US3721584A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Silicon coated substrates and objects fabricated therefrom
Assignee: DIEM ALBERT R OF UTAH
•
Filing: 1970-04-13
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Granted: 1973-03-20
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Expires: 1990-04-13
Abstract
Abstract Silicon coated substrates for such uses as optical filters, photo masks, passive circuits and as an information storage means.
Inventors
- 👤 A Diem
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 14:14
CPC Classifications
G; G02; G02B; G02B5/00; G02B5/20; G02B5/28; G02B5/285; C; C23; C23C; C23C16/00; C23C16/22; C23C16/24; G03; G03F; G03F1/00; G03F1/54; G11; G11C; G11C13/00; G11C13/04; G11C13/048; H; H01; H01C; H01C17/00; H01C17/003; H01C7/00; H10; H10D; H10D99/00; H10N; H10N97/00; H10P; H10P14/00; H10P14/60; H10P95/00; H10W; H10W20/00; H10W20/40; H10W20/495; Y; Y10; Y10T; Y10T428/00; Y10T428/26; Y10T428/263
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
15 words
The photomask of claim 1 including a layer of photosensitive material over said silicon film.
Claim 2
Dependent Claim
47 words
The photomask of claim 1 wherein said photomask is also comprised of an additional film, said additional film being located between said transparent substrate and said silicon film and further being a one-quarter wave length film for a wave length of light within the visible light spectrum.
Claim 3
Dependent Claim
37 words
The photomask of claim 3 wherein said photomask is also comprised of one or more one-quarter wave length films, for a wave length of light within the visible spectrum, on one or both surfaces of said photomask.
Claim 4
Dependent Claim
18 words
The photomask of claim 4, wherein said one-quarter wave length films are substantially one-quarter wave length non-reflecting films.
Claim 5
Dependent Claim
37 words
A photomask comprised of a glass substrate with a patterned film of pyrolytically deposited silicon on the surface thereof, said silicon film being of a thickness which is substantially plum colored when viewed under normal lighting conditions.
Claim 6
Dependent Claim
71 words
A light filter comprised of a transparent substrate, a silicon film on one surface of said substrate, and a layer of metal on selected areas of said silicon film partially diffused into said silicon film, mounted to an enclosure having metal surfaces disposed adjacent at least a part of said layer of metal, said metal surfaces being attached to the adjacent said layer of metal by an intermediate layer of solder.
Claim 7
Dependent Claim
21 words
The light filter of claim 7 wherein said solder between said metal layer and said metal surfaces create a hermetic seal.
Claim 8
Dependent Claim
17 words
The light filter of claim 7 wherein said layer of metal is a layer of electroless nickel.
Claim 9
Dependent Claim
16 words
The light filter of claim 9 wherein said silicon film is a pyrolytically deposited silicon film.
Claim 10
Dependent Claim
18 words
The light filter of claim 10 wherein said electroless nickel layer is partially diffused into said silicon film.
Claim 11
Dependent Claim
43 words
The light filter of claim 11 mounted to an enclosure having metal surfaces disposed adjacent at least a part of said layer of electroless nickel, said metal surfaces being attached to the adjacent said electroless nickel layer by an intermediate layer of solder.
Claim 12
Dependent Claim
44 words
An article for use in the fabrication of an improved photomask comprising; a glass substrate having a a pyrolytically deposited silicon film on one surface thereof, said silicon film being of a thickness which is substantially plum colored when viewed under normal lighting conditions.
References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1976-03-19 | 1976-09-18 | 1977-03-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1980-03-19 | 1980-09-18 | 1981-03-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1984-03-19 | 1984-09-18 | 1985-03-20 | $7700.00 | Window Closed / Lapsed |