US3723778A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Thickness sensor for sputtering systems utilizing magnetic deflection of electrons for thermal protection
Assignee: Inficon Inc
•
Filing: 1972-02-07
•
Granted: 1973-03-27
•
Expires: 1992-02-07
Abstract
Abstract An improved sensor for monitoring the thickness of thin films deposited by sputtering. The sensor employs a conventional quartz crystal and heating of the crystal is prevented by providing a localized magnetic field which substantially eliminates electron bombardment of the exposed area of the crystal. The magnet that produces the field is provided with a water cooled shield. The sensor can be used in either RF or DC sputtering systems.
Inventors
- 👤 C Lu
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 07:43
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/54; C23C14/542; C23C14/545; C23C14/546; G; G01; G01B; G01B7/00; G01B7/02; G01B7/06; G01B7/063; G01B7/066
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
57 words
A thickness sensor for sputtering systems comprising a quartz crystal, means to support the crystal so that one area thereof is exposed to receive the deposited material, and a magnet located adjacent the exposed crystal area and arranged so as to produce a magnetic field parallel to the plane of the crystal directly above the exposed area.
Claim 2
Dependent Claim
57 words
A thickness sensor for sputtering systems comprising a quartz crystal, means to support the crystal so that one area thereof is exposed to receive the deposited material, and a magnet located adjacent the exposed crystal area and arranged so as to produce a magnetic field parallel to the plane of the crystal directly above the exposed area.
Claim 3
Dependent Claim
14 words
A sensor as defined in claim 1 wherein the magnet is a permanent magnet.
Claim 4
Dependent Claim
13 words
A sensor as defined in claim 1 wherein the magnet is an electromagnet.
Claim 5
Dependent Claim
77 words
A sensor for monitoring the thickness of tin films deposited by sputtering comprising a quartz crystal, means to support the crystal so that one area thereof is exposed to receive the deposited material, a magnet mounted on the support means so that the opposite poles of the magnet are located adjacent the periphery of the exposed area of the crystal on opposite sides thereof, and cooling means for the magnet to prevent its overheating by electron bombardment.
Claim 6
Dependent Claim
77 words
A sensor for monitoring the thickness of tin films deposited by sputtering comprising a quartz crystal, means to support the crystal so that one area thereof is exposed to receive the deposited material, a magnet mounted on the support means so that the opposite poles of the magnet are located adjacent the periphery of the exposed area of the crystal on opposite sides thereof, and cooling means for the magnet to prevent its overheating by electron bombardment.
Claim 7
Dependent Claim
14 words
A sensor as defined in claim 4 wherein the magnet is a permanent magnet.
Claim 8
Dependent Claim
13 words
A sensor as defined in claim 4 wherein the magnet is an electromagnet.
Claim 9
Dependent Claim
17 words
A sensor as defined in claim 4 wherein the magnet cooling means is a water cooled shield.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1976-03-26 | 1976-09-25 | 1977-03-27 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1980-03-26 | 1980-09-25 | 1981-03-27 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1984-03-26 | 1984-09-25 | 1985-03-27 | $7700.00 | Window Closed / Lapsed |