US3738919A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Technique for adjusting temperature coefficient of resistance of tantalum aluminum alloy films
Assignee: AT&T Inc
•
Filing: 1972-04-13
•
Granted: 1973-06-12
•
Expires: 1992-04-13
Abstract
Abstract FFIG-01 A TECHNIQUE FOR ADJUSTTING THE TEMPERATURE COEFFICIENT OF RESISTANCE OF SPUTTED TANTALUM ALUMINUM ALLOY FILMS TO A VALUE WITHIN THE RANGE OF -100 TO 300 P.P.N./*C. INVOLVES HEAT TREATING THE SPUTTERED FILM AT TEMPERATURES RANGING FROM 650-950*C. IN AN AMBIENT IN WHICH THE MAXIMUM PARTIAL PRESSURE OF OXYGEN IS 1C10-**5 TORR. THE DESCRIBED TECHNIQUE PERMIS THE REALIZATION OF TEMPERATURE COEFFICIENTS OF RESISTANCE OF APPROMIMATELY ZERO, THEREBY MAXIMIZING THE DEVICE APPLICATIONS OF SUCH FILMS.
Inventors
- 👤 J Chilton
- 👤 D Jaffe
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 17:23
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/06; C23C14/14; C23C14/18; C23C14/185; C23C14/58; C23C14/5806; H; H01; H01C; H01C17/00; H01C17/22; H01C17/26; H01C17/265
Claims Analysis
Total Claims: 0
No claims parsed yet. Click Sync Now above to re-index claims from Google Patents.
References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1976-06-11 | 1976-12-11 | 1977-06-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1980-06-11 | 1980-12-11 | 1981-06-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1984-06-11 | 1984-12-11 | 1985-06-12 | $7700.00 | Window Closed / Lapsed |