US3738882A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for polishing semiconductor gallium arsenide planar surfaces
Assignee: International Business Machines Corp
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Filing: 1971-10-14
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Granted: 1973-06-12
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Expires: 1991-10-14
Abstract
Abstract AN IMPROVED METHOD FOR POLISHING GALLIUM ARSENIDE PLANAR SURFACES IS DISCLOSED COMPRISING POSITIONING GALLIUM ARSENIDE WAFERS OR SLICES IN CLOSE ADJACENCY TO A POLISHING MEDIUM PROVIDING A RELATIVE MOTION BETWEEN SAID WAFER AND POLISHING MEDIUM WHILE PROVIDING A CONTROLLED PREDETERMINED FLOW OF ALKALI METAL HYPOCHLORITE AND ALKALI CARBONATE SOLUTION TO SAID WAFERS AND POLISHING MEDIUM AND CONTINUING THE RELATIVE MOTION UNTIL THE WAFER SURFACE IS POLISHED TO A SMOOTH AND FEATURELESS CONDITION WHEREUPON THE WAFERS ARE WASHED AND REMOVED FROM THE POLISHING MECHANISM.
Inventors
- 👤 J Basi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 04:22
CPC Classifications
H; H10; H10P; H10P52/00; H10P52/40; H10P52/402
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1976-06-11 | 1976-12-11 | 1977-06-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1980-06-11 | 1980-12-11 | 1981-06-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1984-06-11 | 1984-12-11 | 1985-06-12 | $7700.00 | Window Closed / Lapsed |