ceramic insulator at each end thereof, said insulators having a conductive coating on the face thereof interior to said cylinders, and in electrical contact therewith, said conductive coating being formed of a cermet material and providing a resistance of from about 10 up to about 100 megohms between said cylinders whereby a more uniform potential field is formed between said cylinders.
Claim 21
Dependent Claim
124 words
In a cylindrical electron analyzer including a source of high energy electrons for irradiating a specimen, inner and outer concentric electrically conductive cylinders, the inner of said cylinders having openings in the walls thereof near each end thereof to permit electrons to pass therethrough and be analyzed by the presence of an electric field between said inner and outer cylinders and a detecting means for electrons so analyzed, the improvement comprising spacing said inner and outer cylinders by means of a ceramic insulator at each end thereof, said insulators having a coating on the face thereof interior to said cylinders which is electrically conductive relative to said insulator and highly resistive relative to said cylinders, said coating being in electrical contact with said cylinders.
Claim 22
Dependent Claim
124 words
In a cylindrical electron analyzer including a source of high energy electrons for irradiating a specimen, inner and outer concentric electrically conductive cylinders, the inner of said cylinders having openings in the walls thereof near each end thereof to permit electrons to pass therethrough and be analyzed by the presence of an electric field between said inner and outer cylinders and a detecting means for electrons so analyzed, the improvement comprising spacing said inner and outer cylinders by means of a ceramic insulator at each end thereof, said insulators having a coating on the face thereof interior to said cylinders which is electrically conductive relative to said insulator and highly resistive relative to said cylinders, said coating being in electrical contact with said cylinders.
References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1976-06-11 | 1976-12-11 | 1977-06-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1980-06-11 | 1980-12-11 | 1981-06-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1984-06-11 | 1984-12-11 | 1985-06-12 | $7700.00 | Window Closed / Lapsed |