US3726592A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method and apparatus for detecting moisture
Assignee: International Business Machines Corp
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Filing: 1970-11-27
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Granted: 1973-04-10
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Expires: 1990-11-27
Abstract
Abstract A method of measuring the breakdown of the P O bond in a phosphosilicate glass layer and thereby measuring the water transmissibility of a sputtered quartz layer superimposed on the glass layer. The intensity of the P O absorption band at 1,325 cm 1 is measured by an infrared spectrophotometer. The sample is then wet baked in a humid environment at an elevated temperature. The intensity of the P O absorption band at 1,325 cm 1 is again measured and compared with the first measurement.
Inventors
- 👤 E Corl
- 👤 K Daghir
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 15:36
CPC Classifications
G; G01; G01N; G01N15/00; G01N15/08
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
62 words
A method of measuring the water penetrability of a passivation layer on a component and comprising the steps of measuring the infrared spectrophotometic intensity of an absorption band of the component, wet baking the component in a humid environment at an elevated temperature, measuring again the infrared spectrophotometic intensity of the absorption band, and comparing the results of said two measuring steps.
Claim 2
Independent Claim
68 words
A method of measuring the breakdown of a chemical P O bond in a layer on a component and comprising the steps of measuring the intensity of the P O spectrophotometric absorption band of the component, exposing the passivation layer to a humid environment at an elevated temperature, measuring again the intensity of the P O spectrophotometric absorption band, and comparing the results of said two measuring steps.
Claim 3
Independent Claim
67 words
A method of measuring the breakdown of a P O bond in a phosphosilicate glass layer on a component and comprising the steps of measuring the intensity of the P O absorption band of the component, wet baking the component in a humid environment at an elevated temperature, measuring again the intensity of the P O absorption band, and comparing the results of said two measuring steps.
Claim 4
Independent Claim
78 words
A method of measuring the water transmissibility of a passivation layer of sputtered quartz covering a phosphosilicate glass layer on a component, and comprising the steps of measuring the spectrophotometric intensity of the P O absorption band of the component at about 1,325 cm 1, heating the passivation layer in a humid environment, measuring again the spectrophotometic intensity of the P O absorption band at about 1,325 cm 1, and comparing the results of said two measuring steps.
Claim 5
Independent Claim
38 words
An apparatus for measuring the penetrability of a layer on a component, and comprising means for measuring by spectrophotometer the intensity of an absorption band of the component, and means for exposing the layer to a humid environment.
Claim 6
Independent Claim
47 words
An apparatus for measuring the water penetrability of a passivation layer on a component, and comprising means for measuring by infrared spectrophotometer the intensity of the absorption band of the component, and furnace means for exposing the passivation layer to a humid environment at an elevated temperature.
Claim 7
Independent Claim
52 words
An apparatus for measuring the breakdown of a P O bond in a layer on a component, and comprising means for measuring by infrared spectrophotometer the intensity of the P O absorption band of the component, and furnace means for exposing the passivation layer to a humid environment at an elevated temperature.
Claim 8
Independent Claim
58 words
An apparatus for measuring the water penetrability of a passivation layer of sputtered quartz covering a phosphosilicate glass layer on a component, and comprising means for measuring by infrared spectrophotometer the intensity of the P O absorption band of the component, and furnace means for wet baking the passivation layer in a humid environment at an elevated temperature.
Claim 9
Independent Claim
59 words
An apparatus for measuring the breakdown of a P O bond in a phosphosilicate glass layer on a component, and comprising means for measuring by infrared spectrophotometer the intensity of the P O absorption band of the component at about 1,325 cm 1, and furnace means for exposing the passivation layer to a humid environment at an elevated temperature.
Claim 10
Independent Claim
59 words
A method of measuring humidity within an enclosure comprising the steps of placing on a component a layer of phosphosilicate glass, measuring the spectrophotometric intensity of an absorption band of the component, placing the component within the enclosure to be measured, measuring again the spectrophotometric intensity of the absorption band, and comparing the results of the two measuring steps.
References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1976-04-09 | 1976-10-09 | 1977-04-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1980-04-09 | 1980-10-09 | 1981-04-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1984-04-09 | 1984-10-09 | 1985-04-10 | $7700.00 | Window Closed / Lapsed |