US3717439A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Vapour phase reaction apparatus
Assignee: Toshiba Corp
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Filing: 1970-11-18
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Granted: 1973-02-20
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Expires: 1990-11-18
Abstract
Abstract A reaction chamber having a bottom which is a wafer mount and dome member; a plurality of gas inlet pipes positioned at the lower part of the reaction chamber for introducing gas into the reaction chamber so as to cause streams of gas therein to whirl along the inner wall of said chamber; an exhaust for expelling waste gas from the lower part of the vortex center of whirling gas in the reaction chamber; and heating means provided outside of the reaction chamber for its heating. The reaction chamber preferably contains a reaction gas inlet pipe having its opening positioned upwardly facing the upper central part of the inner wall of said done member.
Inventors
- 👤 R Sakai
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 23:44
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/455; C23C16/45502; C23C16/4411; C23C16/46; C30; C30B; C30B25/00; C30B25/02; C30B25/14; Y; Y10; Y10S; Y10S148/00; Y10S148/043; Y10S148/118
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
151 words
A vapour phase reaction apparatus comprising: a reaction chamber including a bottom surface adapted to receive wafers thereon and a generally domed shaped member covering said bottom surface; a gas inlet pipe having its inner end positioned below the upper central part of the dome and positioned with the opening thereof directed upward at the upper central part of the inner wall of said dome; a plurality of gas inlet pipes having nozzles extending into said reaction chamber peripherally positioned around the lower side wall of said dome, said nozzles being directed in a substantially horizontal plane to cause gas ejected from said nozzles to whirl unidirectionally along the inner wall of said dome; a waste gas exhaust pipe penetrating said reaction chamber for expelling waste gas from the vortex center of the whirling gasses; and a heating section including a heating chamber adjacent to and outside of said reaction chamber.
Claim 2
Dependent Claim
151 words
A vapour phase reaction apparatus comprising: a reaction chamber including a bottom surface adapted to receive wafers thereon and a generally domed shaped member covering said bottom surface; a gas inlet pipe having its inner end positioned below the upper central part of the dome and positioned with the opening thereof directed upward at the upper central part of the inner wall of said dome; a plurality of gas inlet pipes having nozzles extending into said reaction chamber peripherally positioned around the lower side wall of said dome, said nozzles being directed in a substantially horizontal plane to cause gas ejected from said nozzles to whirl unidirectionally along the inner wall of said dome; a waste gas exhaust pipe penetrating said reaction chamber for expelling waste gas from the vortex center of the whirling gasses; and a heating section including a heating chamber adjacent to and outside of said reaction chamber.
Claim 3
Dependent Claim
19 words
The apparatus of claim 1 wherein said bottom is horizontal and is adapted to have horizontally oriented wafers thereon.
Claim 4
Dependent Claim
38 words
The apparatus of claim 2 wherein said inlet gas pipe positioned under said dome is a reaction gas inlet pipe, and wherein said peripherally positioned inlet gas pipes are used to inject carrier gas into said reaction chamber.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1976-02-20 | 1976-08-21 | 1977-02-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1980-02-20 | 1980-08-21 | 1981-02-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1984-02-20 | 1984-08-21 | 1985-02-20 | $7700.00 | Window Closed / Lapsed |