Packing vessel for thin sheet materials

Claim 2

A packing unit for thin sheet materials such as semiconductor wafers which comprises cooperating lower and upper members that are adapted to fit together so as to form at least one cavity, A. said lower member being characterized by: a. at least one downwardly concave bottom surface that forms the lower portion of said at least one cavity, b. a substantially vertical annular inner sidewall extending upwardly from the periphery of each said concave bottom surface, c. a bottom shelf portion extending substantially horizontally outwardly from said inner sidewall, d. an outer sidewall portion extending substantially vertically downwardly from the outer periphery of said bottom shelf portion, e. said bottom shelf portion and said outer sidewall defining an annular channel around the periphery of each concave bottom surface, B. said upper member being characterized by a. at least one upwardly convex surface that forms the upper portion of said at least one cavity, b. a first cover sidewall portion extending vertically upwardly from the periphery of each said convex surface, c. a first cover shelf portion extending substantially horizontally outwardly from said first cover sidewall portion, d. the first cover sidewall portion and said first cover shelf portion being snugly interengageable with the outer surface of the corner formed by the said inner sidewall and the said bottom shelf portion of said lower member, e. a second cover sidewall portion extending vertically upwardly from the periphery of saiD first cover shelf portion, f. a second cover shelf portion extending substantially horizontally outwardly from said second cover sidewall portion, g. the aforesaid second cover sidewall portion and said second cover shelf portion having an outer surface configuration that is slightly smaller than the interior configuration of the corner formed by said inner sidewall and said bottom shelf portion of said lower member.

Claim 3

A packing unit for thin sheet materials such as semiconductor wafers which comprises cooperating lower and upper members that are adapted to fit together so as to form at least one cavity, A. said lower member being characterized by: a. at least one downwardly concave bottom surface that forms the lower portion of said at least one cavity, b. a substantially vertical annular inner sidewall extending upwardly from the periphery of each said concave bottom surface, c. a bottom shelf portion extending substantially horizontally outwardly from said inner sidewall, d. an outer sidewall portion extending substantially vertically downwardly from the outer periphery of said bottom shelf portion, e. said bottom shelf portion and said outer sidewall defining an annular channel around the periphery of each concave bottom surface, B. said upper member being characterized by a. at least one upwardly convex surface that forms the upper portion of said at least one cavity, b. a first cover sidewall portion extending vertically upwardly from the periphery of each said convex surface, c. a first cover shelf portion extending substantially horizontally outwardly from said first cover sidewall portion, d. the first cover sidewall portion and said first cover shelf portion being snugly interengageable with the outer surface of the corner formed by the said inner sidewall and the said bottom shelf portion of said lower member, e. a second cover sidewall portion extending vertically upwardly from the periphery of saiD first cover shelf portion, f. a second cover shelf portion extending substantially horizontally outwardly from said second cover sidewall portion, g. the aforesaid second cover sidewall portion and said second cover shelf portion having an outer surface configuration that is slightly smaller than the interior configuration of the corner formed by said inner sidewall and said bottom shelf portion of said lower member.

Claim 4

A packing unit for thin sheet materials such as semiconductor wafers which comprises cooperating lower and upper members that are adapted to fit together so as to form at least one cavity, A. said lower member being characterized by: a. at least one downwardly concave bottom surface that forms the lower portion of said at least one cavity, b. a substantially vertical annular inner sidewall extending upwardly from the periphery of each said concave bottom surface, c. a bottom shelf portion extending substantially horizontally outwardly from said inner sidewall, d. an outer sidewall portion extending substantially vertically downwardly from the outer periphery of said bottom shelf portion, e. said bottom shelf portion and said outer sidewall defining an annular channel around the periphery of each concave bottom surface, B. said upper member being characterized by a. at least one upwardly convex surface that forms the upper portion of said at least one cavity, b. a first cover sidewall portion extending vertically upwardly from the periphery of each said convex surface, c. a first cover shelf portion extending substantially horizontally outwardly from said first cover sidewall portion, d. the first cover sidewall portion and said first cover shelf portion being snugly interengageable with the outer surface of the corner formed by the said inner sidewall and the said bottom shelf portion of said lower member, e. a second cover sidewall portion extending vertically upwardly from the periphery of saiD first cover shelf portion, f. a second cover shelf portion extending substantially horizontally outwardly from said second cover sidewall portion, g. the aforesaid second cover sidewall portion and said second cover shelf portion having an outer surface configuration that is slightly smaller than the interior configuration of the corner formed by said inner sidewall and said bottom shelf portion of said lower member.

Claim 5

A packing unit according to claim 1 wherein said concave bottom surface is provided with a radial groove which is adapted to receive a pincette to facilitate the removal of the material resting on said surface.

Claim 6

A packing unit according to claim 1 wherein said packing unit is composed of a synthetic resin having a thickness between about 0.1 mm and about 1.0 mm.

