US3704946A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Microcircuit art generating means
Assignee: OPT OMECHANISMS Inc
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Filing: 1969-02-20
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Granted: 1972-12-05
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Expires: 1989-02-20
Abstract
Abstract A machine to generate the art work in making photomasks for microcircuits. A photoplate is mounted on a precision X and Y coordinate table underneath a microflash camera having a master reticle holder holding a master reticle plate. The master plate has a plurality of apertures of different sizes, shapes and configurations. Lines and designs are traced on the receiving plate by scanning it and flashing the camera lamp through the aperture. The positions of the X and Y table is measured by interferometer means and the movement of X and Y tables is controlled by servo motors. The operation of the servo motors, the microflash camera, and the aperture plate selector may be automatically controlled by computer program input means. Master plates may be made on this machine.
Inventors
- 👤 Andre R Brault
- 👤 Anwar K Chitayat
- 👤 Ronald C M Beeh
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 12:31
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70425; G03F7/70475; G03F7/20; G03F7/2002
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
128 words
Microcircuit art generating means comprising, a stable base, a precision X and Y coordinate table movably mounted on said base, means connected to drive said table, X and Y interfereometer means mounted on said base and adapted to measure the X and Y coordinate positions of said table and tablE mounting, means to mount a photographic plate on said table, a microflasher projector mounted on said base over said table, and master aperture reticle means mounted under said projector, said master aperture reticle means comprising an aperture plate having a plurality of different size and shape apertures and driven means connected to said aperture reticle means to select one of said apertures, variable aperture plate means and place said one aperture on the optical axis of said projector.
Claim 2
Dependent Claim
128 words
Microcircuit art generating means comprising, a stable base, a precision X and Y coordinate table movably mounted on said base, means connected to drive said table, X and Y interfereometer means mounted on said base and adapted to measure the X and Y coordinate positions of said table and tablE mounting, means to mount a photographic plate on said table, a microflasher projector mounted on said base over said table, and master aperture reticle means mounted under said projector, said master aperture reticle means comprising an aperture plate having a plurality of different size and shape apertures and driven means connected to said aperture reticle means to select one of said apertures, variable aperture plate means and place said one aperture on the optical axis of said projector.
Claim 3
Dependent Claim
17 words
Apparatus as in claim 1 having X-Y control servo motor means to position said variable aperture generator.
Claim 4
Dependent Claim
28 words
Apparatus as in claim 1 having X-Y control servo motor means connected to said interferometer means and adapted to locate the X and Y coordinates of said table.
Claim 5
Dependent Claim
15 words
Apparatus as in claim 3 having means to provide output signals at predetermined coordinate positions.
Claim 6
Dependent Claim
21 words
Apparatus as in claim 1 wherein said master aperture reticle means comprises a library aperture plate, and a variable aperture generator.
Claim 7
Dependent Claim
37 words
Apparatus as in claim 5 wherein said variable aperture generator comprises a first pair of plates movable in a first direction and a second pair of plates movable in a second direction at 90* to first direction.
Claim 8
Dependent Claim
13 words
Apparatus as in claim 6 wherein said variable aperture generator is rotatably adjustable.
Claim 9
Dependent Claim
114 words
In a microflash projector apparatus of the type having X and Y table means for positioning a photographic plate mounted on said table, and first positioning means for positioning said X and Y table means; means to generate micro circuit art on said photographic plate comprising, circuit library aperture means having a plurality of apertures, second positioning means to position said aperture means to project particular images, program control means to control said first and second positioning means to position said X and Y table means and said circuit library aperture means to photographically generate predetermined apertures on said photographic plate, and variable aperture plate means mounted on the optical axis of said projector.
Claim 10
Dependent Claim
114 words
In a microflash projector apparatus of the type having X and Y table means for positioning a photographic plate mounted on said table, and first positioning means for positioning said X and Y table means; means to generate micro circuit art on said photographic plate comprising, circuit library aperture means having a plurality of apertures, second positioning means to position said aperture means to project particular images, program control means to control said first and second positioning means to position said X and Y table means and said circuit library aperture means to photographically generate predetermined apertures on said photographic plate, and variable aperture plate means mounted on the optical axis of said projector.
Claim 11
Dependent Claim
18 words
Apparatus as in claim 8 having variable aperture plate means mounted on the optical axis of said projector.
Claim 12
Dependent Claim
15 words
Apparatus as in claim 8 wherein said program control means controls said variable aperture means.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1975-12-05 | 1976-06-05 | 1976-12-05 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1979-12-05 | 1980-06-05 | 1980-12-05 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1983-12-05 | 1984-06-05 | 1984-12-05 | $7700.00 | Window Closed / Lapsed |