Cathode atomization apparatus

Claim 1

An apparatus for cathode sputtering comprising, an insulating housing means, a cylindrical anode structure enclosed within said housing means, means for applying a positive potential to said anode structure, means for maintaining a suitable ionization atmosphere within said housing means, means for providing a magnetic high frequency field directed axially to said anode structure so as to penetrate said anode structure, said anode structure being slotted, a cathode structure positioned within said anode structure in working relation to a substrate and insulated from said housing means and anode structure, said cathode structure consisting essentially of a first geometrically shaped member composed of a layer-forming component and having a given surface area exposed to a substrate and a second geometrically shaped member composed of another layer-forming component, said second member being affixed in a relatively rotatable manner onto the exposed surface area of said first member, and means for connecting said cathode structure to a source of negative potential for effecting sputtering of said layer-forming components to produce a substantially homogeneous layer on a substrate.

Claim 2

An apparatus for cathode sputtering comprising, an insulating housing means, a cylindrical anode structure enclosed within said housing means, means for applying a positive potential to said anode structure, means for maintaining a suitable ionization atmosphere within said housing means, means for providing a magnetic high frequency field directed axially to said anode structure so as to penetrate said anode structure, said anode structure being slotted, a cathode structure positioned within said anode structure in working relation to a substrate and insulated from said housing means and anode structure, said cathode structure consisting essentially of a first geometrically shaped member composed of a layer-forming component and having a given surface area exposed to a substrate and a second geometrically shaped member composed of another layer-forming component, said second member being affixed in a relatively rotatable manner onto the exposed surface area of said first member, and means for connecting said cathode structure to a source of negative potential for effecting sputtering of said layer-forming components to produce a substantially homogeneous layer on a substrate.

Claim 4

An apparatus for cathode sputtering adapted for producing a layer on a substrate comprising, an enclosed housing means, a cylindrical anode structure positioned within said housing means, means for applying a positive potential to said anode structure, means for maintaining a suitable ionization atmosphere within said housing means, means for providing a magnetic high frequency field directed axially to said anode structure so as to penetrate said anOde structure, said anode structure being slotted, a cathode structure positioned within said anode structure along a peripheral boundary of said anode structure spaced from a substrate, said cathode structure being insulated from said housing means and anode structure and consisting essentially of a first disk-shaped member having a given diameter with at least one segregated portion thereof composed of a first layer-forming material, said first member having a surface area thereof exposed to a substrate, and a second sector-shaped member affixed in a relatively rotatable manner onto the first member so as to be movable relative to the exposed surface area of said first member, said second member having at least one portion thereof composed of a second layer-forming material, and means for connecting said cathode structure to a source of negative potential for sputtering said first and second layer-forming materials to produce a substantially homogeneous layer composed of said layer-forming materials on a substrate.

Claim 5

An apparatus for cathode sputtering adapted for producing a layer on a substrate comprising, an enclosed housing means, a cylindrical anode structure positioned within said housing means, means for applying a positive potential to said anode structure, means for maintaining a suitable ionization atmosphere within said housing means, means for providing a magnetic high frequency field directed axially to said anode structure so as to penetrate said anOde structure, said anode structure being slotted, a cathode structure positioned within said anode structure along a peripheral boundary of said anode structure spaced from a substrate, said cathode structure being insulated from said housing means and anode structure and consisting essentially of a first disk-shaped member having a given diameter with at least one segregated portion thereof composed of a first layer-forming material, said first member having a surface area thereof exposed to a substrate, and a second sector-shaped member affixed in a relatively rotatable manner onto the first member so as to be movable relative to the exposed surface area of said first member, said second member having at least one portion thereof composed of a second layer-forming material, and means for connecting said cathode structure to a source of negative potential for sputtering said first and second layer-forming materials to produce a substantially homogeneous layer composed of said layer-forming materials on a substrate.