US3716469A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Fabrication method for making an aluminum alloy having a high resistance to electromigration
Assignee: Cogar Corp
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Filing: 1971-10-01
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Granted: 1973-02-13
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Expires: 1991-10-01
Abstract
Abstract THIS DISCLOSURE IS DIRECTED TO AN IMPROVED SEMICONDUCTOR DEVICE, ELECTRICAL CONDUCTOR, THIN FILM CONDUCTOR, ALLOY AND FABRICATION METHODS THEREFOR. AN ALUMINUM-OXIDECOPPER ALLOY CONDUCTOR IS DISCLOSED WHICH HAS A HIGH RESISTANCE TO ELECTROMIGRATION AND HENCE, A CONDUCTOR LIFETIME GREATER BY AT LEAST A FACTOR OF 10 THAN UNALLOYEED ALUMINUM CONDUCTORS. SEMICONDUCTOR DEVICES UTILIZING THIS ALUMINUM ALLOY IN THE THIN FILM CONDUCTIVE STRIPES INTERCONNECTING DIFFERENT CONDUCTIVITY REGIONS OF DEVICES LOCATED IN THE SEMICONDUCTOR SUBSTRATE ARE SIGNIFICANTLY IMPROVED AND MORE RELIABLE.
Inventors
- 👤 H Bhatt
- 👤 J Tuttle
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 16:01
CPC Classifications
H; H10; H10D; H10D1/00; H10D1/40; H10D1/43; H01; H01B; H01B1/00; H01B1/02; H01B1/023; H10D99/00; H10P; H10P95/00; Y; Y10; Y10T; Y10T428/00; Y10T428/12; Y10T428/12493; Y10T428/12528
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1976-02-13 | 1976-08-14 | 1977-02-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1980-02-13 | 1980-08-14 | 1981-02-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1984-02-13 | 1984-08-14 | 1985-02-13 | $7700.00 | Window Closed / Lapsed |