US3719879A
Expired / Lapsed
US
⏱️ 0.0 years remaining
System for accurately positioning an object under the control of programmed numerical data
Assignee: Thales SA
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Filing: 1971-07-15
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Granted: 1973-03-06
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Expires: 1991-07-15
Abstract
Abstract System for accurately positioning objects in one plane by means of translational movements in one or more directions which comprises a numerically controlled stepping motor providing a coarse displacement, and piezoelectric ceramics included in a digital control loop for providing a fine displacement upon halting of the motor. The system is applicable in particular to mask machines used for the manufacture of integrated circuitry.
Inventors
- 👤 R Marcy
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 15:16
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70691; G03F7/70716; B; B23; B23Q; B23Q23/00; G05; G05B; G05B19/00; G05B19/02; G05B19/18; G05B19/19; G05B19/21; G05B19/23; G05B19/231; G05B19/39; G05D; G05D3/00; G05D3/12; G05D3/20; H; H05; H05K; H05K13/00; H05K13/0015; G05B2219/00; G05B2219/30; G05B2219/37; G05B2219/37275; G05B2219/41; G05B2219/41326; G05B2219/41344; G05B2219/41457; G05B2219/45; G05B2219/45026; Y; Y10; Y10T; Y10T82/00; Y10T82/25; Y10T82/2531; Y10T82/2541; Y10T82/2549
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
195 words
A system for accurately positioning an object under the control of a numerical control device supplying, in the form of electrical readout signals, programmed coordinate values defining the successive positions of said object along at least one direction of translation, said system comprising : a bench, a holder plate carrying said object above said bench, means for sliding said holder plate along at least said direction, first actuating means mechanically linked to said sliding means for generating a coarse displacement of said holder plate in response to said signals, second actuating means mechanically linked to said sliding means for superimposing to said coarse displacement a fine displacement capable of cancelling out any positional error of said object in relation to said programmed coordinate values, measuring means for providing digital data corresponding to quantized measurements of said displacements, and data comparator means having inputs for respectively receiving said signals and said digital data, and supplying, upon halting of said first actuating means, error signals representative of said positional errors ; said first actuating means having a control input for receiving said signals ; said second actuating means having a control input for receiving said error signals.
Claim 2
Independent Claim
195 words
A system for accurately positioning an object under the control of a numerical control device supplying, in the form of electrical readout signals, programmed coordinate values defining the successive positions of said object along at least one direction of translation, said system comprising : a bench, a holder plate carrying said object above said bench, means for sliding said holder plate along at least said direction, first actuating means mechanically linked to said sliding means for generating a coarse displacement of said holder plate in response to said signals, second actuating means mechanically linked to said sliding means for superimposing to said coarse displacement a fine displacement capable of cancelling out any positional error of said object in relation to said programmed coordinate values, measuring means for providing digital data corresponding to quantized measurements of said displacements, and data comparator means having inputs for respectively receiving said signals and said digital data, and supplying, upon halting of said first actuating means, error signals representative of said positional errors ; said first actuating means having a control input for receiving said signals ; said second actuating means having a control input for receiving said error signals.
Claim 3
Independent Claim
195 words
A system for accurately positioning an object under the control of a numerical control device supplying, in the form of electrical readout signals, programmed coordinate values defining the successive positions of said object along at least one direction of translation, said system comprising : a bench, a holder plate carrying said object above said bench, means for sliding said holder plate along at least said direction, first actuating means mechanically linked to said sliding means for generating a coarse displacement of said holder plate in response to said signals, second actuating means mechanically linked to said sliding means for superimposing to said coarse displacement a fine displacement capable of cancelling out any positional error of said object in relation to said programmed coordinate values, measuring means for providing digital data corresponding to quantized measurements of said displacements, and data comparator means having inputs for respectively receiving said signals and said digital data, and supplying, upon halting of said first actuating means, error signals representative of said positional errors ; said first actuating means having a control input for receiving said signals ; said second actuating means having a control input for receiving said error signals.
Claim 4
Independent Claim
195 words
A system for accurately positioning an object under the control of a numerical control device supplying, in the form of electrical readout signals, programmed coordinate values defining the successive positions of said object along at least one direction of translation, said system comprising : a bench, a holder plate carrying said object above said bench, means for sliding said holder plate along at least said direction, first actuating means mechanically linked to said sliding means for generating a coarse displacement of said holder plate in response to said signals, second actuating means mechanically linked to said sliding means for superimposing to said coarse displacement a fine displacement capable of cancelling out any positional error of said object in relation to said programmed coordinate values, measuring means for providing digital data corresponding to quantized measurements of said displacements, and data comparator means having inputs for respectively receiving said signals and said digital data, and supplying, upon halting of said first actuating means, error signals representative of said positional errors ; said first actuating means having a control input for receiving said signals ; said second actuating means having a control input for receiving said error signals.
Claim 5
Dependent Claim
28 words
A positioning system as claimed in claim 1, wherein said first actuating means comprise a stepping motor ; said coarse displacement being a step by step quantized displacement.
Claim 6
Dependent Claim
39 words
A positioning system as claimed in claim 1, wherein said second actuating means comprise at least one electro-mechanical transducer and means for supplying an analog voltage to said transducer ; said fine displacement being proportional to said analog voltage.
Claim 7
Dependent Claim
27 words
A positioning system as claimed in claim 1, wherein said measuring means include optical interferometric means having a measuring optical path parallel to said direction of translation.
Claim 8
Dependent Claim
59 words
A positioning system as claimed in claim 4, wherein sad interferometric means comprises a mirror integral with said holder plate and located on said measuring path ; said measuring further comprising a count-up count down logic circuit coupled to said interferometric means and counter means controlled by said interferometric means and said logic circuit for supplying said digital data.
Claim 9
Dependent Claim
61 words
A positioning system as claimed in claim 1, wherein said data comparator means comprise : digital substracting means having a first input for receiving in succession said coordinate values, a second input for receiving said digital data and an output ; said data comparator means further comprising a digital to analog convertor coupled to the output of said digital substracting means.
Claim 10
Dependent Claim
85 words
A positioning system as claimed in claim 6, wherein said digital substracting means comprise a substractor having two inputs, first storage means coupled to one of said substractor inputs for storing any one of said coordinate values, second storage means coupled to said other substractor input for storing said digital data, and gating means for feeding said digital data to said second storage means, upon halting of said first actuating means ; said gating means having a control input coupled to said numerical control device.
Claim 11
Dependent Claim
31 words
A positioning system as claimed in claim 7, wherein the control input of said gating means is fed from a cHopper arrangement having an input coupled to said numerical control device.
Claim 12
Dependent Claim
29 words
A positioning system as claimed in claim 7, wherein said first storage means are fed from a decoder having at least one input coupled to said numerical control device.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1976-03-05 | 1976-09-04 | 1977-03-06 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1980-03-05 | 1980-09-04 | 1981-03-06 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1984-03-05 | 1984-09-04 | 1985-03-06 | $7700.00 | Window Closed / Lapsed |