US3718565A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Technique for the fabrication of discrete rc structure
Assignee: AT&T Inc
•
Filing: 1970-11-27
•
Granted: 1973-02-27
•
Expires: 1990-11-27
Abstract
Abstract A TECHNIQUE FOR THE FABRICATION OF TANTALUM-BASED RESISTORS AND CAPACITORS ON A SINGLE SUBSTRATE MEMBER INVOLVES A SERIES OF PROCESS STEPS WHEREIN A LAYER OF TANTALUM NITRIDE AND A LAYER OF BETA-TANTALUM ARE SEQUENTIALLY DEPOSITED UPON A SUBSTRATE MEMBER AND SERVE AS THE RESISTOR AND CAPACITOR FILMS RESPECTIVELY OF THE DESIRED STRUCTURE, THE CAPACITOR FILM BEING CONVERTED TO A PROTECTIVE ANODIC OXIDE DURING THE COUSE OF THE PROCESSING.
Inventors
- 👤 F Pelletier
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 06:02
CPC Classifications
H; H01; H01C; H01C13/00; H01C13/02; H10; H10N; H10N97/00
Claims Analysis
Total Claims: 0
No claims parsed yet. Click Sync Now above to re-index claims from Google Patents.
References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1976-02-27 | 1976-08-28 | 1977-02-27 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1980-02-27 | 1980-08-28 | 1981-02-27 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1984-02-27 | 1984-08-28 | 1985-02-27 | $7700.00 | Window Closed / Lapsed |