US3706597A
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US
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Glass vapor deposition on surfaces of semiconductor elements
Assignee: International Business Machines Corp
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Filing: 1970-11-23
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Granted: 1972-12-19
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Expires: 1990-11-23
Abstract
Abstract A PROCESS FOR VAPOR DEPOSITION OF GLASS FILMS ON SEMICONDUCTOR MATERIALS WHICH COMPRISES HEATING THE SEMICONDUCTOR MATERIAL IN AN ATMOSPHERE MIXTURE OF ORGANO SILICON, ORGANO LEAD, OXYGEN AND NITROGEN.
Inventors
- 👤 Pei-Ching Li
- 👤 Paul J Tsang
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 23:10
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/22; C23C16/30; C23C16/40; C23C16/401; H; H10; H10P; H10P14/00; H10P14/60; H10P14/63; H10P14/6326; H10P14/6328; H10P14/6334; H10P14/66; H10P14/668; H10P14/6681; H10P14/6684; H10P14/6686; H10P14/69; H10P14/692; H10P14/6921; H10P14/6922; H10P14/6923
Claims Analysis
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References Cited (Backward Citations)
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1975-12-19 | 1976-06-19 | 1976-12-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1979-12-19 | 1980-06-19 | 1980-12-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1983-12-19 | 1984-06-19 | 1984-12-19 | $7700.00 | Window Closed / Lapsed |