Claim 7

A packing unit for items such as thin semiconductor wafers which comprises cooperating lower and upper members that are adapted to fit together so as to form a plurality of cavities: A. said lower member being characterized by: a. a plurality of spaced apart downwardly concave bottom surfaces that define the bottom portions of the aforesaid plurality of cavities, b. a substantially vertical annular inner sidewall extending upwardly from the periphery of each of said concave bottom surfaces, c. a bottom shelf portion extending substantially horizontally outwardly from the inner sidewall of each of said concave bottom surfaces, d. outer sidewall portions extending substantially vertically downwardly from the outer periphery of each of said bottom shelf portions, e. each of said bottom shelf portions of each of said outer sidewall portions defining an annular channel around the periphery of each concave bottom surface, B. said upper member being characterized by: a. a plurality of spaced apart upwardly convex surfaces that form the cover portions of said plurality of cavities, b. a first cover sidewall portion extending vertically upwardly from the periphery of each said convex surface, c. a first cover shelf portion extending substantially horizontally outwardly from each said first cover sidewall portion, d. the under surface of the first cover sidewall portion and the first cover shelf portion of each convex surface being snugly interengageable with the outer surface of the corner defined by the intersection of said inner sidewall and said bottom shelf portion of each corresponding concave surface in the lower member, e. a second cover sidewall portion extending vertically upwardly from the periphery of each of said first cover shelf portions, f. a second cover shelf portion extending substantially horizontally outwardly from each second cover sidewall portion, g. each of the aforesaid second cover sidewall portions and second cover shelf portions having an outer surface configuration that is slightly smaller than the interior surface configuration of the corner formed by the intersection of said inner sidewall portion and the bottom shelf portion of said lower member.

Claim 8

A packing unit for items such as thin semiconductor wafers which comprises cooperating lower and upper members that are adapted to fit together so as to form a plurality of cavities: A. said lower member being characterized by: a. a plurality of spaced apart downwardly concave bottom surfaces that define the bottom portions of the aforesaid plurality of cavities, b. a substantially vertical annular inner sidewall extending upwardly from the periphery of each of said concave bottom surfaces, c. a bottom shelf portion extending substantially horizontally outwardly from the inner sidewall of each of said concave bottom surfaces, d. outer sidewall portions extending substantially vertically downwardly from the outer periphery of each of said bottom shelf portions, e. each of said bottom shelf portions of each of said outer sidewall portions defining an annular channel around the periphery of each concave bottom surface, B. said upper member being characterized by: a. a plurality of spaced apart upwardly convex surfaces that form the cover portions of said plurality of cavities, b. a first cover sidewall portion extending vertically upwardly from the periphery of each said convex surface, c. a first cover shelf portion extending substantially horizontally outwardly from each said first cover sidewall portion, d. the under surface of the first cover sidewall portion and the first cover shelf portion of each convex surface being snugly interengageable with the outer surface of the corner defined by the intersection of said inner sidewall and said bottom shelf portion of each corresponding concave surface in the lower member, e. a second cover sidewall portion extending vertically upwardly from the periphery of each of said first cover shelf portions, f. a second cover shelf portion extending substantially horizontally outwardly from each second cover sidewall portion, g. each of the aforesaid second cover sidewall portions and second cover shelf portions having an outer surface configuration that is slightly smaller than the interior surface configuration of the corner formed by the intersection of said inner sidewall portion and the bottom shelf portion of said lower member.

Claim 9

A packing unit according to claim 4 wherein said concave bottom surface is provided with a radial groove which is adapted to receive a pincette to facilitate the removal of the material resting on said surface.

Claim 10

A packing unit according to claim 4 wherein said packing unit is composed of a synthetic resin having a thickness between about 0.1 mm and about 1.0 mm.

Claim 11

A container unit for thin sheet materials such as semiconductor wafers which comprises cooperating lower and upper members that are adapted to fit together so as to form a plurality of cavities wherein: A. said lower member is characterized by a. a plurality of spaced apart downwardly concave bottom surfaces, b. a first annular channel section of a generally U-shaped configuration disposed around the periphery of each concave bottom surface, B. said upper member is characterized by a. a plurality of spaCed apart upwardly convex cover surfaces, b. a second annular channel section disposed around the periphery of each convex cover surface which can be considered as consisting of a stepped U-shaped configuration that includes a receptor portion and a projector portion that is smaller than said receptor portion, C. said concave bottom surfaces and said convex cover surfaces being vertically aligned with each other when said lower and upper members are functioning as a container, D. the exterior surface of said first annular channel section having a size and configuration that is adapted to fit within the interior surface of the receptor portion of said second annular channel section in a nesting relationship. E. the interior surface of said first annular channel section having a size and configuration that is adapted to accommodate the exterior surface of the projector portion of said second annular channel section in a nesting relationship.

Claim 12

A container unit for thin sheet materials such as semiconductor wafers which comprises cooperating lower and upper members that are adapted to fit together so as to form a plurality of cavities wherein: A. said lower member is characterized by a. a plurality of spaced apart downwardly concave bottom surfaces, b. a first annular channel section of a generally U-shaped configuration disposed around the periphery of each concave bottom surface, B. said upper member is characterized by a. a plurality of spaCed apart upwardly convex cover surfaces, b. a second annular channel section disposed around the periphery of each convex cover surface which can be considered as consisting of a stepped U-shaped configuration that includes a receptor portion and a projector portion that is smaller than said receptor portion, C. said concave bottom surfaces and said convex cover surfaces being vertically aligned with each other when said lower and upper members are functioning as a container, D. the exterior surface of said first annular channel section having a size and configuration that is adapted to fit within the interior surface of the receptor portion of said second annular channel section in a nesting relationship. E. the interior surface of said first annular channel section having a size and configuration that is adapted to accommodate the exterior surface of the projector portion of said second annular channel section in a nesting relationship.

Claim 13

A container according to claim 7 wherein said concave bottom surface is provided with a radial groove which is adapted to receive a pincette to facilitate the removal of the material resting on said surface.

Claim 14

A container according to claim 7 wherein said packing unit is composed of a synthetic resin having a thickness between about 0.1 mm and about 1.0 mm.