US3706475A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Air slides
Assignee: International Business Machines Corp
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Filing: 1971-03-29
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Granted: 1972-12-19
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Expires: 1991-03-29
Abstract
Abstract An air slide for imparting both lift and direction to a semiconductor wafer, the air slide comprising a guide plane having a plurality of arcuate recesses in the surface thereof, the recesses having side and bottom walls with the bottom wall of each of the recesses having an upward slope which merges into the surface of the guide plane substantially in the direction of intended motion of the semiconductor wafer. In the embodiment shown, a longitudinally extending plenum chamber may be connected so as to underlie the track or be positioned at opposite lateral edges of the track, the edge connection of the plenum chambers enhancing the ability for close spacing and thus tiering of the guide planes. Additionally, disclosed are two basic track structures which permit of alternate air supply sources, such as a fan or high pressure air.
Inventors
- 👤 Carl Yakubowski
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 13:43
CPC Classifications
B; B65; B65G; B65G51/00; B65G51/02; B65G51/03; H; H10; H10P; H10P72/00; H10P72/30; H10P72/36
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
117 words
An air slide for imparting lift and direction to a workpiece placed thereon; said air slide comprising: a track including a guide plane having a plurality of narrow elongated arcuate recesses in the surface thereof, each of said recesses having closely spaced side walls and a bottom wall joining said side walls, said bottom wall being sloped upwardly and merging into said guide plane substantially in the direction of intended motion of said workpiece, a longitudinally extending plenum chamber connected to said track, and means connecting said plenum chamber to said recesses, and means to cause air to flow from said plenum chamber into said arcuate recesses in a direction substantially along the axis of said recesses.
Claim 2
Dependent Claim
117 words
An air slide for imparting lift and direction to a workpiece placed thereon; said air slide comprising: a track including a guide plane having a plurality of narrow elongated arcuate recesses in the surface thereof, each of said recesses having closely spaced side walls and a bottom wall joining said side walls, said bottom wall being sloped upwardly and merging into said guide plane substantially in the direction of intended motion of said workpiece, a longitudinally extending plenum chamber connected to said track, and means connecting said plenum chamber to said recesses, and means to cause air to flow from said plenum chamber into said arcuate recesses in a direction substantially along the axis of said recesses.
Claim 3
Dependent Claim
15 words
An air slide in accordance with claim 1 wherein said plenum chamber underlies said track.
Claim 4
Dependent Claim
42 words
An air slide in accordance with claim 2 including a longitudinally extending recess in the upper surface of said air slide, a channel underlying said recess and extending longitudinally along said track, said channel being in fluid communication with said arcuate recesses.
Claim 5
Dependent Claim
24 words
An air slide in accordance with claim 3 wherein said channel extends from said longitudinally extending recess and forms part of said plenum chamber.
Claim 6
Dependent Claim
47 words
An air slide in accordance with claim 3 including a bottom wall in said longitudinally extending recess, and a plurality of apertures in said bottom wall extending through said bottom wall and providing said means for fluid communication between said plenum chamber and said longitudinally extending recess.
Claim 7
Dependent Claim
16 words
An air slide in accordance with claim 3 including cover means overlying said longitudinally extending recess.
Claim 8
Dependent Claim
24 words
An air slide in accordance with claim 1 wherein said plenum chamber is disposed along at least one longitudinal edge of said guide plane.
Claim 9
Dependent Claim
24 words
An air slide in accordance with claim 7 including a second plenum chamber disposed along the opposite longitudinally extending edge of said guide plane.
Claim 10
Dependent Claim
29 words
An air slide in accordance with claim 7 including a plurality of guide planes in superimposed juxtapositioned relation, each of said guide planes being connected to said plenum chamber.
Claim 11
Dependent Claim
44 words
An air slide in accordance with claim 8 wherein said arcuate recesses are arranged in a set, one of said set being coupled to one of said plenum chambers and the other of said set being coupled to the other of said plenum chambers.
Claim 12
Dependent Claim
37 words
An air slide in accordance with claim 10 including a pluralIty of guide planes in superimposed juxtapositioned relation, each of said guide planes being connected to each of said plenum chambers and having recesses arranged in sets.
Claim 13
Dependent Claim
42 words
An air slide in accordance with claim 11 wherein said set of recesses in one of said guide planes is disposed to impart direction to a workpiece opposite to the direction of a second workpiece supported by another of said guide planes.
Claim 14
Dependent Claim
18 words
An air slide in accordance with claim 1 wherein said track is circular in shape, forming a turntable.
Claim 15
Dependent Claim
16 words
An air slide in accordance with 13 including wall means along the periphery of said track.
Claim 16
Dependent Claim
16 words
An air slide in accordance with 13 including wall means along the periphery of said track.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1975-12-19 | 1976-06-19 | 1976-12-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1979-12-19 | 1980-06-19 | 1980-12-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1983-12-19 | 1984-06-19 | 1984-12-19 | $7700.00 | Window Closed / Lapsed |