US3737659A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Field of view adjusting device
Assignee: NIHOA DENSHI
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Filing: 1971-11-17
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Granted: 1973-06-05
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Expires: 1991-11-17
Abstract
Abstract Field of view adjusting device for use in electron microscopes or the like having a mechanical sample adjusting means and electron deflecting means disposed in or at the rear of an objective lens, coarse adjustment being carried out by the mechanical moving means and fine adjustment by the electron deflecting means.
Inventors
- 👤 T Yanaka
- 👤 K Shirota
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 13:25
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/02; H01J37/20; H01J37/04; H01J37/147
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
187 words
In an electron microscope or the like comprising: an electron gun for creating an electron beam; an electron optical system, having an optical axis, for focusing and projecting said beam comprising at least an objective lens; an imaging device; and, a means for positioning a specimen about the optical axis whereby the electron beam emanating from the specimen comprises an image beam which in the plane of the imaging device is larger than the device; the improvement comprising a field of view adjusting device comprising: mechanical means for driving the positioning means in a plane perpendicular to the optical axis for coarse adjustment of the field of view projected on the imaging device; and, at least one electron deflection means disposed adjacent the image side of the objective lens for deflecting the image beam for fine adjustment of the field of view projected centrally on the imaging device within limits representative of a three micron radius of the specimen traversely of the optical axis and thereby maintaining an image of the desired portion of the specimen within the three micron radius projected centrally on the imaging device.
Claim 2
Dependent Claim
187 words
In an electron microscope or the like comprising: an electron gun for creating an electron beam; an electron optical system, having an optical axis, for focusing and projecting said beam comprising at least an objective lens; an imaging device; and, a means for positioning a specimen about the optical axis whereby the electron beam emanating from the specimen comprises an image beam which in the plane of the imaging device is larger than the device; the improvement comprising a field of view adjusting device comprising: mechanical means for driving the positioning means in a plane perpendicular to the optical axis for coarse adjustment of the field of view projected on the imaging device; and, at least one electron deflection means disposed adjacent the image side of the objective lens for deflecting the image beam for fine adjustment of the field of view projected centrally on the imaging device within limits representative of a three micron radius of the specimen traversely of the optical axis and thereby maintaining an image of the desired portion of the specimen within the three micron radius projected centrally on the imaging device.
Claim 3
Dependent Claim
30 words
The improvement in specimen field of view adjusting device set forth in claim 1, wherein an electron deflecting means is disposed in the back focal plane of the objective lens.
Claim 4
Dependent Claim
30 words
The improvement in specimen field in view adjusting device set forth in claim 1, wherein two electron deflecting means are disposed between the objective lens and the image producing device.
Claim 5
Dependent Claim
35 words
The improvement in specimen field of view adjusting device set forth in claim 1 comprising means for isolating the specimen stage from the mechanical driving means during the time the deflecting means is being operated.
Claim 6
Dependent Claim
81 words
The improvement in specimen field of view adjusting device set forth in claim 1 comprising a D.C. voltage source for actuating the deflecting means, means for controlling the said deflecting means by adjusting the D.C. voltage source, an A.C. voltage source, and a switching means for engaging or disengaging the D.C. and A.C. voltage sources such that when the A.C. source is applied to the deflecting means a double image suitable for determination of magnification is produced on the imaging device.
Claim 7
Dependent Claim
36 words
The improvement in specimen field of view adjusting device set forth in claim 1 comprising interlocking means for controlling said deflecting means and said driving means such that only one can be adjusted at one time.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1976-06-04 | 1976-12-04 | 1977-06-05 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1980-06-04 | 1980-12-04 | 1981-06-05 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1984-06-04 | 1984-12-04 | 1985-06-05 | $7700.00 | Window Closed / Lapsed |