US3737702A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Camera tube target with projecting p-type regions separated by grooves covered with silicon oxide layer approximately one-seventh groove depth
Assignee: US Philips Corp
•
Filing: 1970-04-24
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Granted: 1973-06-05
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Expires: 1990-04-24
Abstract
Abstract The invention relates to a tube for picking up images and in particular to a radiation-sensitive target plate present therein of a semiconductor material and to the manufacture of such a target plate. The semiconductor plate comprises a substrate on which a mosaic of regions is present, which are separated from each other by grooves, and which each form a rectifying junction with the substrate. An insulating material in the form of a thin insulating layer is present in the grooves and covers the surface of the substrate in the grooves and the edges of the rectifying junction. Such a layer is preferably obtained by oxidation, for example, by means of a silicon nitride layer as a masking layer.
Inventors
- 👤 E Kooi
- 👤 A Hoeberechts
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 03:25
CPC Classifications
H; H10; H10W; H10W74/00; H10W74/40; H01; H01J; H01J29/00; H01J29/02; H01J29/10; H01J29/36; H01J29/39; H01J29/45; H01J29/451; H01J9/00; H01J9/20; H01J9/233; H10D; H10D99/00; H10P; H10P95/00; Y; Y10; Y10S; Y10S148/00; Y10S148/043; Y10S148/051; Y10S148/113; Y10S148/114; Y10S148/145; Y10S148/151
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
26 words
A camera tube as claimed in claim 1, in which a metal layer is provided on each region and projects over the grooves adjoining the region.
Claim 2
Dependent Claim
61 words
A camera tube as claimed in claim 1 in which a first surface zone of the substrate has the same conductivity type as the substrate and adjoins the walls of the grooves, said surface zone being more strongly doped than the part of the substrate adjoining said surface zone, said first surface zone extending at most up to the rectifying junctions.
Claim 3
Dependent Claim
50 words
A camera tube as claimed in claim 3 in which a second surface zone of the substrate having the same conductivity type as the substrate and which adjoins the side remote from the electron beam is more strongly doped than the part of the substrate adjoining the second surface zone.
Claim 4
Dependent Claim
60 words
A camera tube as claimed in claim 4 in which the concentration variation of the impurity determining the conductivity type in and the thickness of the first surface zone, at least in parts which do not adjoin the rectifying junctions, are substantially equal to the concentration variation of said impurity in and the thickness of, respectively, the second surface zone.
Claim 5
Dependent Claim
25 words
A camera tube as claimed in claim 4 in which the regions consists of two sub-regions which together with the substrate form a transistor structure.
Claim 6
Dependent Claim
55 words
A camera tube as claimed in claim 4 in which the concentration variation of the impurity determining the conductivity type in and the thickness of the second surface zone are substantially equal to the concentration variation of said impurity in and the thickness of, respectively, a sub-region of the same conductivity type as the substrate.
Claim 7
Dependent Claim
23 words
A camera tube as claimed in claim 7 in which the substrate is provided with a second insulating layer on the other side.
Claim 8
Dependent Claim
34 words
A camera tube as claimed in claim 8, characterized in that the first layer and the second layer contain an oxide of the semiconductor material of the substrate and have substantially the same thicknesses.
References Cited (Backward Citations)
US3456312A
Cited
US3593067A
Cited
US3474285A
Cited
US3569758A
Cited
US3576392A
Cited
US3581151A
Cited
US3548233A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1976-06-04 | 1976-12-04 | 1977-06-05 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1980-06-04 | 1980-12-04 | 1981-06-05 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1984-06-04 | 1984-12-04 | 1985-06-05 | $7700.00 | Window Closed / Lapsed |